Abstract: Disclosed is a control system and methodology used for defining and executing parametric test sequences using automated test equipment. The control system is divided into components which separate fixed, reusable information from information which is specific to particular tests. One component contains reference data which describes the configuration of the wafer being tested as well as specifications for the tests to be carried out. Another component contains a set of measurement algorithms that describe individual tests to be performed on generic types of devices or parametric test structures. Execution of a test is carried out by a general test program which retrieves stored reference and test definition information and supplies it to the measurement algorithms to enable them to perform measurements on specific devices in the user specified sequence.

Abstract: An automated cassette handler transports a cassette containing integrated circuit wafers between first and second elevators in a standardized mechanical interface (SMIF) system for integrated circuit processing. The handler is adapted to grip and transport the cassette while positively pushing the wafers into the cassette.

Abstract: An automated cassette handler is disclosed for transporting a cassette containing integrated circuit wafers between first and second elevators in a standardized mechanical interface (SMIF) system for integrated circuit processing. The handler is adapted to grip and transport the cassette while positively pushing the wafers into the cassette.

Abstract: An automated cassette handler for transporting a cassette containing integrated circuit wafers between first and second elevators in a standardized mechanical interface (SMIF) system for integrated circuit processing. The handler is adapted to grip and transport the cassette while positively pushing the wafers into the cassette.

Abstract: Disclosed is an apparatus and method for restraining flat objects such as semiconductor wafers within a cassette placed inside a box or pod to prevent movement or vibration of the flat objects during storage or transport. A flexible or inflatable tube contacts and conforms to the edge of the objects to eliminate movement and provide vibrational damping without hard surface contact or damage. The tube may be deflated or removed from contact with the wafers to allow removal of the wafers from the cassette.