Patents by Inventor Vadim VERESCHAGIN
Vadim VERESCHAGIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230420308Abstract: A system of examination of a semiconductor specimen, comprising a processor and memory circuitry (PMC) configured to: obtain an image of a hole formed in the semiconductor specimen, wherein the hole exposes at least one layer of a plurality of layers of the semiconductor specimen, segment the image into a plurality of regions, generate at least one of: data Dpix_intensity informative of one or more pixel intensities of one or more regions of the plurality of regions, data Dgeometry informative of one or more geometrical properties of one or more regions of the plurality of regions, feed at least one of Dpix_intensity or Dgeometry to a trained classifier to obtain an output, wherein the output of the trained classifier is usable to determine whether the hole ends at a target layer of the plurality of layers.Type: ApplicationFiled: June 23, 2022Publication date: December 28, 2023Inventors: Rafael BISTRITZER, Vadim VERESCHAGIN, Grigory KLEBANOV, Roman KRIS, Ilan BEN-HARUSH, Omer KEREM, Asaf GOLOV, Elad SOMMER
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Patent number: 11756188Abstract: Input data may be received. The input data may include an image of a pattern and location data that identifies a modified portion of the pattern. A processing device may determine a first parameter of a first dimension within the pattern and a second parameter of a second dimension outside of the pattern. A combined set may be generated based on the first parameter and the second parameter. A defect associated with the modified portion may be classified based on the combined set.Type: GrantFiled: March 14, 2022Date of Patent: September 12, 2023Assignee: Applied Materials Israel Ltd.Inventors: Vadim Vereschagin, Roman Kris, Ishai Schwarzband, Boaz Cohen, Evgeny Bal, Ariel Shkalim
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Patent number: 11686571Abstract: There is provided a system and method of a method of detecting a local shape deviation of a structural element in a semiconductor specimen, comprising: obtaining an image comprising an image representation of the structural element; extracting, from the image, an actual contour of the image representation; estimating a reference contour of the image representation indicative of a standard shape of the structural element, wherein the reference contour is estimated based on a Fourier descriptor representative of the reference contour, the Fourier descriptor being estimated using an optimization method based on a loss function specifically selected to be insensitive to local shape deviation of the actual contour; and performing one or more measurements representative of one or more differences between the actual contour and the reference contour, the measurements indicative of whether a local shape deviation is present in the structural element.Type: GrantFiled: September 2, 2021Date of Patent: June 27, 2023Assignee: Applied Materials Israel Ltd.Inventors: Roman Kris, Ilan Ben-Harush, Rafael Bistritzer, Vadim Vereschagin, Elad Sommer, Grigory Klebanov, Arundeepth Thamarassery, Jannelle Anna Geva, Gal Daniel Gutterman, Einat Frishman, Sahar Levin
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Patent number: 11651509Abstract: A method for process control of a semiconductor structure fabricated by a series of fabrication steps, the method comprising obtaining an image of the semiconductor structure indicative of at least two individual fabrication steps; wherein the image is generated by scanning the semiconductor structure with a charged particle beam and collecting signals emanating from the semiconductor structure; and processing, by a hardware processor, the image to determining a parameter of the semiconductor structure, wherein processing includes measuring step/s from among the fabrication steps as an individual feature.Type: GrantFiled: October 31, 2019Date of Patent: May 16, 2023Assignee: Applied Materials Israel Ltd.Inventors: Roman Kris, Roi Meir, Sahar Levin, Ishai Schwarzband, Grigory Klebanov, Shimon Levi, Efrat Noifeld, Hiroshi Miroku, Taku Yoshizawa, Kasturi Saha, Sharon Duvdevani-Bar, Vadim Vereschagin
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Publication number: 20230069303Abstract: There is provided a system and method of a method of detecting a local shape deviation of a structural element in a semiconductor specimen, comprising: obtaining an image comprising an image representation of the structural element; extracting, from the image, an actual contour of the image representation; estimating a reference contour of the image representation indicative of a standard shape of the structural element, wherein the reference contour is estimated based on a Fourier descriptor representative of the reference contour, the Fourier descriptor being estimated using an optimization method based on a loss function specifically selected to be insensitive to local shape deviation of the actual contour; and performing one or more measurements representative of one or more differences between the actual contour and the reference contour, the measurements indicative of whether a local shape deviation is present in the structural element.Type: ApplicationFiled: September 2, 2021Publication date: March 2, 2023Inventors: Roman KRIS, Ilan BEN-HARUSH, Rafael BISTRITZER, Vadim VERESCHAGIN, Elad SOMMER, Grigory KLEBANOV, Arundeepth THAMARASSERY, Jannelle Anna GEVA, Gal Daniel GUTTERMAN, Einat FRISHMAN, Sahar LEVIN
