Abstract: A method of forming an undercut microstructure includes: forming an etch mask on a top surface of a substrate; forming, on a top surface of the etch mask, an ion implantation mask having a top surface that is smaller than the top surface of the etch mask and that does not extend beyond the top surface of the etch mask; ion implanting the substrate in the presence of the etch mask and the ion implantation mask so that a damaged region is generated at a depth below an area of the surface that is not masked by the ion implantation mask; and etching the surface of the substrate until the damaged region is removed.

Abstract: A method of forming an undercut microstructure includes: forming an etch mask on a top surface of a substrate; forming, on a top surface of the etch mask, an ion implantation mask having a top surface that is smaller than the top surface of the etch mask and that does not extend beyond the top surface of the etch mask; ion implanting the substrate in the presence of the etch mask and the ion implantation mask so that a damaged region is generated at a depth below an area of the surface that is not masked by the ion implantation mask; and etching the surface of the substrate until the damaged region is removed.

Abstract: A method and a device for detecting object properties using electro-optically modulated surface plasmon resonance (SPR) based on phase detection is disclosed. In the case of a surface plasmon resonance sensing device according to the present invention, the voltage is applied on the sensing device made of an electro-optic material to modulate the surface plasmon resonance condition by varying the wavevector of the incident lightwave. The relation between the phase of output optical wave and the applied voltage is measured, and the solution concentration or the material property is obtained by using the slope of a regression straight line of this relations. The invention can be used in the experimental arrangements of the attenuated-total-reflection (ATR) structure and the optical waveguide structure, and has advantages of high sensitivity, high stability, small bulk, low equipment cost, etc.

Abstract: A method and a device for detecting object properties using electro-optically modulated surface plasmon resonance (SPR) based on phase detection is disclosed. In the case of a surface plasmon resonance sensing device according to the present invention, the voltage is applied on the sensing device made of an electro-optic material to modulate the surface plasmon resonance condition by varying the wavevector of the incident lightwave. The relation between the phase of output optical wave and the applied voltage is measured, and the solution concentration or the material property is obtained by using the slope of a regression straight line of this relations. The invention can be used in the experimental arrangements of the attenuated-total-reflection (ATR) structure and the optical waveguide structure, and has advantages of high sensitivity, high stability, small bulk, low equipment cost, etc.

Abstract: The present invention provides a sensing method and device based on sensing surface plasmon resonance which can be controlled by the electro-optical modulation. In the case of an integrated-optic device according to the present invention, a voltage is applied on an electro-optical crystal substrate surface with waveguides to modulate the surface plasmon resonance condition on the sensing waveguide. Concentrations of chemicals or bio-chemicals contained in a sample placed on the sensing waveguide can be determined by measuring the dependence of the output light intensity on the applied voltage. Because spectrometer is not needed for measuring the surface plasmon resonance wavelength, drawbacks of conventional integrated-optic surface plasmon resonance sensors, like limited sensitivity, high cost and restrictions on circumstances for measuring, are avoided. The present invention can be applied for real-time dynamic analyses on sample's changes.

Abstract: The present invention provides a sensing method and device based on sensing surface plasmon resonance which can be controlled by the electro-optical modulation. In the case of an integrated-optic device according to the present invention, a voltage is applied on an electro-optical crystal substrate surface with waveguides to modulate the surface plasmon resonance condition on the sensing waveguide. Concentrations of chemicals or bio-chemicals contained in a sample placed on the sensing waveguide can be determined by measuring the dependence of the output light intensity on the applied voltage. Because spectrometer is not needed for measuring the surface plasmon resonance wavelength, drawbacks of conventional integrated-optic surface plasmon resonance sensors, like limited sensitivity, high cost and restrictions on circumstances for measuring, are avoided. The present invention can be applied for real-time dynamic analyses on sample's changes.