Patents by Inventor Uli Egger

Uli Egger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor device and method for manufacturing the same
    Publication number: 20050070043
    Abstract: The present invention provides a method for manufacturing a semiconductor device equipped with a capacitor in which a dielectric film is used, wherein a complex oxide is used as a mask material when the dielectric film is etched.
    Type: Application
    Filed: September 30, 2003
    Publication date: March 31, 2005
    Inventors: Koji Yamakawa, Katsuaki Natori, Soichi Yamazaki, Osamu Arisumi, Hiroshi Itokawa, Hiroyuki Kanaya, Kazuhiro Tomioka, Keisuke Nakazawa, Yasuyuki Taniguchi, Uli Egger