Abstract: A substrate inspection device and method are disclosed. The substrate inspection device includes a conveyance stage for carrying the substrate on its surface; a region scanning camera located at a first side of the conveyance stage, provided to be opposite to the surface, and configured for inspecting standard specification of the substrate; a line scanning camera located at the first side of the conveyance stage, provided to be opposite to the surface, and configured for inspecting edge line and size of the substrate; and a light source located at a second side of the conveyance stage opposite to the first side, configured for irradiating light rays onto the substrate, so as to be utilized by the region scanning camera and the line scanning camera for inspecting the substrate.

Abstract: The present disclosure provides a CIM system, a control method and a production informatization system. The CIM system comprises an integrated control device and an integrated communication device. The integrated control device comprises an interface module and an integrated control module; wherein the interface module is arranged to receive a control command and identify a controlled device at which the control command is directed; the integrated control module is arranged to obtain, based on the control command, a control instruction that is recognizable by the controlled device and transmit the control instruction to the integrated communication device. The integrated communication device is arranged to determine a communication protocol type between it and the controlled device, and encapsulate the control instruction into a control message of corresponding communication protocol type to transmit to the controlled device.

Abstract: A substrate inspection device and method are disclosed. The substrate inspection device includes a conveyance stage for carrying the substrate on its surface; a region scanning camera located at a first side of the conveyance stage, provided to be opposite to the surface, and configured for inspecting standard specification of the substrate; a line scanning camera located at the first side of the conveyance stage, provided to be opposite to the surface, and configured for inspecting edge line and size of the substrate; and a light source located at a second side of the conveyance stage opposite to the first side, configured for irradiating light rays onto the substrate, so as to be utilized by the region scanning camera and the line scanning camera for inspecting the substrate.