Patents by Inventor Uygar Avci

Uygar Avci has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11171145
    Abstract: Embodiments herein describe techniques for an integrated circuit (IC). The IC may include a capacitor. The capacitor may include a first electrode, a second electrode, and a paraelectric layer between the first electrode and the second electrode. A first interface with a first work function exists between the paraelectric layer and the first electrode. A second interface with a second work function exists between the paraelectric layer and the second electrode. The paraelectric layer may include a ferroelectric material or an anti-ferroelectric material. A built-in electric field associated with the first work function and the second work function may exist between the first electrode and the second electrode. The built-in electric field may be at a voltage value where the capacitor may operate at a center of a memory window of a polarization-voltage hysteresis loop of the capacitor. Other embodiments may be described and/or claimed.
    Type: Grant
    Filed: June 22, 2018
    Date of Patent: November 9, 2021
    Assignee: Intel Corporation
    Inventors: Sou-Chi Chang, Uygar Avci, Daniel H. Morris, Seiyon Kim, Ashish V. Penumatcha, Ian A. Young
  • Publication number: 20210343856
    Abstract: Described is a ferroelectric-based capacitor that improves reliability of a ferroelectric memory by providing tensile stress along a plane (e.g., x-axis) of a ferroelectric or anti-ferroelectric material of the ferroelectric/anti-ferroelectric based capacitor. Tensile stress is provided by a spacer comprising metal, semimetal, or oxide (e.g., metal or oxide of one or more of: Al, Ti, Hf, Si, Ir, or N). The tensile stress provides polar orthorhombic phase to the ferroelectric material and tetragonal phase to the anti-ferroelectric material. As such, memory window and reliability of the ferroelectric/anti-ferroelectric oxide thin film improves.
    Type: Application
    Filed: June 1, 2021
    Publication date: November 4, 2021
    Applicant: Intel Corporation
    Inventors: Nazila Haratipour, Sou-Chi Chang, Chia-Ching Lin, Jack Kavalieros, Uygar Avci, Ian Young
  • Patent number: 11138499
    Abstract: An apparatus is described. The apparatus includes a compute-in-memory (CIM) circuit for implementing a neural network disposed on a semiconductor chip. The CIM circuit includes a mathematical computation circuit coupled to a memory array. The memory array includes an embedded dynamic random access memory (eDRAM) memory array. Another apparatus is described. The apparatus includes a compute-in-memory (CIM) circuit for implementing a neural network disposed on a semiconductor chip. The CIM circuit includes a mathematical computation circuit coupled to a memory array. The mathematical computation circuit includes a switched capacitor circuit. The switched capacitor circuit includes a back-end-of-line (BEOL) capacitor coupled to a thin film transistor within the metal/dielectric layers of the semiconductor chip. Another apparatus is described. The apparatus includes a compute-in-memory (CIM) circuit for implementing a neural network disposed on a semiconductor chip.
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: October 5, 2021
    Assignee: Intel Corporation
    Inventors: Abhishek Sharma, Jack T. Kavalieros, Ian A. Young, Sasikanth Manipatruni, Ram Krishnamurthy, Uygar Avci, Gregory K. Chen, Amrita Mathuriya, Raghavan Kumar, Phil Knag, Huseyin Ekin Sumbul, Nazila Haratipour, Van H. Le
  • Publication number: 20210305398
    Abstract: A capacitor device includes a first electrode having a first metal alloy or a metal oxide, a relaxor ferroelectric layer adjacent to the first electrode, where the ferroelectric layer includes oxygen and two or more of lead, barium, manganese, zirconium, titanium, iron, bismuth, strontium, neodymium, potassium, or niobium and a second electrode coupled with the relaxor ferroelectric layer, where the second electrode includes a second metal alloy or a second metal oxide.
    Type: Application
    Filed: March 27, 2020
    Publication date: September 30, 2021
    Applicant: Intel Corporation
    Inventors: Sou-Chi Chang, Chia-Ching Lin, Nazila Haratipour, Tanay Gosavi, I-Cheng Tung, Seung Hoon Sung, Ian Young, Jack Kavalieros, Uygar Avci, Ashish Verma Penumatcha
  • Patent number: 11063131
    Abstract: Described is a ferroelectric-based capacitor that improves reliability of a ferroelectric memory by providing tensile stress along a plane (e.g., x-axis) of a ferroelectric or anti-ferroelectric material of the ferroelectric/anti-ferroelectric based capacitor. Tensile stress is provided by a spacer comprising metal, semimetal, or oxide (e.g., metal or oxide of one or more of: Al, Ti, Hf, Si, Ir, or N). The tensile stress provides polar orthorhombic phase to the ferroelectric material and tetragonal phase to the anti-ferroelectric material. As such, memory window and reliability of the ferroelectric/anti-ferroelectric oxide thin film improves.
