Abstract: A pressure measuring device, comprising: a pressure measuring cell having a measuring membrane, at least one platform and a pressure chamber formed therebetween. An electrical transducer for transducing a deflection of the measuring membrane into a pressure dependent, primary signal; a cylindrical housing having a measuring cell chamber, in which the pressure measuring cell is arranged, and an end face pressure receipt opening in communication with the pressure duct; and an electronic circuit in the housing for operating the electrical transducer, and for processing the primary signal, and for outputting a measurement signal. The cylinder axis of the pressure measuring cell forms with the cylinder axis of the housing an angle, which amounts to not less than 80°, and which is especially preferably a right angle.

Abstract: A capacitive pressure measuring cell, including a ceramic platform and a ceramic measuring membrane, which are connected pressure tightly along a joint to form a reference pressure chamber between them. The measuring membrane has a first electrode facing the platform, and the platform has at least a second electrode facing the measuring membrane. The capacitance between the first and second electrodes depends on the difference between a pressure externally acting on the measuring membrane and a pressure reigning in the reference pressure chamber, wherein the joint has a thickness d, which defines an equilibrium distance between the measuring membrane and the front side of the platform. On the front side of the platform, a support layer is arranged, which comprises an inorganic insulator, wherein the support layer has a thickness of at least 0.2, and wherein the second electrode is arranged on the support layer.

Abstract: A ceramic component having at least one electrical feedthrough, comprising: a ceramic body, through which a bore extends; and a metal conductor, which is arranged at least sectionally in the bore and which is secured in the bore by means of an active hard solder, or braze, whereby the bore is sealed. The active hard solder fills an annular gap between the metal conductor and the ceramic body, characterized in that the active hard solder has a radially variable, chemical composition.

Abstract: A pressure measuring cell includes at least one ceramic measuring membrane body; and at least one ceramic platform, wherein the measuring membrane body is connected with the platform along an annular, peripheral joint. The joint is formed as a welded connection between the measuring membrane body and the platform, wherein the measuring membrane body has a pressure-dependently deformable measuring membrane. A pressure sensor includes a pressure measuring cell and a housing, wherein the pressure measuring cell is held by the housing, and wherein the pressure measuring cell closes a housing opening, through which the pressure measuring cell communicates with an environment of the housing. A seal is clamped between a sealing surface surrounding the opening of the housing and a sealing surface of the pressure measuring cell.

Abstract: A method for manufacturing a connection between two ceramic parts comprises: providing a first ceramic part and a second ceramic part; providing an active hard solder, or active braze, on at least one surface section of at least one of the ceramic parts; and heating the active hard solder, or active braze, in a vacuum soldering, brazing process. The entire active hard solder, or active braze, for connecting the first and second ceramic parts is provided in such a manner that at least one surface section of at least one of the ceramic parts, preferably both ceramic parts, is coated by means of gas phase deposition of the alloy of the active hard solder, or active braze.

Abstract: A ceramic product 1 includes a first ceramic part 2 and a second ceramic part 3, wherein the first ceramic part 2 is connected with the second ceramic part 3 via a joint, wherein the joint comprises an active hard solder, or braze, characterized in that the joint has an inhomogeneous distribution of the components of the active hard solder, or braze, wherein at least at an interface between the active hard solder, or braze, and the ceramic, the at least one active component of the active hard solder, or braze, is enriched. For manufacture of the product, the active hard solder, or braze, material is provided in such a manner, that at least one surface section of at least one of the ceramic parts is first coated with at least one active component of the active hard solder, or braze, and that on the coated section, an alloy is provided, which, by melting of the alloy during the heating, alloys with the coating and forms a metal joint between the two ceramic parts.

Abstract: A capacitive pressure measuring cell, including a ceramic platform and a ceramic measuring membrane, which are connected pressure tightly along a joint to form a reference pressure chamber between them. The measuring membrane has a first electrode facing the platform, and the platform has at least a second electrode facing the measuring membrane. The capacitance between the first and second electrodes depends on the difference between a pressure externally acting on the measuring membrane and a pressure reigning in the reference pressure chamber, wherein the joint has a thickness d, which defines an equilibrium distance between the measuring membrane and the front side of the platform. On the front side of the platform, a support layer is arranged, which comprises an inorganic insulator, wherein the support layer has a thickness of at least 0.2, and wherein the second electrode is arranged on the support layer.

