Abstract: A storage system for items such as substrate carriers includes at least one stocker including a plurality of storage areas each adapted to store at least one storage device. At least one movable support is arranged on the at least one stocker. A control controls movement of the at least one movable support at least between a first position wherein the at least one movable support receives the at least one storage device outside one of the storage areas and a second position wherein the at least one movable support is arranged substantially within the one of the storage areas.

Abstract: A overhead transport service vehicle system includes a carriage frame structured and arranged to carry a user. A hoisting mechanism utilizes at least one lifting device for lifting and lowering the carriage frame and at least one moving device for causing movement of the hoisting mechanism along one of a track or rail. A control controls at least one of the at least one lifting device and the at least one moving device.

Abstract: A system and method for improving the efficiency of air handling units by reducing the static air pressure within units. The system and method utilizes rotary union mounts to fluidly connect the heating and cooling coils within the system. The rotary union mounts allow the heating and/or cooling coils to be rotated flush within the housing of the air handling unit when the coil(s) are not in use and thereby out of the air flow path. Rotating the coils out of the air flow path reduces the static air pressure within the air handling unit and significantly improves the efficiency of the system by reducing the horsepower requirement and power consumption of the system fan. The rotary union mounts allow the coil(s) to be selectably rotated out of the air flow path based on system demand requirements.

Abstract: A method, system and test fixture for allowing testing and calibration of various operation parameters of an overhead traveling vehicle (hereinafter “OTV”) are disclosed. The invention implements a test fixture that includes a rotatable bearing set for rotatably engaging a wheel of the OTV such that the wheel can rotate but the OTV remains stationary. The bearing set is held in a raised position, similar to the operational position of the OTV, by a raised support. The test fixture may also include a reflective tape for use with an optical sensor(s) of the OTV. In this fashion, operation parameters of the OTV such as drive servomotor velocity, current gain, current offset, OTV travel profile, optical sensor op-amp gain, etc., can be tested and calibrated.

Abstract: A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.

Abstract: A overhead transport service vehicle system includes a carriage frame structured and arranged to carry a user. A hoisting mechanism utilizes at least one lifting device for lifting and lowering the carriage frame and at least one moving device for causing movement of the hoisting mechanism along one of a track or rail. A control controls at least one of the at least one lifting device and the at least one moving device.

Abstract: A overhead transport service vehicle system includes a carriage frame structured and arranged to carry a user. A hoisting mechanism utilizes at least one lifting device for lifting and lowering the carriage frame and at least one moving device for causing movement of the hoisting mechanism along one of a track or rail. A control controls at least one of the at least one lifting device and the at least one moving device.

Abstract: A steering apparatus and method is implemented that allows high speed, clean, particle-free transport of a semiconductor wafer or lithographic reticle on a transport vehicle at various positions on the vehicle track, especially when entering and exiting turns. Three computer-controlled electro-magnets are mounted at the left, center, and right side of a front steering truck, and are energized to attract strategically placed permanent magnet material mounted on a side of the track where the vehicle enters or exits a turn. The transport vehicle can be levitated by an air cushion or travel on wheels, and controlled by electromotive or electromagnetic forces about the track. Using the steering electro-magnets as a LVDT, a computer processor monitors the location of the transport vehicle about the track.

Abstract: A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.

Abstract: A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.

Abstract: A overhead transport service vehicle system includes a carriage frame structured and arranged to carry a user. A hoisting mechanism utilizes at least one lifting device for lifting and lowering the carriage frame and at least one moving device for causing movement of the hoisting mechanism along one of a track or rail. A control controls at least one of the at least one lifting device and the at least one moving device.

Abstract: A storage system for items such as substrate carriers includes at least one stocker including a plurality of storage areas each adapted to store at least one storage device. At least one movable support is arranged on the at least one stocker. A control controls movement of the at least one movable support at least between a first position wherein the at least one movable support receives the at least one storage device outside one of the storage areas and a second position wherein the at least one movable support is arranged substantially within the one of the storage areas.