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Patent number: 11476081Abstract: A method, non-transitory computer readable medium and an evaluation system for evaluating an intermediate product related to a three dimensional NAND memory unit. The evaluation system may include an imager and a processing circuit. The imager may be configured to obtain, via an open gap, an electron image of a portion of a structural element that belongs to an intermediate product. The structural element may include a sequence of layers that include a top layer that is followed by alternating nonconductive layers and recessed conductive layers. The imager may include electron optics configured to scan the portion of the structural element with an electron beam that is oblique to a longitudinal axis of the open gap. The processing circuit is configured to evaluate the intermediate product based on the electron image. The open gap (a) exhibits a high aspect ratio, (b) has a width of nanometric scale, and (c) is formed between structural elements of the intermediate product.Type: GrantFiled: June 30, 2020Date of Patent: October 18, 2022Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Roman Kris, Vadim Vereschagin, Assaf Shamir, Elad Sommer, Sharon Duvdevani-Bar, Meng Li Cecilia Lim
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Publication number: 20220198639Abstract: Input data may be received. The input data may include an image of a pattern and location data that identifies a modified portion of the pattern. A processing device may determine a first parameter of a first dimension within the pattern and a second parameter of a second dimension outside of the pattern. A combined set may be generated based on the first parameter and the second parameter. A defect associated with the modified portion may be classified based on the combined set.Type: ApplicationFiled: March 14, 2022Publication date: June 23, 2022Inventors: Vadim Vereschagin, Roman Kris, Ishai Schwarzband, Boaz Cohen, Evgeny Bal, Ariel Shkalim
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Patent number: 11315230Abstract: Forensic method for identifying forged documents. For each of a stream of incoming jpeg images, using a processor configured for determining whether jpeg image/s is a replacement forgery by determining whether a first portion of individual image which resides at a known location (known likely to be replaced by forger) within the individual jpeg image has been replaced, including: indicator, face-djpg, for the first portion at known location; computing indicator, aka nonface-djpg, for a second portion of individual image which resides at a comparison location within the jpeg image known as unlikely to be replaced by a forger; and determining whether face-djpg and nonface-djpg fulfill predetermined logical criterion and deciding whether the individual jpeg image is a replacement forgery accordingly.Type: GrantFiled: September 15, 2020Date of Patent: April 26, 2022Assignee: AU10TIX LTD.Inventors: Ron Atzmon, Sergey Markin, Yael Moscovitz, Vadim Vereschagin
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Patent number: 11276160Abstract: A captured image of a pattern and a reference image of the pattern may be received. A contour of interest of the pattern may be identified. One or more measurements of a dimension of the pattern may be determined for each of the reference image and the captured image with respect to the contour of interest of the pattern. A defect associated with the contour of interest may be classified based on the determined one or more measurements of the dimension of the pattern for each of the reference image and the captured image.Type: GrantFiled: October 1, 2018Date of Patent: March 15, 2022Assignee: Applied Materials Israel LTD.Inventors: Vadim Vereschagin, Roman Kris, Ishai Schwarzband, Boaz Cohen, Ariel Shkalim, Evgeny Bal
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Publication number: 20210383529Abstract: A method for process control of a semiconductor structure fabricated by a series of fabrication steps, the method comprising obtaining an image of the semiconductor structure indicative of at least two individual fabrication steps; wherein the image is generated by scanning the semiconductor structure with a charged particle beam and collecting signals emanating from the semiconductor structure; and processing, by a hardware processor, the image to determining a parameter of the semiconductor structure, wherein processing includes measuring step/s from among the fabrication steps as an individual feature.Type: ApplicationFiled: October 31, 2019Publication date: December 9, 2021Inventors: Roman KRIS, Roi MEIR, Sahar LEVIN, Ishai SCHWARZBAND, Grigory KLEBANOV, Shimon LEVI, Efrat NOIFELD, Hiroshi MIROKU, Taku YOSHIZAWA, Kasturi SAHA, Sharon DUVDEVANI-BAR, Vadim VERESCHAGIN
