Patents by Inventor Vahid Esfandyarpour

Vahid Esfandyarpour has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Inspection and metrology using broadband infrared radiation
    Patent number: 11662646
    Abstract: Systems and methods for measuring or inspecting semiconductor structures using broadband infrared radiation are disclosed. The system may include an illumination source comprising a pump source configured to generate pump light and a nonlinear optical (NLO) assembly configured to generate broadband IR radiation in response to the pump light. The system may also include a detector assembly and a set of optics configured to direct the IR radiation onto a sample and direct a portion of the IR radiation reflected and/or scattered from the sample to the detector assembly.
    Type: Grant
    Filed: October 26, 2017
    Date of Patent: May 30, 2023
    Assignee: KLA Corporation
    Inventors: Yung-Ho Alex Chuang, Vahid Esfandyarpour, John Fielden, Baigang Zhang, Yinying Xiao Li
  • Inspection and Metrology Using Broadband Infrared Radiation
    Publication number: 20180224711
    Abstract: Systems and methods for measuring or inspecting semiconductor structures using broadband infrared radiation are disclosed. The system may include an illumination source comprising a pump source configured to generate pump light and a nonlinear optical (NLO) assembly configured to generate broadband IR radiation in response to the pump light. The system may also include a detector assembly and a set of optics configured to direct the IR radiation onto a sample and direct a portion of the IR radiation reflected and/or scattered from the sample to the detector assembly.
    Type: Application
    Filed: October 26, 2017
    Publication date: August 9, 2018
    Inventors: Yung-Ho Alex Chuang, Vahid Esfandyarpour, John Fielden, Baigang Zhang, Yinying Xiao Li