Abstract: A linear stacked stage suitable for REBL may include a first upper fast stage configured to translate a first plurality of wafers in a first direction along a first axis, the first upper fast stage configured to secure a first plurality of wafers; a second upper fast stage configured to translate a second plurality of wafers in a second direction along the first axis, the second upper fast stage configured to secure the second plurality of wafers, the second direction opposite to the first direction, wherein the translation of the first upper fast stage and the translation of the second upper fast stage are configured to substantially eliminate inertial reaction forces generated by motion of the first upper fast stage and the second upper fast stage; and a carrier stage configured to translate the first and second upper fast stages along a second axis.

Abstract: One embodiment relates to a method in which a measuring apparatus is used to collect a first set of wave form data which depends on micro-structure of a moving surface. A correspondence is identified between the first set of wave form data and actual position data. Calibrated wave form data is stored which indicates said correspondence between the first set of wave form data and actual position data. In addition, the measuring apparatus may be used to collect a second set of wave form data which depends on micro-structure of the moving surface, a cross-correlation may be computed between the second set of wave form data and the calibrated wave form data. Another embodiment relates to an apparatus for measuring position and/or motion using surface micro-structure of a moving surface. Another embodiment relates to method for measuring motion using surface micro-structure. Other embodiments and features are also disclosed.

Abstract: A method for actively suspending a real plant in a vehicle includes modifying a control signal on the basis of a difference between a property of the real plant, as indicated by the response of the real plant to the control signal, and a property of a nominal plant.

Abstract: A disk drive includes a head stack assembly having a storage disk, a data transducer, an actuator pivot center and a positioner. The positioner includes a magnet assembly, a primary coil array that generates a first rotational displacement of the data transducer, and a secondary coil array that generates a second rotational displacement of the data transducer. The absolute value of the ratio of the first rotational displacement to the second rotational displacement is at least approximately 1.5:1. The primary coil array generates a first vibration displacement that causes the data transducer to move off track, and the secondary coil array generates a second vibration displacement that is out of phase from the first vibration displacement. The absolute value of the sum of the first and second vibration displacements is less than the absolute value of the first vibration displacement.