Abstract: An inspection system and an inspection method for at least one supporting beam include the steps of setting a lateral surface of one supporting beam as a reference point for detecting an offset amount; applying a predetermined force respectively to the supporting beams in sequence in a moving direction; detecting the offset amount of the supporting beam as applied by the predetermined force; and, acquiring an inspection result by a calculation based on the reference point and the offset amount. The inspection system includes a pushing member, a driving module, and an offset sensor. The pushing member is used for applying a predetermined force to the supporting beam. The driving module connects to the pushing member for driving the pushing member to move toward the supporting beam. The offset sensor is used for detecting an offset amount of the supporting beam as applied by the predetermined force.

Abstract: A door locking mechanism and semiconductor container using the same include door panel, cover, and locking module. The door panel has a first stop structure. The cover and the door panel define an accommodating space for receiving the locking module. The locking module includes rotating member, holding member, and elastic member. The elastic member is disposed on the holding member and has a second stop structure near the first stop structure. The elastic member is disposed between the holding and the rotating member. The elastic member is compressed when a force is applied to the holding member, and the second stop structure detaches from a limitation state with the first stop structure for allowing a rotating operation of the rotating member. The elastic member elastically restores when the force is removed, and the second stop structure returns to the limitation state for limiting the rotating operation.

Abstract: A holding device for a top-opening substrate container includes a holding assembly for pushing a substrate actuator disposed at a substrate to operate. The holding assembly includes a holding body and a pushing actuator. The pushing actuator includes a first guiding sloped surface for pressing against a second guiding sloped surface of an inner surface of a container door structure. The first guiding sloped surface causing corresponding pushing and displacement between the first guiding sloped surface and the second guiding sloped surface according to a supporting force of the container door structure. A pushing section is connected to the first guiding sloped surface, and capable of correspondingly pushing the substrate actuator to operate according to a level of the pushing and displacement of the first guiding sloped surface, such that the substrate actuator displaces substrates and stacks the substrates with another in layers.

Abstract: A supporting structure and an inspection equipment thereof and a calibrating tool for the inspection equipment include backbone and parallel blocks in the supporting structure. The receiving trench is defined between two adjacent supporting portions on the backbone for receiving supporter. Each supporting portion has a first limiting portion and the supporter has a second limiting portion. The parallel block is disposed between the first and the second limiting portion to restrain relative movement of the supporter. The inspection equipment is used for inspecting the supporting structure and includes plural inspection regions for inspecting the deviation amount of the supporter based on how much the moving door travels towards the substrate carrier. The calibrating tool is used for calibrating the inspection equipment. Whether the inspection surface conforms with a calibration condition is inspected through the inspection regions based on how much the moving door travels toward the calibrating tool.

Abstract: A top-opening substrate carrier comprises a container body, a door member and at least one latching mechanism. The latching mechanism includes a rotary drive member, a first driven cam, a second driven cam, a first connecting rod, a second connecting rod, two longitudinal latching arms and two lateral latching arms. The first driven cam and the second driven cam are disposed at two sides of the rotary drive member. When the rotary drive member is rotated by force, it links and activates the first connecting rod and the second connecting rod to synchronously drive the first driven cam and the second driven cam to rotate, thereby driving the two longitudinal latching arms and the two lateral latching arms to project towards locking holes of the container body and locked, or retract from the locking holes of the container body and unlocked.

Abstract: A carrier board conveying box with a reinforced structure comprises a container body, two clamping parts, and at least two reinforced structures. The container body has a top plate, a bottom plate, a plurality of side plates connecting the top plate and the bottom plate and a side opening. The top plate, the bottom plate, and the side plates are clamped to form an accommodating space. Two clamping parts are respectively disposed at two opposite sides of the container body. At least two reinforced structures are respectively disposed at the two opposite sides of the container body, and each of the reinforced structures is adjacent to a position of the side opening. The carrier board conveying box with a reinforced structure solves the problem of container distortion and deformation of the container body caused by load factors because of repeatedly bearing the weight of the carrier boards during transfer.

Abstract: A top-opening substrate carrier comprises a container body, a door member and at least one latching mechanism. The latching mechanism includes a rotary drive member, a first driven cam, a second driven cam, a first connecting rod, a second connecting rod, two longitudinal latching arms and two lateral latching arms. The first driven cam and the second driven cam are disposed at two sides of the rotary drive member. When the rotary drive member is rotated by force, it links and activates the first connecting rod and the second connecting rod to synchronously drive the first driven cam and the second driven cam to rotate, thereby driving the two longitudinal latching arms and the two lateral latching arms to project towards locking holes of the container body and locked, or retract from the locking holes of the container body and unlocked.

Abstract: A door locking mechanism and semiconductor container using the same include door panel, cover, and locking module. The door panel has a first stop structure. The cover and the door panel define an accommodating space for receiving the locking module. The locking module includes rotating member, holding member, and elastic member. The elastic member is disposed on the holding member and has a second stop structure near the first stop structure. The elastic member is disposed between the holding and the rotating member. The elastic member is compressed when a force is applied to the holding member, and the second stop structure detaches from a limitation state with the first stop structure for allowing a rotating operation of the rotating member. The elastic member elastically restores when the force is removed, and the second stop structure returns to the limitation state for limiting the rotating operation.