Patents by Inventor Uwe Dietze

Uwe Dietze has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11958995
    Abstract: A method is provided for sealing discontinuities in vehicle bodywork, using an at least two-layer adhesive product which comprises at least one thermally activatable adhesive layer and a film layer of a polymeric material, where first the adhesive product is positioned with the adhesive layer onto the discontinuity for sealing, the adhesive layer sealingly wets the discontinuity, optionally after temperature increase, at elevated temperature the thermal activation of the adhesive ensues, characterized in that the adhesive layer used comprises a layer of a thermally activatable adhesive, specifically a layer based on a vulcanizable adhesive, and the thermal activation takes place with vulcanization of the adhesive.
    Type: Grant
    Filed: August 16, 2018
    Date of Patent: April 16, 2024
    Assignee: tesa SE
    Inventors: Sebastian Dietze, Jasmin Flucke, Uwe Schümann, Anna Schubert
  • Patent number: 11410858
    Abstract: An apparatus includes a housing having an elongated chamber, an inlet opening extending into the chamber, and a slit shaped outlet opening. A tube element extends in a longitudinal direction through the chamber and is at least partially transparent to UV radiation. The tube element is arranged in the chamber such that a flow space is formed between the tube element and the wall of the chamber. At least one UV-radiation source in the tube element is arranged to emit UV-radiation in the direction of the flow space and through the outlet opening out of the housing to generate radicals in the liquid and bring the radicals to the substrate surface. Means are provided for adjusting the radiation exiting the outlet opening through the tube element such that the intensity of the radiation increases towards the longitudinal center plane of the chamber.
    Type: Grant
    Filed: March 1, 2018
    Date of Patent: August 9, 2022
    Assignee: SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO
    Inventors: Peter Dress, Uwe Dietze, Peter Grabitz
  • Patent number: 11358172
    Abstract: Methods for treating substrates are described. The methods comprise the steps of flowing an aqueous liquid medium through a flow channel and at least one outlet slit onto a substrate to be treated and exposing the aqueous liquid medium to UV-radiation of a specific wavelength at least in a portion of the flow channel immediately adjacent the at least one outlet slit and after the aqueous liquid medium has flown through the outlet opening towards the substrate and thus prior to and while applying the aqueous liquid medium to the surface of the substrate to be treated. In one method, the electrical conductance of the aqueous liquid medium is adjusted to be in the range of 20 to 2000 ?S, by the addition of an additive to the aqueous liquid medium, the aqueous liquid medium prior to the addition of the additive having an electrical conductivity below 20 ?S, prior to or while exposing the same to the UV-radiation.
    Type: Grant
    Filed: September 24, 2015
    Date of Patent: June 14, 2022
    Assignee: SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO. KG
    Inventors: Davide Dattilo, Uwe Dietze, SherJang Singh
  • Patent number: 11130158
    Abstract: An apparatus for applying a liquid medium irradiated with UV radiation onto a substrate is disclosed, the apparatus comprising: a housing having an elongated chamber, at least one inlet opening, which opens into the chamber, and at least one slit shaped outlet opening opposite the inlet opening, which extends over the length of the chamber, a tube element, which extends in a longitudinal direction through the chamber, the tube element being at least partially transparent to UV radiation, wherein the tube element is arranged in the chamber such that a flow space is formed between the tube element and the wall of the chamber, the flow space being symmetric with respect to a longitudinal centre plane of the chamber, the longitudinal centre plane dissecting the outlet opening in its middle, and such that the tube element extends into the slit shaped outlet opening in the housing and thereby forms two longitudinally extending outlet slits between the tube element and the housing, and at least one UV-radiation sour
    Type: Grant
    Filed: August 24, 2016
    Date of Patent: September 28, 2021
    Assignee: SUSS MICRO TEC PHOTOMASK EQUIPMENT GMBH & CO KG
    Inventors: Peter Dress, Uwe Dietze, Peter Grabitz
  • Patent number: 11090693
