Patents by Inventor Uli Hoffmann

Uli Hoffmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Imaging system with multi source array
    Patent number: 7638777
    Abstract: The present invention provides a charged particle beam device. The device comprises an emitter array for emitting a plurality of charged particle beams. The plurality of charged particle beams are imaged with a lens. An electrode unit is provided for accelerating the plurality of charged particle beams. The potential differences between a first potential of the emitter array, a second potential of the electrode unit, and a third potential of a specimen, are controlled by a first control unit and a second control unit. Thereby, the second potential is capable of accelerating the plurality of charged particle beams with respect to the first potential, and the third potential is capable of decelerating the plurality of charged particle beams with respect to the second potential.
    Type: Grant
    Filed: May 17, 2004
    Date of Patent: December 29, 2009
    Assignee: ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
    Inventors: Hans-Peter Feuerbaum, Jürgen Frosien, Uli Hoffmann, Dieter Winkler, Pavel Adamec
  • Imaging system with multi source array
    Publication number: 20060237659
    Abstract: The present invention provides a charged particle beam device. The device comprises an emitter array (22) for emitting a plurality of charged particle beams (8). The plurality of charged particle beams are imaged with a lens (12). An electrode unit (14) is provided for accelerating the plurality of charged particle beams. The potential differences between a first potential of the emitter array, a second potential of the electrode unit, and a third potential of a specimen, are controlled by a first control unit (11) and a second control unit. Thereby, the second potential is capable of accelerating the plurality of charged particle beams with respect to the first potential, and the third potential is capable of decelerating the plurality of charged particle beams with respect to the second potential.
    Type: Application
    Filed: May 17, 2004
    Publication date: October 26, 2006
    Applicant: ICT Integrated Circuit Testing Gesellschaft Fur Ha
    Inventors: Hans Feuerbaum, Jürgen Frosien, Uli Hoffmann, Dieter Winkler, Pavel Aamec