Patents by Inventor Udo Bischof
Udo Bischof has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8304845Abstract: An integrated component having a substrate, the substrate having a cavity which surrounds a mechanical structure. The cavity is filled by a fluid of a specific composition under a specific pressure, and the mechanical properties of the mechanical structure are influenced by the fluid.Type: GrantFiled: November 24, 2006Date of Patent: November 6, 2012Assignee: Robert Bosch GmbHInventors: Udo Bischof, Holger Hoefer, Volker Schmitz, Axel Grosse, Lutz Mueller, Ralf Hausner
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Publication number: 20090174148Abstract: An integrated component having a substrate, the substrate having a cavity which surrounds a mechanical structure. The cavity is filled by a fluid of a specific composition under a specific pressure, and the mechanical properties of the mechanical structure are influenced by the fluid.Type: ApplicationFiled: November 24, 2006Publication date: July 9, 2009Inventors: Udo Bischof, Holger Hoefer, Volker Schmitz, Axel Grosse, Lutz Mueller, Ralf Hausner
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Patent number: 7316161Abstract: A rotation rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated above a surface of a substrate; the Coriolis element being able to be induced to vibrate in parallel to a first axis (X); an excursion of the Coriolis element being detectable, based on a Coriolis force in a second axis (Y), which is provided to be essentially perpendicular to the first axis (X); the first and second axes (X, Y) being provided parallel to the surface of the substrate, wherein force-conveying means are provided, the means being provided to convey a dynamic force effect between the substrate and the Coriolis element.Type: GrantFiled: September 25, 2002Date of Patent: January 8, 2008Assignee: Robert Bosch GmbHInventors: Rainer Willig, Jochen Franz, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez, Dieter Maurer, Christian Doering, Wolfram Bauer, Udo Bischof, Reinhard Neul, Johannes Classen, Christoph Lang, Jens Frey
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Patent number: 7313958Abstract: A rotational rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated over a surface of a substrate; a driving arrangement being provided, by which the Coriolis element is induced to vibrations parallel to a first axis; a detection arrangement being provided, by which an excursion of the Coriolis elements is detectable on the basis of a Coriolis force in a second axis that is provided to be essentially perpendicular to the first axis; the first and second axis being parallel to the surface of the substrate; sensor elements that are designated to be at least partially movable with respect to the substrate being provided; a force-conveying arrangement being provided; the force-conveying arrangement being provided to convey a static force effect between the substrate and at least one of the sensor elements.Type: GrantFiled: September 25, 2002Date of Patent: January 1, 2008Assignee: Robert Bosch GmbHInventors: Rainer Willig, Jochen Franz, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez, Dieter Maurer, Christian Doering, Wolfram Bauer, Udo Bischof, Reinhard Neul, Johannes Classen, Christoph Lang, Jens Frey
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Patent number: 7270868Abstract: A component having a surface micromechanical structure containing both movable elements and immovable elements, and a method of manufacturing same are described. The surface micromechanical structure of the component is produced in a functional layer, which is connected to a substrate via at least one electrically non-conductive first insulation layer and at least one first sacrificial layer. The movable elements of the surface micromechanical structure are exposed by removing the first sacrificial layer. The first insulation layer is made of a material which is not substantially attacked by the process of removing the first sacrificial layer. Thus the removal of the sacrificial layer may be limited in a design-controlled manner. At the same time, a reliable electrical insulation of the surface micromechanical structure with respect to the substrate of the component and a reliable mechanical fastening of the immovable elements of the surface micromechanical structure to the substrate are ensured.Type: GrantFiled: July 14, 2003Date of Patent: September 18, 2007Assignee: Robert Bosch GmbHInventors: Thorsten Pannek, Udo Bischof, Silvia Kronmueller, Jens Frey, Ulf Wilhelm
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Patent number: 7134337Abstract: An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device.Type: GrantFiled: January 9, 2006Date of Patent: November 14, 2006Assignee: Robert Bosch GmbHInventors: Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez, Siegbert Goetz, Christian Doering, Michael Fehrenbach, Wolfram Bauer, Udo Bischof, Reinhard Neul, Karsten Funk, Markus Lutz, Gerhard Wucher, Jochen Franz