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Publication number: 20210065355Abstract: Forensic method for identifying forged documents. For each of a stream of incoming jpeg images, using a processor configured for determining whether jpeg image/s is a replacement forgery by determining whether a first portion of individual image which resides at a known location (known likely to be replaced by forger) within the individual jpeg image has been replaced, including: indicator, face-djpg, for the first portion at known location; computing indicator, aka nonface-djpg, for a second portion of individual image which resides at a comparison location within the jpeg image known as unlikely to be replaced by a forger; and determining whether face-djpg and nonface-djpg fulfill predetermined logical criterion and deciding whether the individual jpeg image is a replacement forgery accordingly.Type: ApplicationFiled: September 15, 2020Publication date: March 4, 2021Applicant: Au10tix Ltd.Inventors: Ron ATZMON, Sergey MARKIN, Yael MOSCOVITZ, Vadim VERESCHAGIN
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Publication number: 20210066026Abstract: A method, non-transitory computer readable medium and an evaluation system for evaluating an intermediate product related to a three dimensional NAND memory unit. The evaluation system may include an imager and a processing circuit. The imager may be configured to obtain, via an open gap, an electron image of a portion of a structural element that belongs to an intermediate product. The structural element may include a sequence of layers that include a top layer that is followed by alternating nonconductive layers and recessed conductive layers. The imager may include electron optics configured to scan the portion of the structural element with an electron beam that is oblique to a longitudinal axis of the open gap. The processing circuit is configured to evaluate the intermediate product based on the electron image. The open gap (a) exhibits a high aspect ratio, (b) has a width of nanometric scale, and (c) is formed between structural elements of the intermediate product.Type: ApplicationFiled: June 30, 2020Publication date: March 4, 2021Applicant: APPLIED MATERIALS ISRAEL LTD.Inventors: Roman Kris, Vadim Vereschagin, Assaf Shamir, Elad Sommer, Sharon Duvdevani-Bar, Meng Li Cecilia Lim
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Patent number: 10810722Abstract: Forensic method for identifying forged documents. For each of a stream of incoming jpeg images, using a processor configured for determining whether jpeg image/s is a replacement forgery by determining whether a first portion of individual image which resides at a known location (known likely to be replaced by forger) within the individual jpeg image has been replaced, including: indicator, face-djpg, for the first portion at known location; computing indicator, aka nonface-djpg, for a second portion of individual image which resides at a comparison location within the jpeg image known as unlikely to be replaced by a forger; and determining whether face-djpg and nonface-djpg fulfill predetermined logical criterion and deciding whether the individual jpeg image is a replacement forgery accordingly.Type: GrantFiled: July 16, 2018Date of Patent: October 20, 2020Assignee: AU10TIX LIMITEDInventors: Ron Atzmon, Sergey Markin, Yael Moscovitz, Vadim Vereschagin
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Publication number: 20200327652Abstract: A captured image of a pattern and a reference image of the pattern may be received. A contour of interest of the pattern may be identified. One or more measurements of a dimension of the pattern may be determined for each of the reference image and the captured image with respect to the contour of interest of the pattern. A defect associated with the contour of interest may be classified based on the determined one or more measurements of the dimension of the pattern for each of the reference image and the captured image.Type: ApplicationFiled: October 1, 2018Publication date: October 15, 2020Inventors: Vadim VERESCHAGIN, Roman KRIS, Ishai SCHWARZBAND, Boaz COHEN, Ariel SHKALIM, Evgeny BAL
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Publication number: 20190019282Abstract: Forensic method for identifying forged documents. For each of a stream of incoming jpeg images, using a processor configured for determining whether jpeg image/s is a replacement forgery by determining whether a first portion of individual image which resides at a known location (known likely to be replaced by forger) within the individual jpeg image has been replaced, including: indicator, face-djpg, for the first portion at known location; computing indicator, aka nonface-djpg, for a second portion of individual image which resides at a comparison location within the jpeg image known as unlikely to be replaced by a forger; and determining whether face-djpg and nonface-djpg fulfill predetermined logical criterion and deciding whether the individual jpeg image is a replacement forgery accordingly.Type: ApplicationFiled: July 16, 2018Publication date: January 17, 2019Inventors: Ron ATZMON, Sergey MARKIN, Yael MOSCOVITZ, Vadim VERESCHAGIN