Abstract: A piezoresistive sensor chip element of a pressure sensor has lower face with an outer edge, an adhesion area and a non-adhesion area. The chip has a closed chip cavity for measuring the pressure of a medium flowing around the chip. The upper face of a substrate is fastened only at the adhesion area of the chip. The non-adhesion area extends at least over a circular area arranged centrally on the lower face and covers a third of the lower face's total area and extends over at least one connection area from the circular area to the edge of the lower face. The pressure in the pressure medium can spread through the connection area into a space under the non-adhesion area on the element lower face. The substrate has a recess located centrally under the sensor chip element.

Abstract: A piezoresistive sensor chip element of a pressure sensor has lower face with an outer edge, an adhesion area and a non-adhesion area. The chip has a closed chip cavity for measuring the pressure of a medium flowing around the chip. The upper face of a substrate is fastened only at the adhesion area of the chip. The non-adhesion area extends at least over a circular area arranged centrally on the lower face and covers a third of the lower face's total area and extends over at least one connection area from the circular area to the edge of the lower face. The pressure in the pressure medium can spread through the connection area into a space under the non-adhesion area on the element lower face. The substrate has a recess located centrally under the sensor chip element.

Abstract: A sensor unit for measuring a measurement variable in a medium, in particular in an aggressive liquid or gaseous medium, comprises a sensor that is arranged in a sensor capsule and has a sensor region that is arranged on a base body. In order to detect the measurement variable in the sensor region, a measurement opening is provided in the sensor capsule. On a side facing the measurement opening, the sensor region has a measurement surface that is provided with measurement electronics. An electrical supply line is provided on the sensor for the purpose of transmitting a sensor signal that is generated by the measurement electronics. A plated-through hole is provided in the base body. The plated-through hole is used to connect the measurement electronics to the electrical supply line via signals through the base body, on a base side of the sensor that faces away from the measurement opening.

Abstract: A sensor unit for measuring a measurement variable in a medium, in particular in an aggressive liquid or gaseous medium, comprises a sensor that is arranged in a sensor capsule and has a sensor region that is arranged on a base body. In order to detect the measurement variable in the sensor region, a measurement opening is provided in the sensor capsule. On a side facing the measurement opening, the sensor region has a measurement surface that is provided with measurement electronics. An electrical supply line is provided on the sensor for the purpose of transmitting a sensor signal that is generated by the measurement electronics. A plated-through hole is provided in the base body. The plated-through hole is used to connect the measurement electronics to the electrical supply line via signals through the base body, on a base side of the sensor that faces away from the measurement opening.