Patents by Inventor Ulrich Walk

Ulrich Walk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Retainer, Method For Producing Same And Use Thereof
    Publication number: 20160111319
    Abstract: A retainer has a coating composed of silicon carbide, glassy carbon or pyrolytic carbon on its surface. A method for producing the retainer and the use of the retainer in a plasma-driven vapor deposition are also provided.
    Type: Application
    Filed: June 5, 2014
    Publication date: April 21, 2016
    Inventors: HANS-PETER VOELK, ALEXANDER PIECHULLA, ULRICH WALK, JENS-UWE FUCHS, DIETER ZERNICKEL
  • Rapid thermal processing (RTP) system with gas driven rotating substrate
    Patent number: 6005226
    Abstract: An apparatus, method, and system for Rapid Thermal Processing (RTP), whereby the object to be processed is rotated under the radiation sources of the RTP system by a gas jet system, is presented.
    Type: Grant
    Filed: November 24, 1997
    Date of Patent: December 21, 1999
    Assignee: Steag-RTP Systems
    Inventors: Helmut Aschner, Andreas Hauke, Ulrich Walk, Dieter Zernickel
  • Inflatable elastomeric element for rapid thermal processing (RTP) system
    Patent number: 5870526
    Abstract: A rapid thermal processing (RTP) chamber is disclosed, wherein a transparent plate and a body are sealed with a gas tight seal, and wherein the gas tight seal is activated by inflating an inflatable element.
    Type: Grant
    Filed: July 17, 1997
    Date of Patent: February 9, 1999
    Assignee: Steag-Ast
    Inventors: Helmut Aschner, Helmut Merkle, Ulrich Walk, Dieter Zernickel