Abstract: A workpiece holder for a plasma-enhanced chemical vapor deposition system is configured to produce a plasma from a process gas surrounding the workpiece holder. The workpiece holder is also configured to heat the surroundings of the workpiece holder to a process temperature provided for the vapor deposition. A chemical vapor deposition system and an operating method for the system are also provided.

Abstract: A device for plasma-enhanced chemical vapor deposition includes a process chamber configured to receive at least one workpiece carrier. The device is configured to heat the process chamber with the aid of at least one workpiece carrier that can be received by the process chamber. A system and a method for plasma-enhanced chemical vapor deposition are also provided.

Abstract: A method of forming a layer on a plurality of semiconductor substrates is described, wherein the semiconductor substrates are accommodated in a wafer boat such that the semiconductor substrates are arranged in opposed pairs having their surfaces to be coated facing each other, and such that an alternating voltage can be applied between the semiconductor substrates of each pair to generate a plasma between the wafers of a pair, and wherein the wafer boat with the plurality of semiconductor substrates is accommodated in a process chamber.

Abstract: A method for passivating a surface of a semiconductor material includes forming a layer stack having an aluminum oxide layer and an outer coating on the surface of the semiconductor material. The aluminum oxide layer and the outer coating are respectively formed in vacuum processes in which a vacuum is present. The vacuum is maintained between the forming of the aluminum oxide layer and the forming of the outer coating. Hydrogen and oxygen are supplied after the forming of the aluminum oxide layer and before the forming of the outer coating. A semiconductor substrate is also provided.

Abstract: A retainer has a coating composed of silicon carbide, glassy carbon or pyrolytic carbon on its surface. A method for producing the retainer and the use of the retainer in a plasma-driven vapor deposition are also provided.

Abstract: The invention relates to a process for performing chemical and/or physical and/or biological reactions, in which the reactants are brought into operative connection with reaction particles 13 promoting or making possible the reaction. The invention furthermore relates to reaction particles 13 as such. It is proposed to use as reaction particles 13 essentially planar particles with a thickness of about 5 .mu.m to about 1500 .mu.m and an area of about 5 (mm).sup.2 to about 1000 (mm).sup.2. Reaction particles 13 can be used, e.g., as growth surface for biomass. In particular, they can be introduced in a waste-water reactor 1 and thoroughly mixed with the waste water. Reaction particles 13 have a very high specific surface, which, moreover, is easily accessible. Furthermore, reaction particles 13 can be easily set in motion, e.g., by a stirrer 12.

Abstract: A suction tube for a fly frame, roving frame, ring spinning machine or the like for collecting broken ends of yarn at the outlet rollers of the machine. The suction tube is connected to a collection chamber through a flexible sealing sleeve that permits the suction tube to pivot between its operative and inoperative positions. The suction tube comprises a suction end disposed under the bottom roller of the outlet rollers that has a body portion formed with a suction opening therein, an opposite end connected to the flexible sealing sleeve, and a pair of side walls projecting upwardly from the suction end body portion toward the bottom roller and longitudinally beyond the suction opening on opposite sides of the yarn for confining the suction substantially to the bottom roller and the yarn path.

Abstract: In a process for the biological sewage purification of sewage containing organic as well as nitrogen-containing pollutants, carbon decomposition and nitrogen removal are performed. The sewage is gassed with air and/or pure oxygen in a reactor in the presence of a biomass fixed on a support material and then, in a secondary sedimentation step, is separated into purified water and sludge. The sludge is at least partially recycled into the reactor. Particles of support material in lumpy and/or granulated form and in free-flowing quantities are employed in the reactor as support material for the microorganisms. To attain both a high carbon and a high nitrogen decomposition at the same time, the reaction is provided with BOD.sub.5 volume load of 0.4 to 2.5 kg/m.sup.3 d and a TKN volume load of 0.1 to 0.8 kg/m.sup.3. d, BOD.sub.5 decomposition, nitrification and denitrification are all performed within an undivided reactor, in which the O.sub.2 concentration within the liquid is 0.

Abstract: In a denitrification process wherein denitrifying agents are supported on a carrier material, the invention comprises conducting denitrification in the presence of a carrier impregnated with an organic substance capable of serving as a reducing agent for the denitrifying agents. In another aspect the invention relates to a method of preparing such a carrier and to the carrier itself.

Abstract: In the anaerobic biological treatment of wastewater, the anaerobic microorganisms are incorporated on carrier material having a density of 10-200 kg/m.sup.3 and open macropores of a diameter of 0.1 mm to 5 mm, e.g., polyurethane foam or foam rubber. The treatment can be conducted as a pretreatment or a final stage in either a stationary bed or when the carrier is in particulate form, in an agitated tank or fluidized bed.

