Abstract: The invention relates to a method and a device for locally defined machining on surfaces of workpieces. A laser beam (1) emitted by a laser radiation source (2) is aimed onto the reflecting surfaces of a plurality of adjacently arranged micromirrors that may be controlled individually with an electronic control and that are pivotable about at least one axis. Sub-beams (4) reflected by the reflecting surfaces of the micromirrors pivoted in a defined manner are incident and focused on the surface of a workpiece, which surface is arranged in the focal plane (6) of the focusing optics unit (5), at different adjustable positions, so that simultaneously a locally defined change in the workpiece material and/or a locally defined material removal with prespecifiable geometry is attained in a region of the workpiece near its surface.