Abstract: The present invention discloses an SAW sensor device using a slit acoustic wave and a method thereof. The SAW sensor device using the slit acoustic wave includes a piezoelectric medium having a thin membrane at its one portion, a medium at the other portion, and a narrow slit which the slit acoustic wave passes through at its inside, an input IDT formed at the outer portion in the narrow slit of the piezoelectric medium, for transducing an electric input signal into the slit acoustic wave, and an output IDT formed at the outer portion opposite to the input IDT, for receiving the propagated slit acoustic wave and transducing the wave into an electric signal, whereby an external pressure transmitted to the device is sensed.

Abstract: A single crystal substrate and a cutting method thereof are provided. The single crystal substrate includes a langasite substrate with a SAW propagation surface; and input and output IDTs having electrodes on the surface for launching and/or detecting surface acoustic waves, wherein a direction of surface wave propagation is parallel to an X?-axis, and the substrate farther has an Z?-axis perpendicular to the surface and a Y?-axis parallel to the surface and perpendicular to the X?-axis, the langasite substrate having a crystal orientation defined by modified axes X, Y and Z, the relative orientation of axes X?, Y? and Z? being defined by Euler angles ?, ? and ?, in which ? is in a range of 8°???25°, ? in a range of 15°???30°, and ? is in a range of 55°???85°.

Abstract: The present invention discloses an SAW sensor device using a slit acoustic wave and a method thereof. The SAW sensor device using the slit acoustic wave includes a piezoelectric medium having a thin membrane at its one portion, a medium at the other portion, and a narrow slit which the slit acoustic wave passes through at its inside, an input IDT formed at the outer portion in the narrow slit of the piezoelectric medium, for transducing an electric input signal into the slit acoustic wave, and an output IDT formed at the outer portion opposite to the input IDT, for receiving the propagated slit acoustic wave and transducing the wave into an electric signal, whereby an external pressure transmitted to the device is sensed.

Abstract: Disclosed is a single crystal substrate and a cutting method thereof. A single crystal substrate includes a langasite substrate with a SAW propagation surface; and input and output IDTs having electrodes on the surface for launching and/or detecting surface acoustic waves, wherein a direction of surface wave propagation is parallel to an X?-axis, and the substrate further has an Z?-axis perpendicular to the surface and a Y?-axis parallel to the surface and perpendicular to the X?-axis, the langasite substrate having a crystal orientation defined by modified axes X, Y and Z, the relative orientation of axes X?, Y?and Z? being defined by Euler angles ?, ? and 104 , in which ? is in a range of 80°???25°, ? is in a range of 15°???30°, and ? is in a range of 55°???85°.