Abstract: A storage buffer system for an automated material handling system (AMHS) includes a retractable buffer device disposed in proximity to a processing tool, the retractable buffer device having an extended position disposed directly below an overhead transport (OHT) vehicle path. The retractable buffer device further includes a retracted position that is removed from a process aisle space. In the extended position, the retractable buffer device is configured to facilitate loading and unloading of product therein without the use of lateral motion capability of an OHT vehicle.

Abstract: A method, system and test fixture for allowing testing and calibration of various operation parameters of an overhead traveling vehicle (hereinafter “OTV”) are disclosed. The invention implements a test fixture that includes a rotatable bearing set for rotatably engaging a wheel of the OTV such that the wheel can rotate but the OTV remains stationary. The bearing set is held in a raised position, similar to the operational position of the OTV, by a raised support. The test fixture may also include a reflective tape for use with an optical sensor(s) of the OTV. In this fashion, operation parameters of the OTV such as drive servomotor velocity, current gain, current offset, OTV travel profile, optical sensor op-amp gain, etc., can be tested and calibrated.

Abstract: A method of transporting workpieces to tools in an automated transportation system dispatches an automated transport vehicle containing workpieces from a first location such as a first loadport to a tool when the automated transport vehicle is available for dispatch and loaded with the workpieces, irrespective of whether the tool is available to receive the workpieces. Next, the method directs the automated transport vehicle to travel from the first loadport, along an interbay loop to an intrabay loop. The intrabay loop comprises a transport route around the tool and the interbay loop comprises a transport route that connects the loadport to a plurality of intrabay loops. The method directs the automated transport vehicle to travel along the interbay loop and stop at a tool loadport of the tool only if the tool is available to work on the workpieces.

Abstract: A method, system and test fixture for allowing testing and calibration of various operation parameters of an overhead traveling vehicle (hereinafter “OTV”) are disclosed. The invention implements a test fixture that includes a rotatable bearing set for rotatably engaging a wheel of the OTV such that the wheel can rotate but the OTV remains stationary. The bearing set is held in a raised position, similar to the operational position of the OTV, by a raised support. The test fixture may also include a reflective tape for use with an optical sensor(s) of the OTV. In this fashion, operation parameters of the OTV such as drive servomotor velocity, current gain, current offset, OTV travel profile, optical sensor op-amp gain, etc., can be tested and calibrated.

Abstract: A cable attachment assembly, a hoist and a transportation system using the cable attachment assembly. The cable attachment assembly including: a plate pivotable about a first axis; first and second pivot assemblies pivotable about respective second and third axes, the first, second and third axes parallel to each other; a first cable retainer in the first pivot assembly, the first cable retainer adapted to rotateably retain an end of a first cable in the first cable pivot assembly, the first cable rotatable about a fourth axis; a second cable retainer in the second pivot assembly, the second cable retainer adapted to rotateably retain an end of a second cable in the second pivot assembly, the second cable rotatable about a fifth axis; wherein the fourth and fifth axes parallel to each other and the fourth and fifth axes are perpendicular to the first, second and third axis.

Abstract: A combination of a FOUP (front opening unified pod) system and a reticle system utilized for the transport of wafers and a reticle system, the latter of which are used for transporting reticles from a first fabrication site to a further site at another location, and which provides for a unified system enabling the automated and trackable delivery of the reticles between these sites. Provided is a modified FOUP base structure, which is adapted to retain a reticle and to be able to employ existing equipment in a fabrication site which only necessitates a minimal modification of the equipment in order to render the latter universally adaptable to the combination of the systems.

Abstract: The invention is directed to a method and system for pod transportation within a semiconductor fabrication facility. The invention comprises a material control system that determines a pod that a station will require next and then sends an instruction to a vehicle to receive the pod that the station currently has and deliver the pod that the station will require next. The invention reduces cycle time by minimizing transportation moves of vehicles within the semiconductor fabrication facility.

Abstract: The invention is directed to an improved apparatus and method for transportation of a pod in a semiconductor fabrication facility. The invention comprises a lead vehicle with a communication system and control system and a trailer with a mechanism for delivering and receiving pods from stations in the facility. The trailer is connected to the lead vehicle and has a compartment for the transportation of a pod, but comprises fewer components than the lead vehicle. Therefore, the invention is manufactured at reduced cost, but with double pod transportation capacity.