Patents by Inventor Uma Satyendra

Uma Satyendra has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for planarizing photoresist
    Patent number: 6361402
    Abstract: A method for polishing an object having a layer of photoresist, the method, employing the following steps: a) applying a layer of slurry on an a layer of photoresist on an object having a first and a second side, the layer of photoresist on one of the first and second side, the object having a center axis perpendicular to the first and second side; b) contacting the layer of slurry with a pad having a first and second side, the first side of the pad exerting a force on the slurry.
    Type: Grant
    Filed: October 26, 1999
    Date of Patent: March 26, 2002
    Assignee: International Business Machines Corporation
    Inventors: Donald F. Canaperi, Rangarajan Jagannathan, Mahadevaiyer Krishnan, Max G. Levy, Uma Satyendra, Matthew Sendelbach, James A. Tornello, William Wille