Abstract: A ceramic component having at least one electrical feedthrough, comprising: a ceramic body, through which a bore extends; and a metal conductor, which is arranged at least sectionally in the bore and which is secured in the bore by means of an active hard solder, or braze, whereby the bore is sealed. The active hard solder fills an annular gap between the metal conductor and the ceramic body, characterized in that the active hard solder has a radially variable, chemical composition.

Abstract: A pressure sensor includes a platform and an elastic measuring membrane, which is joined with a surface of the platform to form a measuring chamber sealed closed at the edge, wherein the platform and/or the measuring membrane comprise ceramic, glass or a single crystal material, the measuring membrane has at least a first electrode, which faces the surface of the platform, the surface of the platform has at least a second electrode, which faces that of the measuring membrane. The capacitance between the first electrode and the second electrode is a measure for the pressure to be measured; wherein additionally at least one of the first and second electrodes comprises a conductive layer, which contains metal and glass, and wherein the metal comprises at least two noble metal elements.

Abstract: A pressure transducer, including a housing having a housing axis and a measuring cell chamber defined in the housing. The measuring cell chamber is exposable to a pressure via an opening. The opening is surrounded by an annular, first sealing surface. A pressure measuring cell having a second sealing surface facing towards the opening, and a support surface facing away from the sealing surface sealing ring; and a clamping apparatus, which engages the housing are provided. The pressure measuring cell and the sealing ring are clamped by means of an axial clamping force in such a manner between the clamping apparatus and the first sealing surface, that the sealing ring is arranged pressure-tightly between the first sealing surface and the second sealing surface. The pressure transducer further includes a misalignment accommodating arrangement, which includes a first transmission body, which faces toward the opening, and a second transmission body, which is facing away from the opening.

Abstract: A pressure sensor includes a platform 1 and an elastic measuring membrane 2, which is joined with a surface of the platform 1 to form a measuring chamber 3 sealed closed at the edge, wherein the platform 1 and/or the measuring membrane 2 comprise ceramic, glass or a single crystal material, the measuring membrane has at least a first electrode 6, which faces the surface of the platform 2, the surface of the platform 1 has at least a second electrode 5, which faces that of the measuring membrane 2, wherein the capacitance between the first electrode and the second electrode is a measure for the pressure to be measured; wherein additionally at least one of the first and second electrodes comprises a conductive layer, which contains metal and glass, and wherein the metal comprises at least two noble metal elements.

Abstract: A pressure transducer, including a housing having a housing axis and a measuring cell chamber defined in the housing. The measuring cell chamber is exposable to a pressure via an opening. The opening is surrounded by an annular, first sealing surface. A pressure measuring cell having a second sealing surface facing towards the opening, and a support surface facing away from the sealing surface, sealing ring; and a clamping apparatus, which engages the housing are provided. The pressure measuring cell and the sealing ring are clamped by means of an axial claimping force in such a manner between the clamping apparatus and the first sealing surface, that the sealing ring is arranged pressure-tightly between the first sealing surface and the second sealing surface. The pressure transducer further includes a misalignment accommodating arrangement, which includes a first transmission body, which faces toward the opening, and a second transmission body, which is facing away from the opening.

Abstract: A pressure sensor including: A pressure measuring cell having an end face loadable with the medium; a housing having a media opening and a ring-shaped, axial bearing surface, which surrounds the media opening; a clamping apparatus; and a ring-shaped sealing arrangement. The pressure measuring cell is positioned in the housing and the sealing arrangement is positioned between the bearing surface and the end face, and the sealing arrangement, as well as the pressure measuring cell, are axially clamped between the bearing surface and the clamping apparatus. The sealing arrangement includes, a decoupling ring, as well as a first and a second, ring-shaped sealing element. The first sealing element lies against the end face, the second sealing element lies against the bearing surface, and the decoupling ring is axially clamped between the first and the second sealing elements.

Abstract: For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, with the pressure measuring cell being axially clamped between an elastic sealing ring, which bears against the membrane-bearing end face of the pressure measuring cell, and a support ring, which bears against the rear face of the pressure measuring cell, the dimensions of the support ring are coordinated with the dimensions of the sealing ring and pressure measuring cell such that a radial deformation of the membrane-bearing end face caused by the axial clamping of the pressure measuring cell is sufficiently small that the span error of the pressure sensor arising from a reduction of the axial clamping force by at least 10% amounts to not more than about 0.02%. Additionally, arranged between the support ring and a clamping ring is a stiff decoupling element, which minimizes the temperature hysteresis of the span.

