Patents by Inventor Valentin Rio

Valentin Rio has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Detection of nontransient processing anomalies in vacuum manufacturing process
    Patent number: 6740195
    Abstract: A sensor, such as a mass spectrometer, capable of detecting the presence of materials in a sampled gas is interconnected with a processing chamber of a vacuum manufacturing tool. The sensor includes a timing circuit which is activated only if certain levels of specific materials are detected. Furthermore, the timer is set to run a predetermined time interval after activation so as to discriminate between known transient processing conditions and the presence of impurities which can greatly influence the manufacturing process. When the timer exceeds the predetermined time duration, an output signal can alert the process operator or automatically shutdown the manufacturing tool.
    Type: Grant
    Filed: August 30, 2002
    Date of Patent: May 25, 2004
    Assignee: Leybold Inficon, Inc.
    Inventors: Louis C. Frees, Valentin Rio
  • Detection of nontransient processing anomalies in vacuum manufacturing process
    Publication number: 20030008422
    Abstract: A sensor, such as a mass spectrometer, capable of detecting the presence of materials in a sampled gas is interconnected with a processing chamber of a vacuum manufacturing tool. The sensor includes a timing circuit which is activated only if certain levels of specific materials are detected. Furthermore, the timer is set to run a predetermined time interval after activation so as to discriminate between known transient processing conditions and the presence of impurities which can greatly influence the manufacturing process. When the timer exceeds the predetermined time duration, an output signal can alert the process operator or automatically shutdown the manufacturing tool.
    Type: Application
    Filed: August 30, 2002
    Publication date: January 9, 2003
    Applicant: Leybold Inficon, Inc.
    Inventors: Louis C. Frees, Valentin Rio
  • Detection of nontransient processing anomalies in vacuum manufacturing process
    Patent number: 6468814
    Abstract: A sensor, such as a mass spectrometer, capable of detecting the presence of materials in a sampled gas is interconnected with a processing chamber of a vacuum manufacturing tool. The sensor includes a timing circuit which is activated only if certain levels of specific materials are detected. Furthermore, the timer is set to run a predetermined time interval after activation so as to discriminate between known transient processing conditions and the presence of impurities which can greatly influence the manufacturing process. When the timer exceeds the predetermined time duration, an output signal can alert the process operator or automatically shutdown the manufacturing tool.
    Type: Grant
    Filed: July 21, 1999
    Date of Patent: October 22, 2002
    Assignee: Leybold Inficon, Inc.
    Inventors: Louis C. Frees, Valentin Rio