Patents by Inventor Ulrich Boettiger

Ulrich Boettiger has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20070238035
    Abstract: An apparatus and method to provide an imager having an array of color filter elements, each color filter element being separated from each other by spacers. The spacers can optically isolate filter elements from each other.
    Type: Application
    Filed: April 7, 2006
    Publication date: October 11, 2007
    Inventors: Richard Holscher, Ulrich Boettiger
  • Publication number: 20070158772
    Abstract: A method and apparatus for improving the planarity of a recessed color filter array when the recessed region or trench depth exceeds the thickness of the color filter film. The method includes the steps of coating the entire wafer with an additional coating material after applying the CFA, then planarizing that resist layer using CMP and then using a dry etch to transfer that planar surface down as far as required to achieve a planar color filter with a uniform thickness.
    Type: Application
    Filed: January 10, 2006
    Publication date: July 12, 2007
    Inventor: Ulrich Boettiger
  • Publication number: 20070153107
    Abstract: A microlens array with reduced or no empty space between individual microlenses and a method for forming the same. The microlens array is formed by patterning a first set of microlens precursors in a checkerboard pattern on a substrate. The first set of microlens precursors is reflowed and cured into first microlenses impervious to subsequent reflows. Then, a second set of microlens precursors is patterned in spaces among the first microlenses, reflowed and cured into second microlenses. The reflows and cures can be conducted under different conditions, and the microlenses may be differently sized. The conditions of the reflows can be chosen to ensure that the focal lengths of microlenses are optimized for maximum sensor signal.
    Type: Application
    Filed: February 16, 2007
    Publication date: July 5, 2007
    Inventors: Ulrich Boettiger, Jin Li
  • Publication number: 20070120162
    Abstract: Methods and apparatuses are disclosed which provide imager devices having a light blocking material layer formed over peripheral circuitry outside a pixel cell array.
    Type: Application
    Filed: November 30, 2005
    Publication date: May 31, 2007
    Inventors: Zhaohui Yang, Ulrich Boettiger
  • Publication number: 20070121212
    Abstract: A semi-conductor based imager includes a microlens array having microlenses with modified focal characteristics. The microlenses are made of a microlens material, the melting properties of which are selectively modified to obtain different shapes after a reflow process. Selected microlenses, or portions of each microlens, are modified, by exposure to ultraviolet light, for example, to control the microlens shape produced by reflow melting. Controlling the microlens shape allows for modification of the focal characteristics of selected microlenses in the microlens array.
    Type: Application
    Filed: December 19, 2006
    Publication date: May 31, 2007
    Inventors: Ulrich Boettiger, Jin Li
  • Publication number: 20070120212
    Abstract: Microelectronic imagers with shaped image sensors and methods for manufacturing curved image sensors. In one embodiment, a microelectronic imager device comprises an imaging die having a substrate, a curved microelectronic image sensor having a face with a convex and/or concave portion at one side of the substrate, and integrated circuitry in the substrate operatively coupled to the image sensor. The imaging die can further include external contacts electrically coupled to the integrated circuitry and a cover over the curved image sensor.
    Type: Application
    Filed: January 29, 2007
    Publication date: May 31, 2007
    Inventors: Ulrich Boettiger, Jin Li, Steven Oliver
  • Publication number: 20070096235
    Abstract: Microelectronic imagers with shaped image sensors and methods for manufacturing curved image sensors. In one embodiment, a microelectronic imager device comprises an imaging die having a substrate, a curved microelectronic image sensor having a face with a convex and/or concave portion at one side of the substrate, and integrated circuitry in the substrate operatively coupled to the image sensor. The imaging die can further include external contacts electrically coupled to the integrated circuitry and a cover over the curved image sensor.