Abstract: In the biological purification of wastewater containing organic impurites, wherein the wastewater is passed through a reaction (1), e.g., continuous flow-stirred tank having circulating means (12) to achieve thorough mixing therein, or a fluidized bed or suspended bed type reactor, the wastewater is aerated in the presence of activated sludge with an oxygen containing gas fed through a gas feed conduit (9), and in a post clarification stage (5), the wastewater-activated sludge mixture from the reactor (1) is separated into purified water and sludge, the improvement comprises conducting the biological purification in the reactor (1) in the presence of a carrier material for microorganisms. The carrier material comprises particles of macroporous material having a low specific gravity, and in piece and/or granulated form in an amount such that the suspended individual particles are freely movable in the wastewater. Soft polyurethane foam particles are especially preferred as the carrier materail.

Abstract: In a process for the anaerobic biological purification of wastewater containing organic pollutants, the wastewater to be purified is conducted through two series-connected reactors (2 and 5) operated under anaerobic conditions. In order to achieve a shortening of the residence time for the wastewater to be purified and thereby a savings in total reactor volume, the pollutants contained in the wastewater, which are present partially in the undissolved, partially in the macromolecular state and are only slowly metabolizable under anaerobic conditions, are retained in the first reactor (2) by means of a filter medium (3) arranged in the first reactor (2). On the other hand, pollutants initially present in the dissolved condition in the wastewater and which are readily degradable by anaerobic microorganisms, are further conducted directly through the first reactor, without substantial conversion, into the second reactor (5) through a connecting conduit (4).

Abstract: This invention relates to a process and apparatus for the compressive regeneration of flexible, porous materials used as filter particles, oil-separating particles or carrier particles in a reactor. These materials are loaded in a reactor with a liquid containing substances to be removed. The liquid is, for example, water, and the substances are, for example, deposited solids, oil droplets or bacteria. After the flexible, porous materials become loaded with the substances, they are conducted to a press chamber equipped with a press means. The transporting, squeezing out, and separation of the water and substances from the flexible porous materials, as well as the recycling of the regenerated material into the reactor are achieved by either a one-time, or a repetitive to and fro movement, of the press means. This regeneration is accomplished with a single device which operates simultaneously as both a regenerating press and as a conveying installation.

Abstract: In the treatment of wastewater, the mixture of wastewater and the sludge is transported through a treatment zone, and then through a filter zone containing a bed of support particles, e.g., particles of polyurethane foam, to deposit the biomass onto the support particles. The loaded support particles are subsequently regenerated within the filter zone by means of a regenerating means in the same area as the filter zone, e.g., by strong aeration or by being compressed between press-rolls, whereby the system requires neither additional land for regeneration of the support particles nor a secondary settling tank.

Abstract: A process and apparatus are provided for the biological purification of phosphate-containing wastewater, wherein the wastewater is treated, in the presence of activated sludge at least a portion of which is fixed on a carrier material. The process is conducted in at least one aerobic, an anaerobic, and optionally an anoxic zone, to thereby discharge a substantially phosphate-free wastewater stream. In order to attain a high purifying effect with low cost expenditure, the activated sludge is carried on a movable carrier. The carrier material is conveyed from the anaerobic zone, optionally through the anoxic zone, to the aerobic zone, and simultaneously a like amount of carrier material is returned from the aerobic zone, optionally through the anoxic zone, to the anaerobic zone. In this process, the activated sludge is enriched with phosphates, and a portion of the phosphate-enriched activated sludge is separated from the discharged effluent.

Abstract: This invention relates to a process for the biological purification of wastewater in at least two immediately successive treatment stages, followed by a post clarification stage wherein the process is adapted so that a wastewater-activated sludge mixture in one of the treatment zones exhibits only a minor biological load and a nitrification process is conducted therein. In accordance with the invention, an intermediate clarification tank is not required due to substantially all biological degradation having occurred in the stage immediately before the nitrification stage. To enhance nitrification a macroporous carrier material for supporting nitrifying bacteria, for example, activated carbon or polyurethane foam, is added into this nitrification treatment stage. The material can be readily retained in the nitrification zone by providing appropriate retaining means. This process offers the advantage that the concentration of nitrifying agents, i.e.

Abstract: In a process and apparatus for conducting an activated sludge process in an activation basin having multiple sections, preferably at least three sections are provided for conducting the process with each succeeding section being larger in volume than the previous section by an amount about equal to the volume of the first section. It is preferred that the process be conducted in the first section by feeding the first section with an oxygen enriched gas, and with the next section in line fed with the exhaust from the first section, and the third section being aerated with air. In a specific refinement, there are provided four sections with the first two sections sealed with respect to the atmosphere.

Abstract: In a two stage activated sludge plant, where in the first stage the major proportion of the organic pollutants is decomposed and in the second stage the decomposition of the residual organic pollutants is conducted in conjunction with nitrification, the nitrifying bacteria are fixed on a low-density, macroporous carrier, e.g., particulate, polyurethane, optionally with activated carbon as well. The second stage can be operated as a mixed activated sludge tank or a biological filter, and in either case, it is possible to avoid a post clarification stage.