    Abstract: An apparatus for applying a liquid medium irradiated with UV radiation onto a substrate is disclosed, the apparatus comprising: a housing having an elongated chamber, at least one inlet opening, which opens into the chamber, and at least one slit shaped outlet opening opposite the inlet opening, which extends over the length of the chamber, a tube element, which extends in a longitudinal direction through the chamber, the tube element being at least partially transparent to UV radiation, wherein the tube element is arranged in the chamber such that a flow space is formed between the tube element and the wall of the chamber, the flow space being symmetric with respect to a longitudinal centre plane of the chamber, the longitudinal centre plane dissecting the outlet opening in its middle, and such that the tube element extends into the slit shaped outlet opening in the housing and thereby forms two longitudinally extending outlet silts between the tube element and the housing, and at least one UV-radiation sour
    Type: Grant
    Filed: August 24, 2016
    Date of Patent: August 17, 2021
    Assignee: SUSS MICRO TEC PHOTOMASK EQUIPMENT GMBH & CO KG
    Inventors: Peter Dress, Uwe Dietze, Peter Grabitz
  • Patent number: 10898932
    Abstract: A method and an apparatus for cleaning a substrate having at least one surface having a residue to be removed thereon is described. The method comprises: scanning at least an area of the surface having the residue thereon with laser light to thereby heat the surface and the residue; controlling the heating so that a part of the residue first liquefies such that the liquefied part of the residue starts flowing towards the solid part of the residue, thereby forming a meniscus with the solid part of the residue and accumulating in part on top of the solid part, the thus generated thicker layer of residue absorbing further heat to be decomposed or vaporized.
    Type: Grant
    Filed: February 12, 2018
    Date of Patent: January 26, 2021
    Assignee: SUSS MICRO TEC PHOTOMASK EQUIPMENT GMBH & CO KG
    Inventors: Uwe Dietze, Habib Hichri, Seongkuk Lee, Davide Dattilo, Martin Samayoa
  • Patent number: 10845718
    Abstract: A holder for receiving and for protecting one side of a photomask or a photomask with pellicle from a cleaning medium, a method for cleaning such a photomask and an apparatus for opening and closing a holder are disclosed. The holder comprises a base having at least three support elements, which are arranged for receiving and for holding the photomask or the photomask with pellicle spaced from the bottom surface of the base, a sealing frame having an upper side and a lower side, wherein the lower side may be seated onto the base, and wherein the sealing frame comprises a centre opening, which is sized such that it may receive the photomask in a spaced manner.
    Type: Grant
    Filed: November 16, 2017
    Date of Patent: November 24, 2020
    Assignee: SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO. KG
    Inventors: Jens Krümberg, Adem Beser, Uwe Dietze
  • Patent number: 10843235
    Abstract: An apparatus for applying a liquid medium irradiated with UV radiation onto a substrata includes a housing having an elongated chamber, at least one inlet opening, and a slit shaped outlet opening opposite the inlet opening. A tube element extends through the chamber and is at least partially transparent to UV radiation. A flow space symmetric with respect to a longitudinal center plane of the chamber is formed between the tube element and a wall of the chamber. The longitudinal center plane dissects the outlet opening in its middle such that the tube element extends into the slit shaped outlet opening to form two longitudinally extending outlet slits between the tube element and the housing. At least one UV-radiation source in the tube element is arranged to emit UV-radiation in the direction of the flow space and through the outlet slits.
    Type: Grant
    Filed: August 24, 2016
    Date of Patent: November 24, 2020
    Assignee: SUSS MICRO TEC PHOTOMASK EQUIPMENT GMBH & CO KG
    Inventors: Jörg Duda, Uwe Dietze
  • Patent number: 10722925
    Abstract: A treatment head for treating a surface area of a substrate includes a housing having a main surface configured to be arranged adjacent to and facing the surface area of the substrate to be treated. An exhaust opening in the main surface of the housing is connectable to an exhaust device via an exhaust gas path formed at least in part in the housing. A radiative heater is arranged in the housing to emit heat radiation through a radiation opening in the main surface. A plasma source is arranged in the housing to emit a plasma jet through a plasma exit opening in the main surface. An outlet opening in the main surface of the housing is connectable to a gas source via an gas path formed at least in part in the housing. The centers of the exhaust opening, the radiation opening, the plasma exit opening, and the outlet opening are arranged in the above order along a first direction of the main surface.
