Patents by Inventor Uriel Malul

Uriel Malul has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • On-tool wavefront aberrations measurement system and method
    Patent number: 9395266
    Abstract: An on-tool measurement system and a method for measuring optical system's wavefront (WF) aberrations are disclosed. The on-tool measurement system includes an optical setup comprising a moveable deflection element further comprising a highly transparent region. The deflection element includes a first surface configured to project a first image of at least one object onto a sensor and the highly transparent region includes a second surface configured to project a second image of the at least one object onto the sensor. The on-tool measurement system includes a sensor configured to capture the first and second images and a controller configured to measure differential displacements between the first and second images at each deflection element position and to calculate the optical setup local WF gradients that depend on the measured differential displacements.
    Type: Grant
    Filed: December 4, 2014
    Date of Patent: July 19, 2016
    Assignee: APPLIED MATERIALS ISRAEL LTD.
    Inventors: Boris Golberg, Amir Moshe Sagiv, Haim Feldman, Uriel Malul, Adam Baer
  • ON-TOOL WAVEFRONT ABERRATIONS MEASUREMENT SYSTEM AND METHOD
    Publication number: 20150300913
    Abstract: An on-tool measurement system and a method for measuring optical system's wavefront (WF) aberrations are disclosed. The on-tool measurement system includes an optical setup comprising a moveable deflection element further comprising a highly transparent region. The deflection element includes a first surface configured to project a first image of at least one object onto a sensor and the highly transparent region includes a second surface configured to project a second image of the at least one object onto the sensor. The on-tool measurement system includes a sensor configured to capture the first and second images and a controller configured to measure differential displacements between the first and second images at each deflection element position and to calculate the optical setup local WF gradients that depend on the measured differential displacements.
    Type: Application
    Filed: December 4, 2014
    Publication date: October 22, 2015
    Inventors: Boris Golberg, Amir Moshe Sagiv, Haim Feldman, Uriel Malul, Adam Baer