Patents by Inventor Uday Shah

Uday Shah has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10897009
    Abstract: Resistive memory cells, precursors thereof, and methods of making resistive memory cells are described. In some embodiments, the resistive memory cells are formed from a resistive memory precursor that includes a switching layer precursor containing a plurality of oxygen vacancies that are present in a controlled distribution therein, optionally without the use of an oxygen exchange layer. In these or other embodiments, the resistive memory precursors described may include a second electrode formed on a switching layer precursor, wherein the second electrode is includes a second electrode material that is conductive but which does not substantially react with oxygen. Devices including resistive memory cells are also described.
    Type: Grant
    Filed: May 17, 2019
    Date of Patent: January 19, 2021
    Assignee: Intel Corporation
    Inventors: Niloy Mukherjee, Ravi Pillarisetty, Prashant Majhi, Uday Shah, Ryan E Arch, Markus Kuhn, Justin S. Brockman, Huiying Liu, Elijah V Karpov, Kaan Oguz, Brian S. Doyle, Robert S. Chau
  • Patent number: 10840431
    Abstract: An embodiment includes an apparatus comprising: a memory array comprising: a selector switch including top and bottom electrodes, a metal layer, and a solid electrolyte layer; a memory cell in series with the selector switch; bit and write lines, wherein (a) (i) the top electrode couples to one of the bit and write lines and the bottom electrode couples to another of the bit and write lines, and (a) (ii) the memory cell is between one of the top and bottom electrodes and one of the bit and write lines; wherein (b) (i) the metal layer includes silver (Ag), and (b) (ii) Ag ions from the metal layer form a conductive path in the SE layer when the top electrode is biased and disband the conductive path when the top electrode is not biased. Other embodiments Electrode are described herein.
    Type: Grant
    Filed: March 31, 2016
    Date of Patent: November 17, 2020
    Assignee: Intel Corporation
    Inventors: Elijah V. Karpov, Ravi Pillarisetty, Prashant Majhi, James S. Clarke, Uday Shah
  • Patent number: 10825861
    Abstract: An embodiment includes an apparatus comprising: first and second electrodes; first and second insulation layers between the first and second electrodes; and a middle layer between the first and second insulation layers; wherein (a) the middle layer includes material that has a first resistance when the first electrode is biased at a first voltage level and a second resistance when the first electrode is biased at a second voltage level; (b) the first resistance is less than the second resistance and the first voltage level is greater than the second voltage level. Other embodiments are described herein.
    Type: Grant
    Filed: March 31, 2016
    Date of Patent: November 3, 2020
    Assignee: Intel Corporation
    Inventors: Elijah V. Karpov, Prashant Majhi, Ravi Pillarisetty, Uday Shah, James S. Clarke
  • Patent number: 10734513
    Abstract: Heterojunction tunnel field effect transistors (hTFETs) incorporating one or more oxide semiconductor and a band offset between at least one of a channel material, a source material of a first conductivity type, and drain of a second conductivity type, complementary to the first. In some embodiments, at least one of p-type material, channel material and n-type material comprises an oxide semiconductor. In some embodiments, two or more of p-type material, channel material, and n-type material comprises an oxide semiconductor. In some n-type hTFET embodiments, all of p-type, channel, and n-type materials are oxide semiconductors with a type-II or type-III band offset between the p-type and channel material.
    Type: Grant
    Filed: November 16, 2015
    Date of Patent: August 4, 2020
    Assignee: Intel Corporation
    Inventors: Prashant Majhi, Jack T. Kavalieros, Elijah V. Karpov, Uday Shah, Ravi Pillarisetty
  • Patent number: 10706921
    Abstract: One embodiment provides an apparatus. The apparatus includes a bipolar junction transistor (BJT) and an integrated resistive element. The BJT includes a base contact, a base region, a collector contact, a collector region and an integrated emitter contact. The integrated resistive element includes a resistive layer and an integrated electrode. The resistive element is positioned between the base region and the integrated emitter contact.
    Type: Grant
    Filed: April 1, 2016
    Date of Patent: July 7, 2020
    Assignee: INTEL CORPORATION
    Inventors: Elijah V. Karpov, Ravi Pillarisetty, Prashant Majhi, Niloy Mukherjee, Uday Shah
  • Patent number: 10665781
    Abstract: An embodiment includes a programmable metallization cell (PMC) memory comprising: a top electrode and a bottom electrode; a metal layer between the top and bottom electrodes; and a solid electrolyte (SE) layer between the metal layer and the bottom electrode; wherein (a) the metal layer includes an alloy of first and second metals, and (b) metal ions from the first metal form a conductive path in the SE layer when the top electrode is positively biased and disband the conductive path when the top electrode is negatively biased. Other embodiments are described herein.
