Patents by Inventor Ulrich Baenziger

Ulrich Baenziger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for generating a plasma for processing substrates
    Patent number: 5726413
    Abstract: The invention relates to an apparatus for generating A plasma generating apparatus of the kind useful for plasma-assisted processing of substrates, and provided with a plurality of substantially cylindrical plasma generating chambers each surrounded by an annular antenna connected to a source of high frequency energy by feed lines connected to the antenna at diagonally opposite points thereof, each chamber being further provided with a device for generating a longitudinal magnetic field within the chamber.
    Type: Grant
    Filed: August 27, 1996
    Date of Patent: March 10, 1998
    Assignee: Fraunhofer-Gesellschaft fur die angewandte . . .
    Inventors: Ulrich Baenziger, Gerold Neumann, Hella-C. Scheer