Patents by Inventor Uwe Ruby

Uwe Ruby has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and device for thermally treating objects
    Patent number: 6775471
    Abstract: The invention relates to a method and to a device for thermally treating objects. The aim of the invention is to facilitate a better control of the temperature profile of an object to be thermally treated. To this end, the invention provides a method and a device for thermally treating an object in a heating system, especially for treating semiconductor wafers (2) in a rapid heating system (1). The objects are thermally treated at a predetermined temperature progression and the temperature of the object is controlled via a PID control and a feedforward control that are based on a simulation model of the heating system and the object. Said model consists of individual models of components of the heating system and/or the object. The parameters of at least one of the individual models are monitored during the thermal treatment and the model is adapted to the monitored parameters.
    Type: Grant
    Filed: March 5, 2003
    Date of Patent: August 10, 2004
    Assignee: Mattson Thermal Products GmbH
    Inventors: Werner Blersch, Jochen Urban, Silke Paul, Uwe Ruby, Markus Hauf
  • Method and device for thermally treating objects
    Publication number: 20030166317
    Abstract: The invention relates to a method and to a device for thermally treating objects. The aim of the invention is to facilitate a better control of the temperature profile of an object to be thermally treated. To this end, the invention provides a method and a device for thermally treating an object in a heating system, especially for treating semiconductor wafers (2) in a rapid heating system (1). The objects are thermally treated at a predetermined temperature progression and the temperature of the object is controlled via a PID control and a feedforward control that are based on a simulation model of the heating system and the object. Said model consists of individual models of components of the heating system and/or the object. The parameters of at least one of the individual models are monitored during the thermal treatment and the model is adapted to the monitored parameters.
    Type: Application
    Filed: March 5, 2003
    Publication date: September 4, 2003
    Inventors: Werner Blersch, Jochen Urban, Silke Paul, Uwe Ruby, Markus Hauf