Patents by Inventor Ulrich Gosele

Ulrich Gosele has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20050252787
    Abstract: The invention relates to a method for producing highly ordered pore structures in porous aluminium oxide using a nano-imprint stamp and also to a method for the manufacturing of the stamp and to the stamp itself.
    Type: Application
    Filed: February 5, 2003
    Publication date: November 17, 2005
    Inventors: Ralf Wehrspohn, Ulrich Gosele, Kornelius Nielsch, Jinsub Choi, Manfred Reiche, Marin Alexe
  • Patent number: 6870970
    Abstract: The present invention provides a method for fast switching of optical properties in photonic crystals using pulsed/modulated free-carrier injection. The results disclosed herein indicate that several types of photonic crystal devices can be designed in which free carriers are used to vary dispersion curves, stop gaps in materials with photonic bandgaps to vary the bandgaps, reflection, transmission, absorption, gain, or phase. The use of pulsed free carrier injection to control the properties of photonic crystals on fast timescales forms the basis for all-optical switching using photonic crystals. Ultrafast switching of the band edge of a two-dimensional silicon photonic crystal is demonstrated near a wavelength of 1.9 ?m. Changes in the refractive index are optically induced by injecting free carriers with 800 nm, 300 fs pulses. Band-edge shifts have been induced in silicon photonic crystals of up to 29 nm that occurs on the time-scale of the pump pulse.
    Type: Grant
    Filed: April 24, 2002
    Date of Patent: March 22, 2005
    Inventors: Stephen W. Leonard, Henry M. van Driel, Jorg Schilling, Ralf Boris Wehrspohn, Ulrich Gosele, Stefan Senz
  • Patent number: 6663989
    Abstract: A structure containing a ferroelectric material comprises a substrate such as silicon, a buffer layer formed on the substrate, and a non-c-axis-oriented, electrically-conductive template layer formed on the buffer layer. The template layer comprises a perovskite oxide compound. An epitaxially a-axis-oriented ferroelectric layer is formed on the template layer, and has a vector of spontaneous polarization oriented perpendicular or at least substantially perpendicular to the film normal.
    Type: Grant
    Filed: March 28, 2002
    Date of Patent: December 16, 2003
    Assignee: Max-Planck-Institut fur Mikrostrukturphysik
    Inventors: Ho Nyung Lee, Stephan Senz, Alina Visinoiu, Alain Pignolet, Dietrich Hesse, Ulrich Gösele
  • Publication number: 20030202728
    Abstract: The present invention provides a method for fast switching of optical properties in photonic crystals using pulsed/modulated free-carrier injection. The results disclosed herein indicate that several types of photonic crystal devices can be designed in which free carriers are used to vary dispersion curves, stop gaps in materials with photonic bandgaps to vary the bandgaps, reflection, transmission, absorption, gain, or phase. The use of pulsed free carrier injection to control the properties of photonic crystals on fast timescales forms the basis for all-optical switching using photonic crystals. Ultrafast switching of the band edge of a two-dimensional silicon photonic crystal is demonstrated near a wavelength of 1.9 &mgr;m. Changes in the refractive index are optically induced by injecting free carriers with 800 nm, 300 fs pulses. Band-edge shifts have been induced in silicon photonic crystals of up to 29 nm that occurs on the time-scale of the pump pulse.
    Type: Application
    Filed: April 24, 2002
    Publication date: October 30, 2003
    Inventors: Stephen W. Leonard, Henry M. van Driel, Jorg Schilling, Ralf Boris Wehrspohn, Ulrich Gosele, Stefan Senz
  • Patent number: 6589333
    Abstract: A method is described for the production of a suitable substrate for the subsequent growth of a mono-crystalline diamond layer. This method includes the following steps: Selection of a substrate of a mono-crystalline material having a fixed lattice constant (aSi) or with a layer consisting of such a material. Manufacture of a strained silicon layer with foreign material atoms incorporated at substitutional lattice sites on the mono-crystalline material of the substrate. Transfer of the strained layer into an at least partly relaxed state in which it adopts by relaxation and through the selected foreign material concentration a lattice constant (aSi(C) which satisfies the condition n.aSi(C)=m.aD, wherein n and m are integers and aD is the lattice constant of diamond, with the relaxed layer forming the substrate or substrate surface for the epitaxial growth.
    Type: Grant
    Filed: September 18, 2000
    Date of Patent: July 8, 2003
    Assignee: Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.
