Abstract: Disclosed herein are systems and methods relating to a transfer chamber for an electronic device processing system. The transfer chamber includes a first magnetic levitation platform, having a magnetic levitation track disposed along a horizontal length of the transfer chamber and configured to generate a first magnetic field. The transfer chamber also includes a second magnetic levitation track disposed along a horizontal width of the transfer chamber and configured to generate a second magnetic field. A first plane of the first magnetic field crosses a second plane of the second magnetic field at a junction. The platform further includes at least one substrate carrier configured to move according to at least one of the first magnetic field or the second magnetic field.

Abstract: An electronic device manufacturing system including a substrate carrier configured to secure a substrate during processing and a controller, operatively coupled to the substrate carrier. The controller is configured to perform operations comprising receiving a set of input values associated with moving the substrate carrier from a first position to a second position along a magnetic levitation track. The operations further comprise determining, based on the set of input values, one or more corrective signals to apply to the substrate carrier during movement of the substrate carrier along the magnetic levitation track. The operations further comprise generating a magnetic field to move the substrate carrier on a direction along the magnetic levitation track and applying, to the substrate carrier, the one or more corrective signals to reduce vibrations that would be experienced by a substrate held by the substrate carrier due to a motion of the substrate carrier.

Abstract: Disclosed herein are systems and methods relating to a transfer chamber for an electronic device processing system. The transfer chamber includes a magnetic levitation platform, having a magnetic levitation track disposed along a length of the transfer chamber and configured to generate a magnetic field above the track. The transfer chamber also includes a magnetic levitation track disposed along a width of the transfer chamber such that a plane of this lateral track crosses a plane of the longitudinal track at a junction. The lateral track is configured to generate a magnetic field above or below the track. The platform further includes at least one substrate carrier configured to move along the longitudinal track and the lateral track. The substrate carrier also is configured to rotate at the junction.

Abstract: Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.

Abstract: Disclosed herein are systems and methods relating to a transfer chamber for an electronic device processing system. The transfer chamber includes a magnetic levitation platform, having a magnetic levitation track disposed along a length of the transfer chamber and configured to generate a magnetic field above the track. The transfer chamber also includes a magnetic levitation track disposed along a width of the transfer chamber such that a plane of this lateral track crosses a plane of the longitudinal track at a junction. The lateral track is configured to generate a magnetic field above or below the track. The platform further includes at least one substrate carrier configured to move along the longitudinal track and the lateral track. The substrate carrier also is configured to rotate at the junction.

Abstract: Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.

Abstract: Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.

Abstract: An apparatus for carrier alignment in a vacuum chamber is described. The apparatus includes a support extending in a first direction in the vacuum chamber, a magnetic levitation system configured to transport a first carrier in the first direction in the vacuum chamber, the magnetic levitation system comprising at least one magnet unit, and an alignment system for aligning the first carrier. The at least one magnet unit and the alignment system are rigidly fixed to the support. Further, a vacuum system and a method of aligning a carrier are described.

Abstract: Embodiments herein relate to a transport system and a substrate processing and transfer (SPT) system. The SPT system includes a transport system that connects two processing tools. The transport system includes a vacuum tunnel that is configured to transport substrates between the processing tools. The vacuum tunnel includes a substrate transport carriage to move the substrate through the vacuum tunnel. The SPT system has a variety of configurations that allow the user to add or remove processing chambers, depending on the process chambers required for a desired substrate processing procedure.

Abstract: Closure device or lock device for a vacuum chamber comprising a counter plate, which can be arranged on a vacuum chamber and surrounds an opening of the vacuum chamber, a frame, which is supported in such a way that the frame can be moved in relation to the counter plate and on which a closure cover is movably arranged, wherein the closure cover closes the opening in sealing manner in a closed position against the counter plate, at least one magnet device for producing a closing force acting between the counter plate and the closure cover, which is in engagement with the counter plate and with the closure cover.

Abstract: Method for calibrating a robot mounted on active magnetic bearings and having a gripper vertically positionable along a z axis and which is displaceable in a first magnetic bearing along an x axis and in a second magnetic bearing along a y axis includes dividing the first and second magnetic bearings into four mounting points; defining the setpoint center coordinates for the X, Y, Z axes and also the setpoint values for the angular positions ?, ? and transformation of the setpoint values into setpoint values for the vertical setpoint positions of the mounting points; specifying the actuating forces for the electromagnets of the mounting points; determining the current vertical positions for the mounting points; measuring the current vertical position of the mounting points and conversion into actual center coordinates; comparing the actual center coordinates with the setpoint center coordinates, determining the deviation and repeating the preceding steps.

Abstract: A device for particle free handling of substrates of micro technology within mini environments under clean room conditions works friction free and thus particle free. One component of the device is movable relative to an other component in at least the x-, y-, z-axes and a ?-direction and supported and driven along each of the axes and the direction contactless electromagnetically. Transmission of energy for bearing and driving the one component is effected contactless. The device includes at least one active component and at least one passive component. A movable active component may be guided on the fixed passive component by a magnet bearing, and a drive motor which rides with the active component may be coupled with an energy supply over an electromagnetic coupling.