Patents by Inventor Uwe Meier

Uwe Meier has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR REPAIRING OPTICAL ELEMENTS, AND OPTICAL ELEMENT
    Publication number: 20150092170
    Abstract: A method for repairing a collector for an EUV projection exposure apparatus having a first coating and a second coating, wherein the first coating is arranged between the second coating and a surface of the collector. The method includes completely or partly removing the first coating by treatment with a first chemical solution, and applying a new first coating.
    Type: Application
    Filed: October 21, 2014
    Publication date: April 2, 2015
    Inventors: Oli Ehrler, Uwe Meier, Alexander Uhl, Holger Kierey