Abstract: A semiconductor device includes a semiconductor stack, an insulating structure, a metal oxide structure and a metal structure. The semiconductor stack includes a first semiconductor structure, a second semiconductor structure and an active structure located between the first semiconductor structure and the second semiconductor structure. The insulating structure is disposed below the first semiconductor structure and comprising a first opening and a second opening. The metal oxide structure is disposed below the insulating structure and located in the first opening, and contacts the semiconductor stack to form a first contact surface therebetween. The metal structure is located in the second opening, and contacts the semiconductor stack to form a second contact surface therebetween. The first contact surface is separated from the second contact surface.

Abstract: A semiconductor device is provided, which includes a semiconductor epitaxial structure, a metal contact structure, and a metal oxide layer. The semiconductor epitaxial structure includes an active structure and a semiconductor contact layer located on the active structure along a vertical direction. The metal contact structure directly contacts the semiconductor contact layer. The metal oxide layer is overlapped with the metal contact structure in a horizontal direction. The metal oxide layer and the metal contact structure are separated in the horizontal direction.