    Type: Application
    Filed: October 31, 2006
    Publication date: May 3, 2007
    Inventors: Ulrich Boettiger, Jin Li, Steven Oliver
  • Publication number: 20070096016
    Abstract: A microlens structure includes lower lens layers on a substrate. A sputtered layer of glass, such as silicon oxide, is applied over the lower lens layers at an angle away from normal to form upper lens layers that increase the effective focal length of the microlens structure. The upper lens layers can be deposited in an aspherical shape with radii of curvature longer than the lower lens layers. As a result, small microlenses can be provided with longer focal lengths. The microlenses are arranged in arrays for use in imaging devices.
    Type: Application
    Filed: December 20, 2006
    Publication date: May 3, 2007
    Inventors: Jin Li, Jiutao Li, Ulrich Boettiger, Loriston Ford
  • Patent number: 7205526
    Abstract: A microlens structure includes lower lens layers on a substrate. A sputtered layer of glass, such as silicon oxide, is applied over the lower lens layers at an angle away from normal to form upper lens layers that increase the effective focal length of the microlens structure. The upper lens layers can be deposited in an aspherical shape with radii of curvature longer than the lower lens layers. As a result, small microlenses can be provided with longer focal lengths. The microlenses are arranged in arrays for use in imaging devices.
    Type: Grant
    Filed: December 22, 2003
    Date of Patent: April 17, 2007
    Assignee: Micron Technology, Inc.
    Inventors: Jin Li, Jiutao Li, Ulrich Boettiger, Loriston Ford
  • Publication number: 20070076299
    Abstract: A variety of structures and methods used to adjust the shape, radius and/or height of a microlens for a pixel array. The structures affect volume and surface force parameters during microlens formation. Exemplary microlens structures include a microlens frame, base, material, protrusions or a combination thereof to affect the shape, height and/or radius of the microlens. The frame, base and/or protrusions alter the microlens flow resulting from the heating of the microlens during fabrication such that a height or radius of the microlens can be controlled. The radius can be adjusted by the height differences between the microlens and frame. The bigger the difference, the smaller the radius will be.
    Type: Application
    Filed: September 21, 2006
    Publication date: April 5, 2007
    Inventors: Ulrich Boettiger, Jin Li
  • Patent number: 7199347
    Abstract: A microlens structure includes lower lens layers on a substrate. A sputtered layer of glass, such as silicon oxide, is applied over the lower lens layers at an angle away from normal to form upper lens layers that increase the effective focal length of the microlens structure. The upper lens layers can be deposited in an aspherical shape with radii of curvature longer than the lower lens layers. As a result, small microlenses can be provided with longer focal lengths. The microlenses are arranged in arrays for use in imaging devices.
    Type: Grant
    Filed: October 6, 2005
    Date of Patent: April 3, 2007
    Assignee: Micron Technology, Inc.
    Inventors: Jin Li, Jiutao Li, Ulrich Boettiger, Loriston Ford
  • Publication number: 20070045685
    Abstract: Imaging devices utilizing sub-wavelength gratings to separate the spectral components of the natural white light are disclosed. This disclosed method and apparatus redirects the light to be collected onto separate photosensors for different wavelengths to provide improved quantum efficiency.
    Type: Application
    Filed: August 24, 2005
    Publication date: March 1, 2007
    Inventors: Zhaohui Yang, Ulrich Boettiger
  • Publication number: 20070035844
    Abstract: A microlens has a surface with an effective index of refraction close to the index of air to reduce reflection caused by change in indices of refraction from microlens to air. The microlens having an index of refraction approximately the same as that of air is obtained by providing a rough or bumpy lens-air surface on the microlens. Features protrude from the surface of a microlens to create the rough surface and preferably have a length of greater or equal to a wavelength of light and a width of less than a sub-wavelength of light, from about 1/10 to ΒΌ of the wavelength of light. The features may be of any suitable shape, including but not limited to triangular, cylindrical, rectangular, trapezoidal, or spherical and may be formed by a variety of suitable processes, including but not limited to mask and etching, lithography, spray-on beads, sputtering, and growing.