    Type: Grant
    Filed: June 13, 2019
    Date of Patent: July 13, 2021
    Assignee: Intel Corporation
    Inventors: Nazila Haratipour, Sou-Chi Chang, Chia-Ching Lin, Jack Kavalieros, Uygar Avci, Ian Young
  • Patent number: 10886265
    Abstract: An embodiment includes an apparatus comprising: a dielectric material including fixed charges, the fixed charges each having a first polarity; a channel comprising a channel material, the channel material including a 2-dimensional (2D) material; a drain node; and a source node including a source material, the source material including at least one of the 2D material and an additional 2D material; wherein the source material: (a) includes charges each having a second polarity that is opposite the first polarity, (b) directly contacts the dielectric material. Other embodiments are described herein.
    Type: Grant
    Filed: June 7, 2018
    Date of Patent: January 5, 2021
    Assignee: Intel Corporation
    Inventors: Ashish Verma Penumatcha, Uygar Avci, Ian Young
  • Publication number: 20200403081
    Abstract: Described is a transistor which includes: a source region; a drain region; and a gate region between the source and drain regions, wherein the gate region comprises: high-K dielectric material between spacers such that the high-K dielectric material is recessed; and metal electrode on the recessed high-K dielectric material. The gate recessed gate dielectric allows for using thick gate dielectric even with much advanced process technology nodes (e.g., 7 nm and below).
    Type: Application
    Filed: June 19, 2019
    Publication date: December 24, 2020
    Inventors: Seung Hoon Sung, Sou-Chi Chang, Ashish Verma Penumatcha, Nazila Haratipour, Matthew Metz, Michael Harper, Jack Kavalieros, Uygar Avci, Ian Young
  • Publication number: 20200395460
    Abstract: Described is a ferroelectric-based capacitor that improves reliability of a ferroelectric memory by providing tensile stress along a plane (e.g., x-axis) of a ferroelectric or anti-ferroelectric material of the ferroelectric/anti-ferroelectric based capacitor. Tensile stress is provided by a spacer comprising metal, semimetal, or oxide (e.g., metal or oxide of one or more of: Al, Ti, Hf, Si, Ir, or N). The tensile stress provides polar orthorhombic phase to the ferroelectric material and tetragonal phase to the anti-ferroelectric material. As such, memory window and reliability of the ferroelectric/anti-ferroelectric oxide thin film improves.
    Type: Application
    Filed: June 13, 2019
    Publication date: December 17, 2020
    Applicant: Intel Corporation
    Inventors: Nazila Haratipour, Sou-Chi Chang, Chia-Ching Lin, Jack Kavalieros, Uygar Avci, Ian Young
  • Publication number: 20200335610
    Abstract: Tunneling Field Effect Transistors (TFETs) are promising devices in that they promise significant performance increase and energy consumption decrease due to a steeper subthreshold slope (for example, smaller sub-threshold swing). In various embodiments, vertical fin-based TFETs can be fabricated in trenches, for example, silicon trenches. In another embodiment, vertical TFETs can be used on different material systems acting as a substrate and/or trenches (for example, Si, Ge, III-V semiconductors, GaN, and the like). In one embodiment, the tunneling direction in the channel of the vertical TFET can be perpendicular to the Si substrates. In one embodiment, this can be different than the tunneling direction in the channel of lateral TFETs.
    Type: Application
    Filed: February 28, 2018
    Publication date: October 22, 2020
    Applicant: Intel Corporation
    Inventors: Cheng-Ying Huang, Jack Kavalieros, Ian Young, Matthew Metz, Willy Rachmady, Uygar Avci, Ashish Agrawal, Benjamin Chu-Kung
  • Publication number: 20200312976
    Abstract: Techniques and mechanisms to provide electrical insulation between a gate and a channel region of a non-planar circuit device. In an embodiment, the gate structure, and insulation spacers at opposite respective sides of the gate structure, each extend over a semiconductor fin structure. In a region between the insulation spacers, a first dielectric layer extends conformally over the fin, and a second dielectric layer adjoins and extends conformally over the first dielectric layer. A third dielectric layer, adjoining the second dielectric layer and the insulation spacers, extends under the gate structure. Of the first, second and third dielectric layers, the third dielectric layer is conformal to respective sidewalls of the insulation spacers. In another embodiment, the second dielectric layer is of dielectric constant which is greater than that of the first dielectric layer, and equal to or less than that of the third dielectric layer.
