Patents by Inventor Uwe Knappe

Uwe Knappe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for advanced process control including tool dependent machine constants
    Patent number: 7403832
    Abstract: A controller and a method of controlling a process tool is provided, in which machine constants used for calibrating manipulated variables of the control algorithm are explicitly introduced into the process model, thereby providing an enhanced controller behavior immediately after the introduction of new measurement values of the machine constants.
    Type: Grant
    Filed: April 18, 2006
    Date of Patent: July 22, 2008
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Uwe Schulze, Uwe Knappe
  • METHOD AND SYSTEM FOR ADVANCED PROCESS CONTROL INCLUDING TOOL DEPENDENT MACHINE CONSTANTS
    Publication number: 20060271225
    Abstract: A controller and a method of controlling a process tool is provided, in which machine constants used for calibrating manipulated variables of the control algorithm are explicitly introduced into the process model, thereby providing an enhanced controller behavior immediately after the introduction of new measurement values of the machine constants.
    Type: Application
    Filed: April 18, 2006
    Publication date: November 30, 2006
    Inventors: Uwe Schulze, Uwe Knappe
  • Method and system for contamination detection and monitoring a lithographic exposure tool and operating method for the same under controlled atmospheric conditions
    Publication number: 20060066824
    Abstract: By using highly efficient detection techniques, such as chromatography and absorption spectroscopy, one or more contaminants may be identified and the concentration thereof may quantitatively be determined. In this way, the adverse effect on critical components of exposure tools, such as reticles and lenses in the form of, for instance, deposited inorganic salts, may significantly be reduced and the process performance may be enhanced.
    Type: Application
    Filed: May 24, 2005
    Publication date: March 30, 2006
    Inventors: Uwe Knappe, Uzodinma Okoroanyanwu
  • Method and system for improving the efficiency of a mechanical alignment tool
    Patent number: 6946411
    Abstract: A technique is disclosed that allows alignment of substrates on a run-to-run basis by using the position data of one or more previously aligned substrates to determine a setpoint of a pre-alignment process for one or more subsequent substrates. The setpoint may also be determined on the basis of a predefined characteristic of the substrates to be aligned.
    Type: Grant
    Filed: July 17, 2003
    Date of Patent: September 20, 2005
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Uwe Knappe, Jan Raebiger, Uwe Schulze, Rolf Seltmann
  • Method and system for improving the efficiency of a mechanical alignment tool
    Publication number: 20040167640
    Abstract: A technique is disclosed that allows alignment of substrates on a run-to-run basis by using the position data of one or more previously aligned substrates to determine a setpoint of a pre-alignment process for one or more subsequent substrates. The setpoint may also be determined on the basis of a predefined characteristic of the substrates to be aligned.
    Type: Application
    Filed: July 17, 2003
    Publication date: August 26, 2004
    Inventors: Uwe Knappe, Jan Raebiger, Uwe Schulze, Rolf Seltmann