    Type: Grant
    Filed: December 4, 2017
    Date of Patent: July 28, 2020
    Assignee: SUSS MICRO TEC PHOTOMASK EQUIPMENT GMBH & CO KG
    Inventors: Uwe Dietze, Martin Samayoa
  • Publication number: 20200075354
    Abstract: An apparatus for applying a liquid medium irradiated with UV radiation onto a substrate is disclosed.
    Type: Application
    Filed: March 1, 2018
    Publication date: March 5, 2020
    Inventors: Peter Dress, Uwe Dietze, Peter Grabitz
  • Publication number: 20190369510
    Abstract: A holder for receiving and for protecting one side of a photomask or a photomask with pellicle from a cleaning medium, a method for cleaning such a photomask and an apparatus for opening and closing a holder are disclosed. The holder comprises a base having at least three support elements, which are arranged for receiving and for holding the photomask or the photomask with pellicle spaced from the bottom surface of the base, a sealing frame having an upper side and a lower side, wherein the lower side may be seated onto the base, and wherein the sealing frame comprises a centre opening, which is sized such that it may receive the photomask in a spaced manner.
    Type: Application
    Filed: November 16, 2017
    Publication date: December 5, 2019
    Inventors: Jens Krümberg, Adem Beser, Uwe Dietze
  • Patent number: 10416575
    Abstract: An apparatus and a method for cleaning a partial area of a substrate, in particular a photomask, are described.
    Type: Grant
    Filed: November 16, 2016
    Date of Patent: September 17, 2019
    Assignee: SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO. KG
    Inventors: Davide Dattilo, Uwe Dietze, Martin Samayoa
  • Publication number: 20190247896
    Abstract: A method and an apparatus for cleaning a substrate having at least one surface having a residue to be removed thereon is described. The method comprises: scanning at least an area of the surface having the residue thereon with laser light to thereby heat the surface and the residue; controlling the heating so that a part of the residue first liquefies such that the liquefied part of the residue starts flowing towards the solid part of the residue, thereby forming a meniscus with the solid part of the residue and accumulating in part on top of the solid part, the thus generated thicker layer of residue absorbing further heat to be decomposed or vaporized.
    Type: Application
    Filed: February 12, 2018
    Publication date: August 15, 2019
    Inventors: Uwe Dietze, Habib Hichri, Lee Seongklik, Davide Dattilo, Martin Samayoa
  • Publication number: 20190168269
    Abstract: A treatment head for treating a surface area of a substrate includes a housing having a main surface configured to be arranged adjacent to and facing the surface area of the substrate to be treated. An exhaust opening in the main surface of the housing is connectable to an exhaust device via an exhaust gas path formed at least in part in the housing. A radiative heater is arranged in the housing to emit heat radiation through a radiation opening in the main surface. A plasma source is arranged in the housing to emit a plasma jet through a plasma exit opening in the main surface. An outlet opening in the main surface of the housing is connectable to a gas source via an gas path formed at least in part in the housing. The centers of the exhaust opening, the radiation opening, the plasma exit opening, and the outlet opening are arranged in the above order along a first direction of the main surface.
    Type: Application
    Filed: December 4, 2017
    Publication date: June 6, 2019
    Inventors: Uwe Dietze, Martin Samayoa
  • Patent number: 10265739
    Abstract: The application describes several methods and an apparatus for treatment of at least partial areas of a substrate. In said methods, at least one liquid is applied to at least one partial area of the substrate and electromagnetic radiation is introduced into this liquid, in order to achieve a desired effect in accordance with the respective method. In one method, radicals are generated in the liquid by means of UV radiation prior to application of the liquid, wherein generation of the radicals occurs directly before applying the liquid to the substrate, such that at least a portion of the radicals reaches the substrate.