    Type: Application
    Filed: March 25, 2019
    Publication date: October 1, 2020
    Applicant: Intel Corporation
    Inventors: Seung Hoon Sung, Jack Kavalieros, Ian Young, Matthew Metz, Uygar Avci, Devin Merrill, Ashish Verma Penumatcha, Chia-Ching Lin, Owen Loh
  • Publication number: 20200312950
    Abstract: A capacitor is disclosed that includes a first metal layer and a seed layer on the first metal layer. The seed layer includes a polar phase crystalline structure. The capacitor also includes a ferroelectric layer on the seed layer and a second metal layer on the ferroelectric layer.
    Type: Application
    Filed: March 29, 2019
    Publication date: October 1, 2020
    Inventors: Nazila HARATIPOUR, Chia-Ching LIN, Sou-Chi CHANG, Ashish Verma PENUMATCHA, Owen LOH, Mengcheng LU, Seung Hoon SUNG, Ian A. YOUNG, Uygar AVCI, Jack T. KAVALIEROS
  • Publication number: 20200312971
    Abstract: Embodiments herein describe techniques for a semiconductor device including a substrate and a FinFET transistor on the substrate. The FinFET transistor includes a fin structure having a channel area, a source area, and a drain area. The FinFET transistor further includes a gate dielectric area between spacers above the channel area of the fin structure and below a top surface of the spacers; spacers above the fin structure and around the gate dielectric area; and a metal gate conformally covering and in direct contact with sidewalls of the spacers. The gate dielectric area has a curved surface. The metal gate is in direct contact with the curved surface of the gate dielectric area. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: March 29, 2019
    Publication date: October 1, 2020
    Inventors: Ashish PENUMATCHA, Seung Hoon SUNG, Scott CLENDENNING, Uygar AVCI, Ian A. YOUNG, Jack T. KAVALIEROS
  • Publication number: 20200312978
    Abstract: Techniques and mechanisms for providing electrical insulation or other protection of an integrated circuit (IC) device with a spacer structure which comprises an (anti)ferromagnetic material. In an embodiment, a transistor comprises doped source or drain regions and a channel region which are each disposed in a fin structure, wherein a gate electrode and an underlying dielectric layer of the transistor each extend over the channel region. Insulation spacers are disposed on opposite sides of the gate electrode, where at least a portion of one such insulation spacer comprises an (anti)ferroelectric material. Another portion of the insulation spacer comprises a non-(anti)ferroelectric material. In another embodiment, the two portions of the spacer are offset vertically from one another, wherein the (anti)ferroelectric portion forms a bottom of the spacer.
    Type: Application
    Filed: March 25, 2019
    Publication date: October 1, 2020
    Applicant: Intel Corporation
    Inventors: Jack KAVALIEROS, Ian YOUNG, Matthew METZ, Uygar AVCI, Chia-Ching LIN, Owen LOH, Seung Hoon SUNG, Aditya KASUKURTI, Sou-Chi CHANG, Tanay GOSAVI, Ashish Verma PENUMATCHA
  • Publication number: 20200312949
    Abstract: A capacitor is disclosed. The capacitor includes a first metal layer, a second metal layer on the first metal layer, a ferroelectric layer on the second metal layer, and a third metal layer on the ferroelectric layer. The second metal layer includes a first non-reactive barrier metal and the third metal layer includes a second non-reactive barrier metal. A fourth metal layer is on the third metal layer.
    Type: Application
    Filed: March 28, 2019
    Publication date: October 1, 2020
    Inventors: Nazila HARATIPOUR, Chia-Ching LIN, Sou-Chi CHANG, Ashish Verma PENUMATCHA, Owen LOH, Mengcheng LU, Seung Hoon SUNG, Ian A. YOUNG, Uygar AVCI, Jack T. KAVALIEROS
  • Publication number: 20200287017
    Abstract: A gate stack is described that uses anti-ferroelectric material (e.g., Si, La, N, Al, Zr, Ge, Y doped HfO2) or ferroelectric material (e.g., Si, La, N, Al, Zr, Ge, Y doped HfO2, perovskite ferroelectric such as NH4H2PO4, KH2PO4, LiNb03, LiTaO3, BaTiO3, PbTiO3, Pb (Zr,Ti) O3, (Pb,La)TiO3, and (Pb,La)(Zr,Ti)O3) which reduces write voltage, improves endurance, and increases retention. The gate stack of comprises strained anti-FE or FE material and depolarized anti-FE or FE. The endurance of the FE transistor is further improved by using a higher K (constant) dielectric (e.g., SiO2, Al2O3, HfO2, Ta2O3, La2O3) in the gate stack. High K effects may also be achieved by depolarizing the FE or FE oxide in the transistor gate stack.
