Abstract: A method and apparatus for a plasma enhanced chemical vapor deposition system for processing one or more flat panel display substrates comprising a vacuum deposition process chamber configured to contain gas, a residual gas analyzer configured to analyze the gas within the process chamber and to provide feedback, and a controller to monitor feedback from the gas analyzer. Also, a method for identifying a process upset within a plasma enhanced chemical vapor deposition system configured to process flat panel display substrates comprising determining a historical slope of a line for partial pressure as a function of time, calculating a new slope of a line based on partial pressure measurements by a residual gas analyzer, comparing the historical and new slopes, and sending a signal to an operator.

Abstract: A sensor includes at least two microsensor chips in a housing.

Abstract: A micro fluid analyzer having a concentrator and separator. A strip continuous through a channel in the concentrator may provide a hot zone that may move with the flow of fluid through the channel of the concentrator to provide a concentration of heat in the flow. A pump may provide a flow to the fluid through the analyzer. Detectors may be positioned at places where the fluid may flow. A processor or controller may be connected to the strip, separator, pump and detectors. The concentrator, separator, detectors and processor may be integrated on one chip.

Abstract: Temperature compensation methods for physical property sensors are disclosed herein, based on a simple bridge circuit. An imbalance of the bridge circuit can be driven to a zero value, while a supply voltage thereof is simultaneously driven to a level required to bring the heating element to the temperature rise above ambient temperature that optimally compensates for a number of temperature-dependent effects. The heating element can be configured as a thin-film heating material. The resulting total temperature dependence of the measuring system, which includes the heating element, the bridge-circuit with amplifier and the fluid to be measured, can be reduced to a level at which the need for additional digital temperature compensation circuitry and its associated costs may be reduced.

Abstract: A sensor includes at least two microsensor chips in a housing.

Abstract: A device using needed hydrogen gas flow and electricity for operation obtained from a fuel cell power supply. Also, water generated by the fuel cell may be recycled for hydrogen generation which may be used by the device and in turn expanded by the fuel cell for further electrical power generation. The device may be a gas chromatograph, a fluid calibration mechanism, a flame ionization detector, or the like.

Abstract: A method and apparatus for sensing a flammable vapor are described herein. Initially, a first thermal conductivity of a vapor at a first temperature and a second thermal conductivity of the vapor at a second temperature can be determined. Thereafter, a ratio of the first thermal conductivity signal to that of the second thermal conductivity can be calculated to obtain a primary “vapor” signal. The “vapor” ratio can then be compared to an “air” ratio of air without the vapor at the first temperature and the second temperature to obtain a secondary signal thereof. Such a secondary signal can then be compared to an alarm set-point value to thereby determine whether the vapor comprises a flammable vapor and a risk-reducing action thereof be taken.

Abstract: An ion pump having conductive electrodes on both sides of an insulator which may form a number of channels. These electrodes may provide electrical discharges which have a corona or cold cathode emission for ionization. The electrodes and the insulator may be layers having openings that form the channels. The openings in one electrode layer may have a sharp-like configuration and the openings in the other electrode layer may have a non-sharp-like configuration. Ions may be predominately in-situ generated proximate to the sharp-like openings and have the polarity of these openings. These ions may induce a fluid flow through the channels of neutral molecules as a result of a force and viscous drag of the ions. The sharp-like openings may have nanotube whiskers or a thin film structure for facilitating an electrical discharge.

Abstract: A micro plasma sensor system having a glow discharge gap formed by electrodes. A fluid to be sensed may be brought into the vicinity of a discharge at the gap. Light from the discharge may be coupled to a spectrum analyzer and/or processor for determining properties of the fluid. A coupling may include a waveguide proximate to the discharge gap. Window cleanliness and electrode electrical isolation may be maintained by the discharge. The optical analyzer may have filters for one or more optical channels to detectors. The detectors may output electrical signals to be processed. The electrodes may be parallel to each other with a light waveguide between them. Or the electrodes may be concentric forming an annular discharge gap. The light waveguide may likewise be concentric to one or more electrodes. The waveguide may be one or more optical fibers, or tubular.

Abstract: A micro fluid analyzer that may be highly sensitive, fast and very compact. The analyzer may use sufficiently low power per analysis to be easily implemented with an equivalently small battery pack or other portable power source. There may be energy conservation features in the analyzer, such as optimal adsorber film thicknesses in the pre-concentrator, concentrator and chromatographic separators. There may be special timing of the phased heating elements in the concentrators and separators to further reduce energy consumption. Various kinds of detectors and sensors may be incorporated in the analyzer for achieving low probability for false positives and detection versatility. There may be a controller that provides data acquisition and analyses, drive signals for control, management of wireless signal transmission and reception, processing, and other operational uses of the micro analyzer.

Abstract: A sensor can be configured to generally include a flow channel block having a flow channel formed therein, and a sensor chip for sensing fluid flow, wherein a fluid in the flow channel surrounds the sensor chip. Alternatively, the sensor chip can be fastened at one side to a substrate and on another side of the substrate to a core tube inserted into the flow channel. This core tube provides electrical insulation and corrosion protection to the sensor chip, reduces flow noise, (and by the non-intrusive nature of the measurement) essentially eliminates the risk of fluid leakage, and maintains the fluid super-clean and contamination-free while improving structural integrity for the thermal measurements derived from the sensor chip. The use of such a core tube configuration also can protect the sensor from corrosion, radioactive or bacterial contamination, overheating, or freeze-ups.

