Abstract: Disclosed in the application are a synthetic silica glass having low fluence-dependent transmission, particularly at about 193 nm, and a process for making the same. The glass may desirably exhibit a low level of fluorescence at 290 and 390 nm when activated at about 248 nm. The glass may desirably exhibit low level of LIWFD, [SiH*] and/or [ODC].

Abstract: Disclosed are synthetic silica glass having a low polarization-induced birefringence, process for making the glass and lithography system comprising optical element made of the glass. The silica glass has a polarization-induced birefringence measured at 633 nm of less than about 0.1 nm/cm when subjected to excimer laser pulses at about 193 nm having a fluence of about 40 ?J·cm?2·pulse?1 and a pulse length of about 25 ns for 5×109 pulses.

Abstract: Disclosed are synthetic silica glass having a low polarization-induced birefringence, process for making the glass and lithography system comprising optical element made of the glass. The silica glass has a polarization-induced birefringence measured at 633 nm of less than about 0.1 nm/cm when subjected to excimer laser pulses at about 193 nm having a fluence of about 40 ?J·cm?2·pulse?1 and a pulse length of about 25 ns for 5×109 pulses.

Abstract: Disclosed are synthetic silica glass having a low polarization-induced birefringence, process for making the glass and lithography system comprising optical element made of the glass. The silica glass has a polarization-induced birefringence measured at 633 nm of less than about 0.1 nm/cm when subjected to excimer laser pulses at about 193 nm having a fluence of about 40 ?J·cm?2·pulse?1 and a pulse length of about 25 ns for 5×109 pulses.

Abstract: A method of minimizing localized heating of, or minimizing signal losses across a source of loss in, an optical fiber used in transmission of a high power optical signal at an operating wavelength. These methods include the steps of: providing an optical fiber which comprises either (i) a coating characterized by an absorbance of less than about 4.5 dB/cm at the operating wavelength or (ii) a refractive index lower than the refractive index of a cladding layer of the optical fiber by more than about 3×10?3 at the operating wavelength, or (iii) both (i) and (ii); and transmitting a optical signal having a power greater than about 250 mW through the optical fiber, wherein the coating, cladding layer, or combination thereof are selected to minimize localized heating of the optical fiber or to result in a signal loss across a source of loss that is less than about 250 mW at the operating wavelength.