Patents by Inventor Uwe Goetz

Uwe Goetz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for measuring positions of structures on a substrate
    Patent number: 7817262
    Abstract: A device for measuring positions of structures (3) on a substrate (2) is disclosed, wherein the device is enclosed by a climatic chamber (30). An illumination and imaging means (6, 14) is also arranged in the climatic chamber (30). At least one loading station (32) for substrates is formed on an outer wall (30a) of the climatic chamber (30), wherein at least one transport means (34, 40) for transporting the substrates is provided within the climatic chamber (30). A means (36) for orienting the substrates (2) with respect to a coordinate system of the coordinate measuring machine (1) is provided, wherein the transport means (34, 40) deposits the substrates (2) on the means (36) for orienting.
    Type: Grant
    Filed: June 26, 2008
    Date of Patent: October 19, 2010
    Assignee: Vistec Semiconductor Systems GmbH
    Inventors: Tillmann Ehrenberg, Uwe Goetz, Guenter Schieferstein
  • Coordinate measuring machine with vibration decoupling and method for vibration decoupling of a coordinate measuring machine
    Publication number: 20090002715
    Abstract: A coordinate measuring machine (1) with vibration decoupling is disclosed, and a method for vibration damping or decoupling is realized. There is provided a measurement table (20) movable in the X-coordinate direction and in the Y-coordinate direction, which is essentially movable in one plane (25a). A controller (16) is connected to the vibration dampers (26) and the measurement table (20), wherein the controller (16) determines the influence of the measurement table (20) on the vertical position alterations of the coordinate measuring machine (1) from an impending or predetermined movement path (30) of the measurement table (20) and controls the vibration dampers (26) such that the position alterations caused by the influence of the measurement table (20) are compensated.
    Type: Application
    Filed: June 26, 2008
    Publication date: January 1, 2009
    Applicant: Vistec Semiconductor Systems GmbH
    Inventors: Uwe Goetz, Guenter Schieferstein
  • Device for measuring positions of structures on a substrate
    Publication number: 20090002720
    Abstract: A device for measuring positions of structures (3) on a substrate (2) is disclosed, wherein the device is enclosed by a climatic chamber (30). An illumination and imaging means (6, 14) is also arranged in the climatic chamber (30). At least one loading station (32) for substrates is formed on an outer wall (30a) of the climatic chamber (30), wherein at least one transport means (34, 40) for transporting the substrates is provided within the climatic chamber (30). A means (36) for orienting the substrates (2) with respect to a coordinate system of the coordinate measuring machine (1) is provided, wherein the transport means (34, 40) deposits the substrates (2) on the means (36) for orienting.
    Type: Application
    Filed: June 26, 2008
    Publication date: January 1, 2009
    Applicant: Vistec Semiconductor Systems GmbH
    Inventors: Tillmann Ehrenberg, Uwe Goetz, Guenter Schieferstein