Abstract: A structure being a modular system generally having a concentrator, separator, various detectors and a pump. The concentrator may have an array of phased heaters that are turned on at different times relative to each other in a fluid stream channel. The structure may relate to such a phased heater array structure, and more particularly to application of it relative to a sensor, analyzer or chromatograph for the identification and quantification of fluid components. The structure may be a miniaturized fluid micro system. The changeability of the modules of the system may be a plus for development, manufacturing, usage, repair and modification. It may also be energy-efficient, be battery-powered, and usable as a portable instrument.

Abstract: Temperature compensation methods for physical property sensors are disclosed herein, based on a simple bridge circuit. An imbalance of the bridge circuit can be driven to a zero value, while a supply voltage thereof is simultaneously driven to a level required to bring the heating element to the temperature rise above ambient temperature that optimally compensates for a number of temperature-dependent effects. The heating element can be configured as a thin-film heating material. The resulting total temperature dependence of the measuring system, which includes the heating element, the bridge-circuit with amplifier and the fluid to be measured, can be reduced to a level at which the need for additional digital temperature compensation circuitry and its associated costs may be reduced.

Abstract: A micro fluid analyzer having a concentrator and two or more separators. The analyzer may have one, two or more pumps. The analyzer may have a hyper pre-concentrator having a number of channels. There are numerous detectors positioned along the flow path of the analyzer. Also, one or more orifices and micro valves may be positioned in the flow path. The concentrator may have an array of phased heater elements that provide a heat pulse that moves along the fluid path to provide an increasing concentration of heat. The analyzer may be configured as a multiple fluid or gas chromatograph.

Abstract: A flow sensor is provided having a substrate with a sensing element and flow channel aligned over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is aligned by one or more guide elements formed in an alignment layer. The flow channel across the sensing area is accurately and precisely aligned due to the guide elements provided at the wafer-level, facilitating reliable, low-cost, and consistent results among multiple flow sensors. The flow sensor is adapted for use in harsh environments.

Abstract: An improved, affordable, and rapid fluid mixture composition or process monitor based on a thermal microstructure sensor. This is preferably accomplished with a microbridge sensor design that has reduced susceptibility to interfering components of the mixture. The sensor described herein is therefore suitable for monitoring the concentration of at least one component in a fluid mixture when the fluid mixture consists of either (1) two components with very different thermal conductivities; or (2) three or more components wherein at least one component has a very different thermal conductivity and the effects of the other components can be largely eliminated, especially if the component of interest is hydrogen and the interference is from the variability in the concentrations of CO2 and H2O.

Abstract: An equipment or environment health monitor having a micro gas apparatus incorporating a phased heater array, concentrator, separator and detector for achieving the sensitivity needed for detection of extremely small amounts of fluids. The apparatus is capable of detecting trace gases, and may be utilized to detect “fault” gas of operating equipment so as to determine, for example, the prospects of imminent failure of the equipment. Also, the micro gas apparatus is capable of detecting miniscule amounts of pollutants in ambient environment of a conditioned or tested space. The output of the apparatus may go to a microcontroller and/or processor for prompt analysis. The output from the microcontroller or processor may go to either a transmitter/receiver for wireless communication or a modem for utility line, cable or optical communication with a station for data and results observation and review.

Abstract: A fluid analyzer having a concentrator and separator for concentrating and separating fluid samples at pressures up to about 10,000 psi (˜700 bar). The concentrator and separator may consist of a solid-state thin-film heater-adsorber and a channel supported by a solid substrate. The concentrator may have numerous heated interactive elements for adsorbing and desorbing constituents of a sample fluid. The interactive elements may be heated in a time phased sequential manner by heaters. The separator may separate the sample fluid by compound. There may be thermal conductivity detectors, a flow sensor and electrical conductivity detectors proximate to the channels. This system of concentrator, separator, heaters and sensor may provide information about the sample fluid composition. A pump may be connected to the channel to move the sample fluid through it.

Abstract: A sensor having electrodes connectable to an AC or DC voltage for powering an electrical discharge such as a corona, glow, arc, or the like. Additional electrodes connectable to analysis voltage may be proximate to the discharge providing electrodes. The discharge may ionize a sample fluid of varying chemical composition, flowing through a channel where the electrodes are situated. The discharge may be part of a group of sensors sensing the fluid flowing from a particle filter, gas chromatograph (GC) separator, thermal conductivity detector (TCD), optical sensors, photo ionization detector (PID), and to additional micro discharge devices (MDDs) and a mass spectrometer and/or a processor for analysis and processing to obtain results and information about the sample fluid composition.

Abstract: A pyrometer having at least two detectors and at least two band-pass filters near each to limit the detectable wavelength band emitted by an object, and a device to exchange their filters to eliminate detector output ratio errors. The detector output ratio is then used to derive the color temperature of the object, which may have fast changes in emission intensity output.