    Type: Grant
    Filed: March 31, 2016
    Date of Patent: May 26, 2020
    Assignee: Intel Corporation
    Inventors: Elijah V. Karpov, Jeffery D. Bielefeld, James S. Clarke, Ravi Pillarisetty, Uday Shah
  • Patent number: 10658586
    Abstract: Embodiments of the present invention include RRAM devices and their methods of fabrication. In an embodiment, a resistive random access memory (RRAM) cell includes a conductive interconnect disposed in a dielectric layer above a substrate. An RRAM device is coupled to the conductive interconnect. An RRAM memory includes a bottom electrode disposed above the conductive interconnect and on a portion of the dielectric layer. A conductive layer is formed on the bottom electrode layer. The conductive layer is separate and distinct from the bottom electrode layer. The conductive layer further includes a material that is different from the bottom electrode layer. A switching layer is formed on the conductive layer. An oxygen exchange layer is formed on the switching layer and a top electrode is formed on the oxygen exchange layer.
    Type: Grant
    Filed: July 2, 2016
    Date of Patent: May 19, 2020
    Assignee: Intel Corporation
    Inventors: James S. Clarke, Ravi Pillarisetty, Uday Shah, Tejaswi K. Indukuri, Niloy Mukherjee, Elijah V. Karpov, Prashant Majhi
  • Patent number: 10573809
    Abstract: An embodiment includes a memory comprising: a top electrode and a bottom electrode; an oxygen exchange layer (OEL) between the top and bottom electrodes; and an oxide layer between the OEL and the bottom electrode; wherein the oxide layer includes Deuterium and oxygen vacancies. Other embodiments are described herein.
    Type: Grant
    Filed: March 31, 2016
    Date of Patent: February 25, 2020
    Assignee: Intel Corporation
    Inventors: Prashant Majhi, Ravi Pillarisetty, Uday Shah, Elijah V. Karpov, Niloy Mukherjee, Pulkit Jain, Aravind S. Killampalli, Jay P. Gupta, James S. Clarke
  • Patent number: 10541014
    Abstract: Memory cells with improved tunneling magnetoresistance ratio (TMR) are disclosed. In some embodiments such devices may include a magnetoresistive tunnel junction (MTJ) element coupled in series with a tunneling magnetoresistance enhancement element (TMRE). The MTJ element and TMRE may each be configured to transition between high and low resistance states, e.g., in response to a voltage. In some embodiments, the MTJ and TMRE are configure such that when a read voltage is applied to the cell while the MTJ is in its low resistance state the TMRE is driven to is low resistance state, and when such voltage is applied while the MTJ is in its high resistance state, the TMRE remains in its high resistance state. Devices and systems including such memory cells are also disclosed.
    Type: Grant
    Filed: December 24, 2015
    Date of Patent: January 21, 2020
    Assignee: Intel Corporation
    Inventors: Brian S. Doyle, Elijah V. Karpov, Kaan Oguz, Kevin P. O'Brien, Charles C. Kuo, Mark L. Doczy, Uday Shah, Yih Wang
  • Patent number: 10516104
    Abstract: An embodiment includes a memory comprising: a top electrode and a bottom electrode; an oxygen exchange layer (OEL) between the top and bottom electrodes; a first oxide layer between the OEL and the bottom electrode; and a second oxide layer between the first oxide layer and the bottom electrode; wherein (a) a first plurality of oxygen vacancies are within the first oxide layer and are adjacent the OEL at a first concentration, (b) a second plurality of oxygen vacancies are within the first oxide layer and are adjacent the second oxide layer at a second concentration that is less than the first concentration, and (c) the first oxide layer includes a first oxide material different from a second oxide material included in the second oxide layer. Other embodiments are described herein.
    Type: Grant
    Filed: September 25, 2015
    Date of Patent: December 24, 2019
    Assignee: Intel Corporation
    Inventors: Prashant Majhi, Elijah V. Karpov, Uday Shah, Ravi Pillarisetty, Niloy Mukherjee
  • Patent number: 10516109
    Abstract: Resistive memory cells, precursors thereof, and methods of making resistive memory cells are described. In some embodiments, the resistive memory cells are formed from a resistive memory precursor that includes a switching layer precursor containing a plurality of oxygen vacancies that are present in a controlled distribution therein, optionally without the use of an oxygen exchange layer. In these or other embodiments, the resistive memory precursors described may include a second electrode formed on a switching layer precursor, wherein the second electrode is includes a second electrode material that is conductive but which does not substantially react with oxygen. Devices including resistive memory cells are also described.
