Abstract: In an approach to improve the field of photoacid generators (PAGs) through a new photoacid generator, in particular to a photoacid generator comprising a new polycyclic aromatic photoacid generator compound anion, and a photoresist composition, comprising said photoacid generator. Embodiments the present invention relate to a method of generating an acid using said photoresist composition and a method of forming a patterned materials feature on a substrate.

Abstract: The present invention relates to a novel photoacid generator compound cation, comprising an element having for 92 eV photons (extreme ultraviolet (EUV)) an absorption cross section of at least 0.5×107·cm2/mol; having at least two stable oxidation states; and selected from the elements of group 1 to group 15 of the periodic table of the elements. Additionally, the present invention relates to a photoacid generator comprising said photoacid generator compound cation and an anion. Furthermore, the present invention aims to provide a photoresist composition comprising said photoacid generator and an acid labile polymer. Finally, the present invention relates to a method of generating an acid using the photoresist composition and a method of forming a patterned materials feature on a substrate.

Abstract: An organometallic compound, composition, and dry photoresist or hardmask for extreme ultraviolet (EUV) lithography are disclosed. The organometallic compound includes at least one bismuth element selected from Bi(III) and Bi(V). The organometallic compound also includes at least one C1 to C6 alkyl ligand and at least one terminal or bridging ligand A (O, S, or N—R, where the R group in N—R is H or a C1 to C6 alkyl) bonded to the bismuth element. Methods for preparing the dry photoresist or hardmask composition and for using the composition to form patterned material features on a substrate are disclosed as well.

Abstract: Organometallic photoresists suitable for use in deep ultraviolet (DUV) or extreme ultraviolet (EUV) lithography are provided. The organometallic photoresists contain an organometallic molecule having least a metal element M selected from the group consisting of Bi, Sb, and mixtures thereof, and having an oxidation state of 3+, and at least one polymerizable group R. A method of forming a patterned materials feature on a substrate utilizing the organometallic photoresist compositions is also provided.

Abstract: The invention is notably directed to a computer-implemented method to generate a synthetic data set. The synthetic data set comprises a plurality of chemical documents and each of the plurality of chemical documents comprises a respective set of chemical objects. The method comprises a step of receiving configuration data, the configuration data comprising a set of configuration parameters for the data set. The method further comprises performing, in an iterative manner, for each of the plurality of chemical documents the steps of generating, by a structure generation module, a respective document structure for each of the respective chemical documents in accordance with the configuration data, generating, by a content generation module, the respective set of chemical objects for the respective chemical document and arranging the respective set of chemical objects on the respective chemical document.

Abstract: A method for predicting a reactant of a chemical reaction which results in a reaction product, such that a boundary condition is satisfied, is disclosed. The method comprises receiving records of molecule descriptions and related characteristic property values, generating training data for a machine-learning (ML) system for predicting a predefined characteristic property value of reaction products related to a reactant, and combining, for received records of the molecule descriptions, sub-structures of molecules described by the molecule descriptions using chemical rules to generate candidate reactants.

Abstract: The present invention relates to a novel photoacid generator compound cation, comprising an element having for 92 eV photons (extreme ultraviolet (EUV)) an absorption cross section of at least 0.5×107·cm2/mol; having at least two stable oxidation states; and selected from the elements of group 1 to group 15 of the periodic table of the elements. Additionally, the present invention relates to a photoacid generator comprising said photoacid generator compound cation and an anion. Furthermore, the present invention aims to provide a photoresist composition comprising said photoacid generator and an acid labile polymer. Finally, the present invention relates to a method of generating an acid using the photoresist composition and a method of forming a patterned materials feature on a substrate.

Abstract: The present invention relates to a novel photoacid generator compound cation, comprising an element having for 92 eV photons (extreme ultraviolet (EUV)) an absorption cross section of at least 0.5×107·cm2/mol; having at least two stable oxidation states; and selected from the elements of group 1 to group 15 of the periodic table of the elements. Additionally, the present invention relates to a photoacid generator comprising said photoacid generator compound cation and an anion. Furthermore, the present invention aims to provide a photoresist composition comprising said photoacid generator and an acid labile polymer. Finally, the present invention relates to a method of generating an acid using the photoresist composition and a method of forming a patterned materials feature on a substrate.