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Publication number: 20060107738Abstract: An exemplary embodiment of the present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element and a second Coriolis mass element which may be situated over a surface of a substrate. An exemplary embodiment of a micromechanical rotational rate sensor may have an activating device by which the first Coriolis mass element and the second Coriolis mass element are able to have vibrations activated along a first axis. An exemplary embodiment of a micromechanical rotational rate sensor may have a detection device by which deflections of the first Coriolis mass elements and of the second Coriolis element are able to be detected along a second axis, which is perpendicular to the first axis, on the basis of a correspondingly acting Coriolis force. The first axis and second axis may run parallel to the surface of the substrate. The detecting device may have a first detection mass device and a second detection mass device.Type: ApplicationFiled: January 9, 2006Publication date: May 25, 2006Inventors: Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez, Siegbert Goetz, Christian Doering, Michael Fehrenbach, Wolfram Bauer, Udo Bischof, Reinhard Neul, Karsten Funk, Markus Lutz, Gerhard Wucher, Jochen Franz
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Patent number: 6905615Abstract: A method of manufacturing a micromechanical component has the steps: providing a substrate having a front side and a back side; structuring the front side of the substrate; at least partially covering the structured front side of the substrate with a protective layer containing germanium; structuring the back of the substrate; and at least partially removing the protective layer containing germanium from the structured front side of the substrate.Type: GrantFiled: January 24, 2002Date of Patent: June 14, 2005Assignee: Robert Bosch GmbHInventors: Frank Fischer, Wilhelm Frey, Udo Bischof, Lars Metzger
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Publication number: 20040206176Abstract: A rotation rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated above a surface of a substrate; the Coriolis element being able to be induced to vibrate in parallel to a first axis (X); an excursion of the Coriolis element being detectable, based on a Coriolis force in a second axis (Y), which is provided to be essentially perpendicular to the first axis (X); the first and second axes (X, Y) being provided parallel to the surface of the substrate, wherein force-conveying means are provided, the means being provided to convey a dynamic force effect between the substrate and the Coriolis element.Type: ApplicationFiled: May 27, 2004Publication date: October 21, 2004Inventors: Rainer Willig, Jochen Franz, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez, Dieter Maurer, Christian Doering, Wolfram Bauer, Udo Bischof, Reinhard Neul, Johannes Classen, Christoph Lang, Jens Frey
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Publication number: 20040154398Abstract: The present invention creates a micromechanical rotational rate sensor having a first Coriolis mass element (2a) and a second Coriolis mass element (2b) which are situated over a surface of a substrate (100); having an activating device by which the first Coriolis mass element (2a) and the second Coriolis mass element (2b) are able to have vibrations activated along a first axis (x); and having a detection device by which deflections of the first Coriolis mass elements (2a) and of the second Coriolis element (2b) are able to be detected along a second axis (y), which is perpendicular to the first axis (x), on the basis of a correspondingly acting Coriolis force; the first axis (x) and second axis (y) running parallel to the surface of the substrate (100);Type: ApplicationFiled: April 2, 2004Publication date: August 12, 2004Inventors: Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez, Siegbert Goetz, Christian Doering, Michael Fehrenbach, Wolfram Bauer, Udo Bischof, Reinhard Neul, Karsten Funk, Markus Lutz, Gerhard Wucher, Jochen Franz
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Publication number: 20040123660Abstract: A rotational rate sensor having a substrate and a Coriolis element is proposed, the Coriolis element being situated over a surface of a substrate; a driving arrangement being provided, by which the Coriolis element is induced to vibrations parallel to a first axis; a detection arrangement being provided, by which an excursion of the Coriolis elements is detectable on the basis of a Coriolis force in a second axis that is provided to be essentially perpendicular to the first axis; the first and second axis being parallel to the surface of the substrate; sensor elements that are designated to be at least partially movable with respect to the substrate being provided; a force-conveying arrangement being provided; the force-conveying arrangement being provided to convey a static force effect between the substrate and at least one of the sensor elements.Type: ApplicationFiled: February 13, 2004Publication date: July 1, 2004Inventors: Rainer Willig, Jochen Franz, Burkhard Kuhlmann, Jorg Hauer, Udo-Martin Gomez, Dieter Maurer, Christian Doering, Wolfram Bauer, Udo Bischof, Reinhard Neul, Johannes Classen, Christoph Lang, Jens Frey
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Patent number: 6752017Abstract: A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements (100, 200) are coupled by a spring (52) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.Type: GrantFiled: March 19, 2003Date of Patent: June 22, 2004Assignee: Robert Bosch GmbHInventors: Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo Martin Gomez, Siegbert Goetz, Christian Doering, Michael Fehrenbach, Wolfram Bauer, Udo Bischof, Reinhard Neul, Karsten Funk, Markus Lutz, Gerhard Wucher, Jochen Franz