    Type: Application
    Filed: March 6, 2019
    Publication date: September 10, 2020
    Applicant: Intel Corporation
    Inventors: Sou-Chi CHANG, Chia-Chang LIN, Seung Hoon SUNG, Ashish Verma PENUMATCHA, Nazila HARATIPOURA, Owen LOH, Jack KAVALIEROS, Uygar AVCI, Ian YOUNG
  • Publication number: 20200212193
    Abstract: Describe is a resonator that uses anti-ferroelectric (AFE) materials in the gate of a transistor as a dielectric. The use of AFE increases the strain/stress generated in the gate of the FinFET. Along with the usual capacitive drive, which is boosted with the increased polarization, additional current drive is also achieved from the piezoelectric response generated to due to AFE material. In some embodiments, the acoustic mode of the resonator is isolated using phononic gratings all around the resonator using the metal line above and vias' to body and dummy fins on the side. As such, a Bragg reflector is formed above or below the AFE based transistor. Increased drive signal from the AFE results in larger output signal and larger bandwidth.
    Type: Application
    Filed: January 2, 2019
    Publication date: July 2, 2020
    Applicant: Intel Corporation Santa Clara
    Inventors: Tanay Gosavi, Chia-ching Lin, Raseong Kim, Ashish Verma Penumatcha, Uygar Avci, Ian Young
  • Publication number: 20200212224
    Abstract: Embodiments herein describe techniques for a semiconductor device including a gate stack with a ferroelectric-oxide layer above a channel layer and in contact with the channel layer, and a top electrode above the ferroelectric-oxide layer. The ferroelectric-oxide layer includes a domain wall between an area under a nucleation point of the top electrode and above a separation line of the channel layer between an ON state portion and an OFF state portion of the channel layer. A resistance between a source electrode and a drain electrode is modulated in a range between a first resistance value and a second resistance value, dependent on a position of the domain wall within the ferroelectric-oxide layer, a position of the ON state portion of the channel layer, and a position of the OFF state portion of the channel layer. Other embodiments may be described and/or claimed.
    Type: Application
    Filed: December 26, 2018
    Publication date: July 2, 2020
    Inventors: Ashish Verma PENUMATCHA, Tanay GOSAVI, Uygar AVCI, Ian A. YOUNG
  • Publication number: 20200212532
    Abstract: Describe is a resonator that uses ferroelectric (FE) material in a capacitive structure. The resonator includes a first plurality of metal lines extending in a first direction; an array of capacitors comprising ferroelectric material; a second plurality of metal lines extending in the first direction, wherein the array of capacitors is coupled between the first and second plurality of metal lines; and a circuitry to switch polarization of at least one capacitor of the array of capacitors. The switching of polarization regenerates acoustic waves. In some embodiments, the acoustic mode of the resonator is isolated using phononic gratings all around the resonator using metal lines above and adjacent to the FE based capacitors.
    Type: Application
    Filed: January 2, 2019
    Publication date: July 2, 2020
    Applicant: Intel Corporation
    Inventors: Tanay Gosavi, Chia-ching Lin, Raseong Kim, Ashish Verma Penumatcha, Uygar Avci, Ian Young
  • Publication number: 20200212194
    Abstract: Describe is a resonator that uses ferroelectric (FE) materials in the gate of a transistor as a dielectric. The use of FE increases the strain/stress generated in the gate of the FinFET. Along with the usual capacitive drive, which is boosted with the increased polarization, FE material expands or contacts depending on the applied electric field on the gate of the transistor. As such, acoustic waves are generated by switching polarization of the FE materials. In some embodiments, the acoustic mode of the resonator is isolated using phononic gratings all around the resonator using the metal line above and vias' to body and dummy fins on the side. As such, a Bragg reflector is formed above the FE based transistor.
    Type: Application
    Filed: January 2, 2019
    Publication date: July 2, 2020
    Applicant: Intel Corporation
    Inventors: Tanay Gosavi, Chia-ching Lin, Raseong Kim, Ashish Verma Penumatcha, Uygar Avci, Ian Young
  • Publication number: 20200194576
    Abstract: Embodiments disclosed herein include transistor devices with complex oxide interfaces and methods of forming such devices. In an embodiment, the transistor device may comprise a substrate, and a fin extending up from the substrate. In an embodiment, a first oxide is formed over sidewall surfaces of the fin, and a second oxide is formed over the first oxide. In an embodiment, the first oxide and the second oxide are perovskite oxides with the general formula of ABO3.
    Type: Application
    Filed: December 13, 2018
    Publication date: June 18, 2020
    Inventors: Sasikanth MANIPATRUNI, Dmitri NIKONOV, Chia-Ching LIN, Tanay GOSAVI, Uygar AVCI, Ian YOUNG