Patents by Inventor Usha R. Gowrishetty

Usha R. Gowrishetty has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Single element three terminal piezoresistive pressure sensor
    Patent number: 8525279
    Abstract: Embodiments of the invention provide for three-terminal pressure sensors (“3-TPS”), a method of measuring a pressure with a 3-TPS, and a method of manufacturing a 3-TPS. In some embodiments, the 3-TPS includes a semiconducting layer with cavity and a 3-TPS element having at least one piezoresistive layer overlapping at least a portion of the cavity and oriented at an angle selected to provide a desired sensitivity for the 3-TPS. The method of measuring a pressure with a 3-TPS is performed with a 3-TPS that includes an input terminal, first and second output terminals, and a 3-TPS element, the 3-TPS element overlapping at least a portion of a cavity at a predetermined angle. The method comprises providing an input signal to the input terminal of the 3-TPS, determining a difference between two output signals from the respective output terminals of the 3-TPS, and correlating the determined difference to a pressure.
    Type: Grant
    Filed: June 4, 2010
    Date of Patent: September 3, 2013
    Assignee: University of Louisville Research Foundation, Inc.
    Inventors: Usha R. Gowrishetty, Kevin M. Walsh
  • SINGLE ELEMENT THREE TERMINAL PIEZORESISTIVE PRESSURE SENSOR
    Publication number: 20100308791
    Abstract: Embodiments of the invention provide for three-terminal pressure sensors (“3-TPS”), a method of measuring a pressure with a 3-TPS, and a method of manufacturing a 3-TPS. In some embodiments, the 3-TPS includes a semiconducting layer with cavity and a 3-TPS element having at least one piezoresistive layer overlapping at least a portion of the cavity and oriented at an angle selected to provide a desired sensitivity for the 3-TPS. The method of measuring a pressure with a 3-TPS is performed with a 3-TPS that includes an input terminal, first and second output terminals, and a 3-TPS element, the 3-TPS element overlapping at least a portion of a cavity at a predetermined angle. The method comprises providing an input signal to the input terminal of the 3-TPS, determining a difference between two output signals from the respective output terminals of the 3-TPS, and correlating the determined difference to a pressure.
    Type: Application
    Filed: June 4, 2010
    Publication date: December 9, 2010
    Applicant: UNIVERSITY OF LOUISVILLE RESEARCH FOUNDATION
    Inventors: Usha R. Gowrishetty, Kevin M. Walsh