Patents by Inventor Ui Han Jeong

Ui Han Jeong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for supplying inert gas to STB in semiconductor wafer production system and semiconductor wafer production system using the same
    Patent number: 9496162
    Abstract: A method for supplying inert gas to a side track buffer (STB) in a semiconductor wafer production system includes a step of sensing that a front opening unified POD (FOUP) is loading on the STB and generating a first input signal, and a step of opening a valve for inert gas and supplying nitrogen gas to the FOUP based on the first input signal, and to a semiconductor wafer production system using the method.
    Type: Grant
    Filed: October 7, 2013
    Date of Patent: November 15, 2016
    Assignee: Daifuku Co. Ltd.
    Inventors: Dong Gyu Yoo, Jae Hyun Lee, Jun Han Lee, Ui Han Jeong
  • METHOD FOR SUPPLYING INERT GAS TO STB IN SEMICONDUCTOR WAFER PRODUCTION SYSTEM AND SEMICONDUCTOR WAFER PRODUCTION SYSTEM USING THE SAME
    Publication number: 20150303086
    Abstract: The present invention relates to a method for supplying inert gas to an STB in a semiconductor wafer production system that includes a step of sensing that a FOUP is loading on the STB and generating a first input signal, and a step of opening a valve for inert gas and supplying nitrogen gas to the FOUP based on the first input signal, and to a semiconductor wafer production system using the method.
    Type: Application
    Filed: October 7, 2013
    Publication date: October 22, 2015
    Applicant: Daifuku Co., Ltd.
    Inventors: Dong Gyu Yoo, Jae Hyun Lee, Jun Han Lee, Ui Han Jeong