Patents by Inventor Uday K. Sengupta
Uday K. Sengupta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 5048041Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member.Type: GrantFiled: July 10, 1990Date of Patent: September 10, 1991Assignee: Cymer Laser TechnologiesInventors: Robert P. Akins, Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom
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Patent number: 5033055Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure an with the other electrode mounted on a main insulator member.Type: GrantFiled: July 10, 1990Date of Patent: July 16, 1991Assignee: Cymer Laser TechnologiesInventors: Robert P. Akins, Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom
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Patent number: 5029177Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member.Type: GrantFiled: July 10, 1990Date of Patent: July 2, 1991Assignee: Cymer Laser TechnologiesInventors: Robert P. Akins, Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom
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Patent number: 5027366Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member.Type: GrantFiled: July 10, 1990Date of Patent: June 25, 1991Assignee: Cymer Laser TechnologiesInventors: Robert P. Akins, Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom
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Patent number: 5023884Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative the housing structure.Type: GrantFiled: July 10, 1990Date of Patent: June 11, 1991Assignee: Cymer Laser TechnologiesInventors: Robert P. Akins, Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom
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Patent number: 5018162Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member.Type: GrantFiled: July 10, 1990Date of Patent: May 21, 1991Assignee: Cymer Laser TechnologiesInventors: Robert P. Akins, Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom
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Patent number: 5018161Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member.Type: GrantFiled: July 10, 1990Date of Patent: May 21, 1991Assignee: Cymer Laser TechnologiesInventors: Robert P. Akins, Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom
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Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser
Patent number: 4959840Abstract: A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member.Type: GrantFiled: January 15, 1988Date of Patent: September 25, 1990Assignee: Cymer Laser TechnologiesInventors: Robert P. Akins, Donald G. Larson, Uday K. Sengupta, Richard L. Sandstrom -
Patent number: 4272157Abstract: A multi-stable optical device and system which utilizes an active optical element such as a spatial light modulator (SLM) in a feedback path configuration. The elementary system consists of a pair of image element (pixels) on the SLM whose input and outputs are coupled to each other by purely optical means. In another arrangement, multi-stable performance is achieved by optical path geometry defining a single pixel which performs in conjunction with a feedback path. Analysis is provided identifying the equilibrium states of the system as well as those equilibrium states which are stable in nature.Type: GrantFiled: March 28, 1979Date of Patent: June 9, 1981Assignee: The Ohio State UniversityInventors: Stuart A. Collins, Jr., Uday K. Sengupta, Ulrich H. Gerlach