Abstract: The present disclosure provides an extreme ultraviolet (EUV) lithography system including a radiation source and an EUV control system integrated with the radiation source. The EUV control system includes a 3-dimensional diagnostic module (3DDM) designed to collect a laser beam profile of a laser beam from the radiation source in a 3-dimensional (3D) mode, an analysis module designed to analyze the laser beam profile, a database designed to store the laser beam profile, and an EUV control module designed to adjust the radiation source. The analysis module is coupled with the database and the EUV control module. The database is coupled with the 3DDM and the analysis module. The EUV control module is coupled with the analysis module and the radiation source.

Abstract: Most milk products in the market are promoted in terms of their nutritional value, rather than the function thereof. For the few products claiming to have a special function, the function comes from substances added to the products rather than from the milk material per se. Some products are claimed to have low lactose content, but there are no milk products in the market that have both low lactose content and high galactooligosaccharide content. The invention is cost effective as compared with milk products with added functional substances. The subject invention relates to a process for production of a milk product enhanced with galactooligosaccharide, characterized in that lactase is used to treat milk raw materials. The subject invention further relates to the milk product of the process of the invention, whose galactooligosaccharide content is at function level.