    Type: Grant
    Filed: December 24, 2014
    Date of Patent: December 24, 2019
    Assignee: Intel Corporation
    Inventors: Niloy Mukherjee, Ravi Pillarisetty, Prashant Majhi, Uday Shah, Ryan E Arch, Markus Kuhn, Justin S. Brockman, Huiying Liu, Elijah V Karpov, Kaan Oguz, Brian S. Doyle, Robert S. Chau
  • Patent number: 10497871
    Abstract: An embodiment includes a resistive random access memory (RRAM) comprising: top and bottom electrodes; first and second oxygen exchange layers (OELs) between the top and bottom electrodes; an oxide layer between the first and second OELs; wherein (a) first oxygen vacancies are within an upper third of the oxide layer at a first concentration, (b) second oxygen vacancies are within a lower third of the oxide layer at a second concentration, and (c) third oxygen vacancies are within a middle third of the oxide layer at a third concentration that is less than either of the first and second concentrations. Other embodiments are described herein.
    Type: Grant
    Filed: December 26, 2015
    Date of Patent: December 3, 2019
    Assignee: Intel Corporation
    Inventors: Ravi Pillarisetty, Prashant Majhi, Uday Shah, Niloy Mukherjee, Elijah V. Karpov
  • Publication number: 20190348604
    Abstract: Resistive memory cells, precursors thereof, and methods of making resistive memory cells are described. In some embodiments, the resistive memory cells are formed from a resistive memory precursor that includes a switching layer precursor containing a plurality of oxygen vacancies that are present in a controlled distribution therein, optionally without the use of an oxygen exchange layer. In these or other embodiments, the resistive memory precursors described may include a second electrode formed on a switching layer precursor, wherein the second electrode is includes a second electrode material that is conductive but which does not substantially react with oxygen. Devices including resistive memory cells are also described.
    Type: Application
    Filed: May 17, 2019
    Publication date: November 14, 2019
    Applicant: INTEL CORPORATION
    Inventors: NILOY MUKHERJEE, RAVI PILLARISETTY, PRASHANT MAJHI, UDAY SHAH, RYAN E ARCH, MARKUS KUHN, JUSTIN S. BROCKMAN, HUIYING LIU, ELIJAH V KARPOV, KAAN OGUZ, BRIAN S. DOYLE, ROBERT S. CHAU
  • Patent number: 10439134
    Abstract: Techniques are disclosed for forming non-planar resistive memory cells, such as non-planar resistive random-access memory (ReRAM or RRAM) cells. The techniques can be used to reduce forming voltage requirements and/or resistances involved (such as the resistance during the low-resistance state) relative to planar resistive memory cells for a given memory cell space. The non-planar resistive memory cell includes a first electrode, a second electrode, and a switching layer disposed between the first and second electrodes. The second electrode may be substantially between opposing portions of the switching layer, and the first electrode may be substantially adjacent to at least two sides of the switching layer, after the non-planar resistive memory cell is formed. In some cases, an oxygen exchange layer (OEL) may be disposed between the switching layer and one of the first and second electrodes to, for example, increase flexibility in incorporating materials in the cell.
    Type: Grant
    Filed: March 25, 2014
    Date of Patent: October 8, 2019
    Assignee: INTEL CORPORATION
    Inventors: Prashant Majhi, Elijah V. Karpov, Uday Shah, Niloy Mukherjee, Charles C. Kuo, Ravi Pillarisetty, Brian S. Doyle, Robert S. Chau
  • Patent number: 10424620
    Abstract: A non-volatile memory device is disclosed, in which a ballast resistor layer is disposed between the selector element and memory element of a given memory cell of the device. The material composition of the ballast resistor can be customized, as desired, and in some cases may be, for example, a sub-stoichiometric oxide of hafnium oxide (HfOx), tantalum oxide (TaOx), or titanium dioxide (TiOx), or an alloy of any thereof. In accordance with some embodiments, the integrated ballast resistor may serve the function of damping current surge related to the snapback characteristics of the selector element, preserving control of memory element switching. In accordance with some embodiments, an integrated ballast resistor layer provided as described herein may be implemented, for example, in any of a wide range of resistive random-access memory (RRAM) architectures and spin-transfer torque magnetic random-access memory (STTMRAM) architectures, including cross-point implementations of these types of architectures.
