Abstract: A novel planar meglev positioning system of the present invention mainly comprises: a platform, which has three hanging arms at the edge, and each hanging arm has a permanent magnet at the end; three impelling sets which set outside of the permanent magnet located at the end of each hanging arm, and there are impelling coils setting on each impelling set; three maglev sets, which are set corresponding each hanging arms, and there are maglev coils and permanent magnets setting on each maglev set. Due to the maglev force from the maglev coils which input controlling current, and impelling force from the impelling coils which input controlling currents, it could control the platform that enables to do 6 DOF position moving and achieve the large moving range and the motion of 6DOF with high accuracy positioning.