Patents by Inventor Valerl Fell

Valerl Fell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ECR PLASMA SOURCE
    Publication number: 20090242131
    Abstract: The invention relates to an ECR plasma source comprising a coaxial microwave supply line with an internal conductor and an external conductor, wherein the internal conductor with one end as the antenna passes through a vacuum flange in insulated fashion, which vacuum flange closes off an opening in the wall to the plasma space. A multipole magnet arrangement is provided coaxially with respect to the microwave supply line and its magnetic fields pass through the vacuum flange and form an annular-gap magnetic field in the plasma space coaxially with respect to the antenna.
    Type: Application
    Filed: August 8, 2007
    Publication date: October 1, 2009
    Applicant: Roth & Rau AG
    Inventors: Joachim Mai, Valerl Fell, Bernd Rau