Abstract: A fluorine gas generator for generating highly pure fluorine gas in a stable and safe manner by electrolyzing an electrolytic bath 2 comprising hydrogen fluoride in the form of a molten mixed gas is provided which comprises an electrolytic cell 1 divided, by a partition wall 16, into an anode chamber 3 in which an anode is disposed and a cathode chamber 4 in which a cathode is disposed, pressure maintenance means for maintaining the anode chamber 3 and cathode chamber 4 at atmospheric pressure, and liquid level sensing means 5, 6 capable of sensing the levels of the electrolytic bath 2 in the anode chamber 3 and in the cathode chamber 4, respectively, at three or more level stages.

Abstract: A carbon electrode for producing gaseous nitrogen trifluoride comprising a dense texture with an average pore size of 0.5 ?m or less is provided. The carbon electrode contains a carbonaceous material, and 3 to 10 wt % of at least one selected from magnesium fluoride and aluminum fluoride which have a melting point not lower than the baking temperature of the carbonaceous material.

Abstract: It is an object of the present invention to produce a carbon electrode having a texture with decreased pores and having relatively high mechanical strength by only being subjected to a process where a specified metal fluoride is mixed with a carbon material, then the mixture is baked, and to provide a carbon electrode for producing gaseous nitrogen trifluoride having a long life without the polarization of the carbon electrode even in any case of an NH4F—KF—HF series and an NH4F—HF series. The carbon electrode for producing gaseous nitrogen trifluoride of the present invention has a dense texture with an average pore size of 0.5 ?m or less. It is preferable that the carbon electrode contains a carbonaceous material, and at least one of more kinds selected from magnesium fluoride and aluminum fluoride which have a melting point not lower than the baking temperature of the carbonaceous material.

Abstract: A fluorine gas generator for generating highly pure fluorine gas in a stable and safe manner by electrolyzing an electrolytic bath 2 comprising hydrogen fluoride in the form of a molten mixed gas is provided which comprises an electrolytic cell 1 divided, by a partition wall 16, into an anode chamber 3 in which an anode is disposed and a cathode chamber 4 in which a cathode is disposed, pressure maintenance means for maintaining the anode chamber 3 and cathode chamber 4 at atmospheric pressure, and liquid level sensing means 5, 6 capable of sensing the levels of the electrolytic bath 2 in the anode chamber 3 and in the cathode chamber 4, respectively, at three or more level stages.