Patents by Inventor Uwe Wiedenbruch

Uwe Wiedenbruch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Laser beam micro-smoothing
    Patent number: 7723169
    Abstract: The present invention provides laser beam micro-smoothing for laser annealing systems. Laser beam micro-smoothing comprises shifting a laser beam in the direction perpendicular to the scanning direction (y) of a laser annealing system, while holding the laser beam fixed in the direction of scanning (x). The shifting may be accomplished, for example, with a pair of micro-smoothing mirrors. The shifting smoothes out small-scale inhomogeneities in the profile of the laser beam and prevents microscopic stripes associated with prior art laser annealing systems. Because the shifting occurs only in the direction perpendicular to the scanning direction (y), the laser annealing process in not adversely affected.
    Type: Grant
    Filed: February 21, 2007
    Date of Patent: May 25, 2010
    Assignee: Coherent, Inc.
    Inventors: Holger Graefe, Uwe Wiedenbruch, Thomas Schroeder, Frank Simon, Elko Bergmann
  • Laser beam micro-smoothing
    Publication number: 20070196967
    Abstract: The present invention provides laser beam micro-smoothing for laser annealing systems. Laser beam micro-smoothing comprises shifting a laser beam in the direction perpendicular to the scanning direction (y) of a laser annealing system, while holding the laser beam fixed in the direction of scanning (x). The shifting may be accomplished, for example, with a pair of micro-smoothing mirrors. The shifting smoothes out small-scale inhomogeneities in the profile of the laser beam and prevents microscopic stripes associated with prior art laser annealing systems. Because the shifting occurs only in the direction perpendicular to the scanning direction (y), the laser annealing process in not adversely affected.
    Type: Application
    Filed: February 21, 2007
    Publication date: August 23, 2007
    Inventors: Holger Graefe, Uwe Wiedenbruch, Thomas Schroeder, Frank Simon, Elko Bergmann