Abstract: A pressure sensor including: A pressure measuring cell having an end face loadable with the medium; a housing having a media opening and a ring-shaped, axial bearing surface, which surrounds the media opening; a clamping apparatus; and a ring-shaped sealing arrangement. The pressure measuring cell is positioned in the housing and the sealing arrangement is positioned between the bearing surface and the end face, and the sealing arrangement, as well as the pressure measuring cell, are axially clamped between the bearing surface and the clamping apparatus. The sealing arrangement includes, a decoupling ring, as well as a first and a second, ring-shaped sealing element. The first sealing element lies against the end face, the second sealing element lies against the bearing surface, and the decoupling ring is axially clamped between the first and the second sealing elements.

Abstract: For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, wherein the pressure measuring cell is axially clamped between an elastic sealing ring, which bears against the membrane-containing, end face of the pressure measuring cell, and a support ring, which supports the measuring cell on the rear side thereof, the dimensions of the support ring are matched to the dimensions of the sealing ring and the pressure measuring cell in such a way that a radial deformation of the membrane-containing end face resulting from the axial clamping of the pressure measuring cell is sufficiently small that the span error of the pressure sensor because of a reduction of the axial clamping force by a least 10% amounts to not more than 0.02%. The geometry of the support ring is determined iteratively by means of the FEM.

Abstract: For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, with the pressure measuring cell being axially clamped between an elastic sealing ring, which bears against the membrane-bearing end face of the pressure measuring cell, and a support ring, which bears against the rear face of the pressure measuring cell, the dimensions of the support ring are coordinated with the dimensions of the sealing ring and pressure measuring cell such that a radial deformation of the membrane-bearing end face caused by the axial clamping of the pressure measuring cell is sufficiently small that the span error of the pressure sensor arising from a reduction of the axial clamping force by at least 10% amounts to not more than about 0.02%. Additionally, arranged between the support ring and a clamping ring is a stiff decoupling element, which minimizes the temperature hysteresis of the span.

Abstract: For minimizing the span error of a pressure sensor having an essentially cylindrical platform and a measuring membrane joined to an end face of the platform, wherein the pressure measuring cell is axially clamped between an elastic sealing ring, which bears against the membrane-containing, end face of the pressure measuring cell, and a support ring, which supports the measuring cell on the rear side thereof, the dimensions of the support ring are matched to the dimensions of the sealing ring and the pressure measuring cell in such a way that a radial deformation of the membrane-containing end face resulting from the axial clamping of the pressure measuring cell is sufficiently small that the span error of the pressure sensor because of a reduction of the axial clamping force by a least 10% amounts to not more than 0.02%. The geometry of the support ring is determined iteratively by means of the FEM.

Abstract: A pressure sensor for measuring a pressure includes a pressure chamber; and a deformation body, which can be exposed to a medium under pressure, and which, additionally, at least partially bounds the pressure chamber and seals such pressure-tightly from the medium; wherein the walls of the sensor chamber have a hydrophobic coating, which was applied by gas and/or vapor phase deposition. The hydrophobic coating preferably includes a silane. Especially suited are silanes having one or more hydrophobic groups R and one or more anchoring groups X. Especially preferred are: R—Si—X3, R1R2—Si—X2, R1R2R3—Si—X. The hydrophobic group R is preferably an alkyl, perfluoroalkyl, phenyl or perflurorophenyl group. The anchoring group X is preferably an —OH (silanol), —X (halide, e.g. —Cl), —OR (ester, e.g. —OCH3), —NH2 (amine), or —SH (Mercaptosilane). Additionally, aliphatic or cyclic silazanes —Si—NH—Si—, e.g. hexamethyldisilazane, can be used. Likewise suitable are compounds of the type Ry—Me—Xz, with Me=e.g. Zr, Ti.

Abstract: In a differential pressure sensor, the measurement value is corrected with the help of the nominal pressure NP. In this way, influences on the measurement value because of deformations of the body of the differential pressure sensor and change in the material stiffness of the membrane are decreased.