Patents by Inventor Valerio PEREZ

Valerio PEREZ has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Topography driven OPC and lithography flow
    Patent number: 9064084
    Abstract: Enhancements in lithography for forming an integrated circuit are disclosed. The enhancements include a topography analysis of a design data file to obtain accumulative topography information for different mask levels. The topography information facilitates topography driven optical proximity correction and topography driven lithography.
    Type: Grant
    Filed: April 24, 2014
    Date of Patent: June 23, 2015
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Ushasree Katakamsetty, Yang Qing, Wee Kwong Yeo, Chiu Wing Hui, Shyue Fong Quek, Valerio Perez
  • TOPOGRAPHY DRIVEN OPC AND LITHOGRAPHY FLOW
    Publication number: 20140282300
    Abstract: Enhancements in lithography for forming an integrated circuit are disclosed. The enhancements include a topography analysis of a design data file to obtain accumulative topography information for different mask levels. The topography information facilitates topography driven optical proximity correction and topography driven lithography.
    Type: Application
    Filed: April 24, 2014
    Publication date: September 18, 2014
    Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Ushasree KATAKAMSETTY, Yang QING, Wee Kwong YEO, Chiu Wing HUI, Shyue Fong QUEK, Valerio PEREZ