    Inventors: Ulrich Gösele, Andreas Plössl
  • Patent number: 6531235
    Abstract: A structure containing a ferroelectric material comprises a substrate comprising silicon, a buffer layer formed on the substrate, and a non-c-axis-oriented, electrically-conductive template layer formed on the buffer layer. The template layer comprises a perovskite oxide compound. A non-c-axis-oriented, anisotropic perovskite ferroelectric layer is formed on the template layer.
    Type: Grant
    Filed: June 6, 2001
    Date of Patent: March 11, 2003
    Assignee: Max-Planck-Institute für Mikrostrukturphysik
    Inventors: Ho Nyung Lee, Stephan Senz, Alina Visinoiu, Alain Pignolet, Dietrich Hesse, Ulrich Gösele
  • Publication number: 20030008179
    Abstract: A structure containing a ferroelectric material comprises a substrate such as silicon, a buffer layer formed on the substrate, and a non-c-axis-oriented, electrically-conductive template layer formed on the buffer layer. The template layer comprises a perovskite oxide compound. An epitaxially a-axis-oriented ferroelectric layer is formed on the template layer, and has a vector of spontaneous polarization oriented perpendicular or at least substantially perpendicular to the film normal.
    Type: Application
    Filed: March 28, 2002
    Publication date: January 9, 2003
    Inventors: Ho Nyung Lee, Stephan Senz, Alina Visinoiu, Alain Pignolet, Dietrich Hesse, Ulrich Gosele
  • Publication number: 20020197489
    Abstract: A structure containing a ferroelectric material comprises a substrate comprising silicon, a buffer layer formed on the substrate, and a non-c-axis-oriented, electrically-conductive template layer formed on the buffer layer. The template layer comprises a perovskite oxide compound. A non-c-axis-oriented, anisotropic perovskite ferroelectric layer is formed on the template layer.
    Type: Application
    Filed: June 6, 2001
    Publication date: December 26, 2002
    Inventors: Ho Nyung Lee, Stephan Senz, Alina Visinoiu, Alain Pignolet, Dietrich Hesse, Ulrich Gosele
  • Patent number: 6190778
    Abstract: A process for joining two solid bodies, in particular of silicon. via the substantially smooth surfaces that have first of all been coated with a monomolecular layer of a sulfur-containing organosilane, and the resultant solid bodies, which may be used in microelectronics or micromechanics.
    Type: Grant
    Filed: April 28, 1999
    Date of Patent: February 20, 2001
    Assignee: Degussa-Huls Aktiengesellschaft
    Inventors: Christoph Batz-Sohn, Gertrud Krauter, Ulrich Gosele
  • Patent number: 6010591
    Abstract: A method for the releasable bonding of at least two wafers (10, 12), for example of two silicon wafers (silicon discs), or of a silicon wafer and a glass wafer, or of a semiconductor wafer and a cover wafer, by a wafer bonding method in which the surfaces to be brought into contact with one another are at least substantially optically smooth and flat. Prior to bringing the surfaces of the wafers (10, 12) into contact, one or more drops of a liquid are applied to at least one of the surfaces, and the wafer bonding method is carried out at least substantially at room temperature, or at a somewhat higher temperature, or optionally at a somewhat lower temperature. The wafers (10, 12) which are bonded together can easily be separated from one another in that at least the liquid enclosed between the wafers (10, 12), which are bonded to one another, is exposed to a temperature lying substantially above the bonding temperature at which the liquid vaporizes. A wafer structure is also disclosed.
    Type: Grant
    Filed: November 19, 1997
    Date of Patent: January 4, 2000
    Assignee: Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V.
    Inventor: Ulrich Gosele
  • Patent number: 5985412
    Abstract: A method of manufacturing microstructures in which a hollow cavity is formed in a first wafer, in particular, a silicon wafer, and the hollow cavity is, covered over by a second wafer, which is in particular, also a silicon wafer, by a wafer bonding process in vacuum for the formation of an enclosed hollow cavity, wherein the wafer bonding is carried out in an ultra-high vacuum in order to achieve the smallest possible internal pressure in the hollow cavity of less than 0.1 mbar. The surfaces of the wafers which are to be brought into contact with one another are treated by a surface cleaning process in order to produce at least substantially pure surfaces, i.e. surfaces which consist substantially only of the material of the respective wafer and which are at least substantially free of H.sub.2 O, H.sub.2 and O.sub.2. A microstructure is also claimed.
    Type: Grant
    Filed: November 20, 1997
    Date of Patent: November 16, 1999
    Assignee: Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.
    Inventor: Ulrich Gosele