Patents by Inventor Usami YASUTSUGU

Usami YASUTSUGU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ELECTRON BEAM APPARATUS
    Publication number: 20140158886
    Abstract: In an electron beam apparatus having a plurality of electron beam columns arranged in a dense arrangement, a transfer device is inserted to operate the electron beam column so that the function and repair may be enhanced. An outer housing of the electron beam column includes a large diameter portion and a small diameter portion, and thus a gap may be formed near the small diameter portion. The transfer device penetrates the gap of the electron beam column at an outer periphery in a linear shape, and is connected to the electron beam column at a central portion.
    Type: Application
    Filed: December 4, 2013
    Publication date: June 12, 2014
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Ogawa TAKASHI, Sekiya HARUTAKA, Usami YASUTSUGU