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Publication number: 20040081802Abstract: A component having a surface micromechanical structure containing both movable elements and immovable elements, and a method of manufacturing same are described. The surface micromechanical structure of the component is produced in a functional layer, which is connected to a substrate via at least one electrically non-conductive first insulation layer and at least one first sacrificial layer. The movable elements of the surface micromechanical structure are exposed by removing the first sacrificial layer. The first insulation layer is made of a material which is not substantially attacked by the process of removing the first sacrificial layer. Thus the removal of the sacrificial layer may be limited in a design-controlled manner. At the same time, a reliable electrical insulation of the surface micromechanical structure with respect to the substrate of the component and a reliable mechanical fastening of the immovable elements of the surface micromechanical structure to the substrate are ensured.Type: ApplicationFiled: July 14, 2003Publication date: April 29, 2004Inventors: Thorsten Pannek, Udo Bischof, Silvia Kronmueller, Jens Frey, Ulf Wilhelm
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Patent number: 6705164Abstract: A yaw-rate sensor including a first and a second Coriolis element that are arranged side-by-side above a surface of a substrate. The Coriolis elements are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements occur in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.Type: GrantFiled: March 19, 2003Date of Patent: March 16, 2004Assignee: Robert Bosch GmbHInventors: Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez, Siegbert Goetz, Christian Doering, Michael Fehrenbach, Wolfram Bauer, Udo Bischof, Reinhard Neul, Karsten Funk, Markus Lutz, Gerhard Wucher, Jochen Franz
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Patent number: 6691571Abstract: An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.Type: GrantFiled: May 29, 2003Date of Patent: February 17, 2004Assignee: Robert Bosch GmbHInventors: Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez, Siegbert Goetz, Christian Doering, Michael Fehrenbach, Wolfram Bauer, Udo Bischof, Reinhard Neul, Karsten Funk, Markus Lutz, Gerhard Wucher, Jochen Franz
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Publication number: 20030183007Abstract: An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.Type: ApplicationFiled: May 29, 2003Publication date: October 2, 2003Inventors: Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez, Siegbert Goetz, Christian Doering, Michael Fehrenbach, Wolfram Bauer, Udo Bischof, Reinhard Neul, Karsten Funk, Markus Lutz, Gerhard Wucher, Jochen Franz
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Publication number: 20030164040Abstract: A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis which is perpendicular to the first axis. The first and second Coriolis elements (100, 200) are coupled by a spring (52) which is designed to be yielding in the first and in the second axis. Thus, the frequencies of the oscillations in the two axes are developed differently for the in-phase and antiphase oscillation.Type: ApplicationFiled: March 19, 2003Publication date: September 4, 2003Inventors: Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez, Siegbert Goetz, Christian Doering, Michael Fehrenbach, Wolfram Bauer, Udo Bischof, Reinhard Neul, Karsten Funk, Markus Lutz, Gerhard Wucher, Jochen Franz
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Publication number: 20030154788Abstract: A yaw-rate sensor is proposed having a first and a second Coriolis element (100, 200) which are arranged side-by-side above a surface (1) of a substrate. The Coriolis elements (100, 200) are induced to oscillate parallel to a first axis Y. Due to a Coriolis force, the Coriolis elements (100, 200) are deflected in a second axis X which is perpendicular to the first axis Y. The oscillations of the first and second Coriolis elements (100, 200) take place in phase opposition to each other on paths which, without the effect of a Coriolis force, are two straight lines parallel to each other.Type: ApplicationFiled: March 19, 2003Publication date: August 21, 2003Inventors: Rainer Willig, Andreas Thomae, Burkhard Kuhlmann, Joerg Hauer, Udo-Martin Gomez, Siegbert Goetz, Christian Doering, Michael Fehrenbach, Wolfam Bauer, Udo Bischof, Reinhard Neul, Karsten Funk, Markus Lutz, Gerhard Wucher, Jochen Franz
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Publication number: 20020119589Abstract: A method of manufacturing a micromechanical component has the steps: providing a substrate having a front side and a back side; structuring the front side of the substrate; at least partially covering the structured front side of the substrate with a protective layer containing germanium; structuring the back of the substrate; and at least partially removing the protective layer containing germanium from the structured front side of the substrate.Type: ApplicationFiled: January 24, 2002Publication date: August 29, 2002Inventors: Frank Fischer, Wilhelm Frey, Udo Bischof, Lars Metzger
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Patent number: 6368885Abstract: A method for manufacturing a micromechanical component, in particular, a surface-micromechanical yaw sensor, includes the following steps: providing a substrate having a front side and a back side; forming a micromechanical pattern on the front side; applying a protective layer on the micromechanical pattern on the front side; forming a micromechanical pattern on the back side, a resting on the micromechanical pattern on the front side taking place at least temporarily; removing the protective layer on the front side; and optionally further processing the micromechanical pattern on the front side and/or the micromechanical pattern on the back side.Type: GrantFiled: August 17, 2000Date of Patent: April 9, 2002Assignee: Robert Bosch GmbHInventors: Michael Offenberg, Udo Bischof