Patents by Inventor Ute Mareck

Ute Mareck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Coated silicon wafer and process for its production
    Publication number: 20030041798
    Abstract: A silicon wafer is provided having a polished front surface with an epitaxial coating and a polished back surface, which is distinguished by a SFQRmax value of less than or equal to 0.10 &mgr;m (26 mm×8 mm; 99%). There is also a process for producing silicon wafers of this type by sawing up a single crystal, carrying out an abrasive step, simultaneously polishing a front surface and a back surface of at least three silicon wafers, and applying an epitaxial coating.
    Type: Application
    Filed: September 3, 2002
    Publication date: March 6, 2003
    Applicant: WACKER SILTRONIC GESELLSCHAFT FUR HALBLEITERMATERIALEN AG
    Inventors: Guido Wenski, Ute Mareck, Thomas Altmann