    Type: Application
    Filed: August 11, 2005
    Publication date: February 15, 2007
    Inventors: Jiutao Li, Jin Li, Ulrich Boettiger
  • Publication number: 20070023799
    Abstract: A pixel cell and imager device, and method of forming the same, where the pixel cell has a plurality of metallization and via layers formed over a photosensitive region. The metallization and via layers form a step-like light tunnel structure that augments the photosensitive region's ability to capture light impinging on the photosensitive region.
    Type: Application
    Filed: August 1, 2005
    Publication date: February 1, 2007
    Inventor: Ulrich Boettiger
  • Publication number: 20060289723
    Abstract: A microlens structure includes lower lens layers on a substrate. A sputtered layer of glass, such as silicon oxide, is applied over the lower lens layers at an angle away from normal to form upper lens layers that increase the effective focal length of the microlens structure. The upper lens layers can be deposited in an aspherical shape with radii of curvature longer than the lower lens layers. As a result, small microlenses can be provided with longer focal lengths. The microlenses are arranged in arrays for use in imaging devices.
    Type: Application
    Filed: August 31, 2006
    Publication date: December 28, 2006
    Inventors: Jin Li, Jiutao Li, Ulrich Boettiger, Loriston Ford
  • Publication number: 20060289956
    Abstract: A microlens structure that includes a wedge formed to support and tilt the microlens is disclosed. The wedge results from heating a layer of patterned flowable material. The degree and direction of incline given to the wedge can be controlled in part by the type of patterning that is performed.
    Type: Application
    Filed: June 28, 2005
    Publication date: December 28, 2006
    Inventors: Ulrich Boettiger, Jin Li
  • Publication number: 20060292735
    Abstract: Methods of fabricating a microlens and/or array of microlenses used to focus light on photosensors, by forming a protective coating over a microlenses precursor material, and etching the protective coating and microlens precursor material to obtain a predetermined shape.
    Type: Application
    Filed: August 28, 2006
    Publication date: December 28, 2006
    Inventors: Ulrich Boettiger, Jin Li
  • Publication number: 20060275941
    Abstract: Microelectronic imagers with curved image sensors and methods for manufacturing curved image sensors. In one embodiment, a microelectronic imager device comprises an imager die having a substrate, a curved microelectronic image sensor having a face with a convex and/or concave portion at one side of the substrate, and integrated circuitry in the substrate operatively coupled to the image sensor. The imager die can further include external contacts electrically coupled to the integrated circuitry and a cover over the curved image sensor.
    Type: Application
    Filed: July 19, 2006
    Publication date: December 7, 2006
    Inventors: Steven Oliver, Jin Li, Ulrich Boettiger
  • Publication number: 20060268143
    Abstract: Imaging devices having reduced fixed pattern noise are disclosed. The fixed pattern noise in the imaging devices is reduced by measuring and adjusting the spectral characteristics of the imager device on a pixel by pixel basis. The fixed pattern noise of the pixel cells are changed by modifying the absorption, reflectance, refractive index, shape, and/or micro structure of the material.
    Type: Application
    Filed: May 26, 2005
    Publication date: November 30, 2006
    Inventors: Ulrich Boettiger, John Ladd
  • Publication number: 20060186492
    Abstract: Microelectronic imagers with shaped image sensors and methods for manufacturing curved image sensors. In one embodiment, a microelectronic imager device comprises an imaging die having a substrate, a curved microelectronic image sensor having a face with a convex and/or concave portion at one side of the substrate, and integrated circuitry in the substrate operatively coupled to the image sensor. The imaging die can further include external contacts electrically coupled to the integrated circuitry and a cover over the curved image sensor.
    Type: Application
    Filed: February 18, 2005
    Publication date: August 24, 2006
    Applicant: Micron Technology, Inc.
    Inventors: Ulrich Boettiger, Jin Li, Steven Oliver