Patents by Inventor Uri Lev

Uri Lev has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10541104
    Abstract: A method and a charged particle beam system that includes charged particle beam optics and a movable stage; wherein the movable stage is configured to introduce a movement between the object and charged particle beam optics; wherein the movement is of a constant velocity and along a first direction; wherein the charged particle beam optics is configured to scan, by the charged particle beam, multiple areas of the object so that each point of the multiple areas is scanned multiple times; wherein the multiple areas partially overlap; wherein the scanning is executed by the charged particle beam optics; wherein the scanning comprises performing counter-movement deflections of the charged particle beam for at least partially compensating for the movement; and wherein each area of the multiple areas is scanned by following an area scan scheme that defines multiple scan lines that differ from each other.
    Type: Grant
    Filed: July 9, 2015
    Date of Patent: January 21, 2020
    Assignee: Applied Materials Israel Ltd.
    Inventors: Uri Lev, Alon Litman, Zvi Nir, Arnon Mizrahy
  • Patent number: 10347462
    Abstract: A method for detecting crystal defects includes scanning a first FOV on a first sample using a charged particle beam with a plurality of different tilt angles. BSE emitted from the first sample are detected and a first image of the first FOV is created. A first area within the first image is identified where signals from the BSE are lower than other areas of the first image. A second FOV on a second sample is scanned using approximately the same tilt angles or deflections as those used to scan the first area. The BSE emitted from the second sample are detected and a second image of the second FOV is created. Crystal defects within the second sample are identified by identifying areas within the second image where signals from the BSE are different than other areas of the second image.
    Type: Grant
    Filed: April 17, 2018
    Date of Patent: July 9, 2019
    Assignee: Applied Materials Israel Ltd.
    Inventors: Dror Shemesh, Uri Lev, Benjamin Colombeau, Amir Wachs, Kourosh Nafisi
  • Publication number: 20190180975
    Abstract: A method for detecting crystal defects includes scanning a first FOV on a first sample using a charged particle beam with a plurality of different tilt angles. BSE emitted from the first sample are detected and a first image of the first FOV is created. A first area within the first image is identified where signals from the BSE are lower than other areas of the first image. A second FOV on a second sample is scanned using approximately the same tilt angles or deflections as those used to scan the first area. The BSE emitted from the second sample are detected and a second image of the second FOV is created. Crystal defects within the second sample are identified by identifying areas within the second image where signals from the BSE are different than other areas of the second image.
    Type: Application
    Filed: April 17, 2018
    Publication date: June 13, 2019
    Inventors: Dror Shemesh, Uri Lev, Benjamin Colombeau, Amir Wachs, Kourosh Nafisi
  • Publication number: 20170011883
    Abstract: A method and a charged particle beam system that includes charged particle beam optics and a movable stage; wherein the movable stage is configured to introduce a movement between the object and charged particle beam optics; wherein the movement is of a constant velocity and along a first direction; wherein the charged particle beam optics is configured to scan, by the charged particle beam, multiple areas of the object so that each point of the multiple areas is scanned multiple times; wherein the multiple areas partially overlap; wherein the scanning is executed by the charged particle beam optics; wherein the scanning comprises performing counter-movement deflections of the charged particle beam for at least partially compensating for the movement; and wherein each area of the multiple areas is scanned by following an area scan scheme that defines multiple scan lines that differ from each other.
    Type: Application
    Filed: July 9, 2015
    Publication date: January 12, 2017
    Inventors: Uri Lev, Alon Litman, Zvi Nir, Arnon Mizrahy
  • Patent number: D560402
    Type: Grant
    Filed: December 12, 2006
    Date of Patent: January 29, 2008
    Assignee: Veliva Trapez Ltd
    Inventor: Avraham Uri Lev