    Type: Grant
    Filed: December 23, 2015
    Date of Patent: September 24, 2019
    Assignee: INTEL CORPORATION
    Inventors: Prashant Majhi, Elijah V. Karpov, Ravi Pillarisetty, Uday Shah, Niloy Mukherjee
  • Patent number: 10396211
    Abstract: A microelectronic device having a functional metal oxide channel may be fabricated on a microelectronic substrate that can be utilized in very large scale integration, such as a silicon substrate, by forming a buffer transition layer between the microelectronic substrate and the functional metal oxide channel. In one embodiment, the microelectronic device may be a microelectronic transistor with a source structure and a drain structure formed on the buffer transition layer, wherein the source structure and the drain structure abut opposing sides of the functional metal oxide channel and a gate dielectric is disposed between a gate electrode and the functional metal oxide channel. In another embodiment, the microelectronic device may be a two-terminal microelectronic device.
    Type: Grant
    Filed: July 31, 2015
    Date of Patent: August 27, 2019
    Assignee: Intel Corporation
    Inventors: Elijah V. Karpov, Prashant Majhi, Roza Kotlyar, Niloy Mukherjee, Charles C. Kuo, Uday Shah, Ravi Pillarisetty, Robert S. Chau
  • Patent number: 10388869
    Abstract: Thin film resistive memory material stacks including at least one of a high work function metal oxide at an interface of a first electrode and a thin film memory material, and a low work function rare earth metal at an interface of a second electrode and the thin film memory material. The high work function metal oxide provides a good Schottky barrier height relative to memory material for high on/off current ratio. Compatibility of the metal oxide with switching oxide reduces cycling loss of oxygen/vacancies for improved memory device durability. The low work function rare earth metal provides high oxygen solubility to enhance vacancy creation within the memory material in as-deposited state for low forming voltage requirements while providing an ohmic contact to the resistive memory material.
    Type: Grant
    Filed: September 25, 2014
    Date of Patent: August 20, 2019
    Assignee: Intel Corporation
    Inventors: Prashant Majhi, Elijah V. Karpov, Niloy Mukherjee, Ravi Pillarisetty, Uday Shah, Brian S. Doyle, Robert S. Chau
  • Patent number: 10355205
    Abstract: Resistive memory cells are described. In some embodiments, the resistive memory cells include a switching layer having an inner region in which one or more filaments is formed. In some instances, the filaments is/are formed only within the inner region of the switching layer. Methods of making such resistive memory cells and devices including such cells are also described.
    Type: Grant
    Filed: December 18, 2014
    Date of Patent: July 16, 2019
    Assignee: Intel Corporation
    Inventors: Prashant Majhi, Ravi Pillarisetty, Niloy Mukherjee, Uday Shah, Elijah V. Karpov, Brian S. Doyle, Robert S. Chau
  • Publication number: 20190214559
    Abstract: Embodiments of the present invention include RRAM devices and their methods of fabrication. In an embodiment, a resistive random access memory (RRAM) cell includes a conductive interconnect disposed in a dielectric layer above a substrate. An RRAM device is coupled to the conductive interconnect. An RRAM memory includes a bottom electrode disposed above the conductive interconnect and on a portion of the dielectric layer. A conductive layer is formed on the bottom electrode layer. The conductive layer is separate and distinct from the bottom electrode layer. The conductive layer further includes a material that is different from the bottom electrode layer. A switching layer is formed on the conductive layer. An oxygen exchange layer is formed on the switching layer and a top electrode is formed on the oxygen exchange layer.
    Type: Application
    Filed: July 2, 2016
    Publication date: July 11, 2019
    Inventors: James S. CLARKE, Ravi PILLARISETTY, Uday SHAH, Tejaswi K. INDUKURI, Niloy MUKHERJEE, Elijah V. KARPOV, Prashant MAJHI
  • Patent number: 10340275
    Abstract: A thin film transistor is deposited over a portion of a metal layer over a substrate. A memory element is coupled to the thin film transistor to provide a first memory cell. A second memory cell is over the first memory. A logic block is coupled to at least the first memory cell.
    Type: Grant
    Filed: June 23, 2015
    Date of Patent: July 2, 2019
    Assignee: Intel Corporation
    Inventors: Elijah V. Karpov, Jack T. Kavalieros, Robert S. Chau, Niloy Mukherjee, Rafael Rios, Prashant Majhi, Van H. Le, Ravi Pillarisetty, Uday Shah, Gilbert Dewey, Marko Radosavljevic