    Type: Grant
    Filed: May 18, 2017
    Date of Patent: April 23, 2019
    Assignee: SUSS MICROTEC PHOTOMASK EQUIPMENT GMBH & CO. KG
    Inventors: Uwe Dietze, Peter Dress, SherJang Singh
  • Publication number: 20180243802
    Abstract: An apparatus for applying a liquid medium irradiated with UV radiation onto a substrate is disclosed, the apparatus comprising: a housing having an elongated chamber, at least one inlet opening, which opens into the chamber, and at least one slit shaped outlet opening opposite the inlet opening, which extends over the length of the chamber, a tube element, which extends in a longitudinal direction through the chamber, the tube element being at least partially transparent to UV radiation, wherein the tube element is arranged in the chamber such that a flow space is formed between the tube element and the wall of the chamber, the flow space being symmetric with respect to a longitudinal centre plane of the chamber, the longitudinal centre plane dissecting the outlet opening in its middle, and such that the tube element extends into the slit shaped outlet opening in the housing and thereby forms two longitudinally extending outlet slits between the tube element and the housing, and at least one UV-radiation sour
    Type: Application
    Filed: August 24, 2016
    Publication date: August 30, 2018
    Inventors: Peter Dress, Uwe Dietze, Peter Grabitz
  • Publication number: 20180236501
    Abstract: An apparatus for applying a liquid medium irradiated with UV radiation onto a substrata is disclosed, the apparatus comprising: a housing having an elongated chamber, at least one inlet opening, which opens into the chamber and at least one slit shaped outlet opening opposite the inlet opening, which extends over the length of the chamber, a tube element, which extends in a longitudinal direction through the chamber, the tube element being at least partially transparent to UV radiation, wherein the tube element is arranged in the chamber such that a flow space is formed between the tube element and the wall of the chamber, the flow space being symmetric with respect to a longitudinal center plane of the chamber, the longitudinal center plane dissecting the outlet opening in its middle, and such that the tube element extends into the slit shaped outlet opening in the housing and thereby forms two longitudinally extending outlet slits between the tube element and the housing, and at least one UV-radiation sourc
    Type: Application
    Filed: August 24, 2016
    Publication date: August 23, 2018
    Inventors: Jörg Duda, Uwe Dietze
  • Publication number: 20180221919
    Abstract: An apparatus for applying a liquid medium irradiated with UV radiation onto a substrate is disclosed, the apparatus comprising: a housing having an elongated chamber, at least one inlet opening, which opens into the chamber, and at least one slit shaped outlet opening opposite the inlet opening, which extends over the length of the chamber, a tube element, which extends in a longitudinal direction through the chamber, the tube element being at least partially transparent to UV radiation, wherein the tube element is arranged in the chamber such that a flow space is formed between the tube element and the wall of the chamber, the flow space being symmetric with respect to a longitudinal centre plane of the chamber, the longitudinal centre plane dissecting the outlet opening in its middle, and such that the tube element extends into the slit shaped outlet opening in the housing and thereby forms two longitudinally extending outlet silts between the tube element and the housing, and at least one UV-radiation sour
    Type: Application
    Filed: August 24, 2016
    Publication date: August 9, 2018
    Inventors: Peter Dress, Uwe Dietze, Peter Grabitz
  • Publication number: 20180136573
    Abstract: An apparatus and a method for cleaning a partial area of a substrate, in particular a photomask, are described.
    Type: Application
    Filed: November 16, 2016
    Publication date: May 17, 2018
    Inventors: Davide Dattilo, Uwe Dietze, Martin Samayoa
  • Publication number: 20170320108
    Abstract: The application describes several methods and an apparatus for treatment of at least partial areas of a substrate. In said methods, at least one liquid is applied to at least one partial area of the substrate and electromagnetic radiation is introduced into this liquid. In order to achieve a desired effect in accordance with the respective method, in one method, radicals are generated in the liquid by means of UV radiation prior to application of the liquid, wherein generation of the radicals occurs directly before applying the liquid to the substrate, such that at least a portion of the radicals reaches the substrate.
    Type: Application
    Filed: May 18, 2017
    Publication date: November 9, 2017
    Inventors: Uwe Dietze, Peter Dress, Sherjang Sing