Abstract: Splitting a natural language sentence into primitive phrases retaining relations of terms includes receiving a natural language sentence, building a parse tree from the natural language sentence using a natural language parser, and recursively identifying discourse markers in subtrees of the parse tree, starting with the highest ranking discourse marker in the parse tree, thereby separating each of the respective subtrees at the respective discourse marker using a set of predefined rules until a set of basic subtrees remains. The recursive identification includes looking-ahead for identifying long ranging discourse markers before identifying local discourse markers.

Abstract: A photoacid generator (PAG) anion, a photoresist composition, and a method are disclosed. The PAG anion includes a moiety, selected from an alkyl group, a monocyclic aromatic group, and a bicyclic aromatic group, that includes a carbon atom with a negative elementary charge. The PAG anion also includes an electron acceptor atom, selected from boron(III), aluminum(III), and phosphorus(V), which is covalently bonded to the carbon atom. The PAG anion also has at least one electron-withdrawing R group. The photoresist composition has a PAG that includes the PAG anion and a cation selected from triphenylsulfonium, diphenyliodonium, phenylthiolanium, and derivatives thereof. The method includes forming a layer of the photoresist composition over a material surface on a substrate, irradiating the layer to form a pattern of radiation-exposed regions, selectively removing portions of the irradiated layer to form exposed portions of the material surface, and etching or ion implanting the exposed portions.

Abstract: Organometallic photoresists suitable for use in deep ultraviolet (DUV) or extreme ultraviolet (EUV) lithography are provided. The organometallic photoresists contain an organometallic molecule having least a metal element M selected from the group consisting of Bi, Sb, and mixtures thereof, and having an oxidation state of 3+, and at least one polymerizable group R. A method of forming a patterned materials feature on a substrate utilizing the organometallic photoresist compositions is also provided.

Abstract: In an approach to improve the field of photoacid generators (PAGs) through a new photoacid generator, in particular to a photoacid generator comprising a new polycyclic aromatic photoacid generator compound anion, and a photoresist composition, comprising said photoacid generator. Embodiments the present invention relate to a method of generating an acid using said photoresist composition and a method of forming a patterned materials feature on a substrate.

Abstract: Splitting a natural language sentence into primitive phrases retaining relations of terms includes receiving a natural language sentence, building a parse tree from the natural language sentence using a natural language parser, and recursively identifying discourse markers in subtrees of the parse tree, starting with the highest ranking discourse marker in the parse tree, thereby separating each of the respective subtrees at the respective discourse marker using a set of predefined rules until a set of basic subtrees remains. The recursive identification includes looking-ahead for identifying long ranging discourse markers before identifying local discourse markers.

Abstract: The present invention relates to a novel photoacid generator compound cation, comprising an element having for 92 eV photons (extreme ultraviolet (EUV)) an absorption cross section of at least 0.5×107·cm2/mol; having at least two stable oxidation states; and selected from the elements of group 1 to group 15 of the periodic table of the elements. Additionally, the present invention relates to a photoacid generator comprising said photoacid generator compound cation and an anion. Furthermore, the present invention aims to provide a photoresist composition comprising said photoacid generator and an acid labile polymer. Finally, the present invention relates to a method of generating an acid using the photoresist composition and a method of forming a patterned materials feature on a substrate.

Abstract: Electrochemical energy storage devices are provided comprising an anode, a cathode and a solid-state electrolyte adapted for Na-ion conduction between the anode and cathode. The solid-state electrolyte includes, for example, a solid solution of doped NaAlO2 having a composition defined by one of Dx(NaAlO2)1-x in which D is at least one of GeO2, SnO2, TiO2, ZrO2 and HfO2, and Dx/2(NaAlO2)1-x in which D is PAlO4, where 0<x?0.5. Other solid-state electrolyte compositions are also disclosed.

Abstract: Querying a knowledge graph database in which entity data characterizes entities represented by nodes, interconnected by edges, of a knowledge graph, and each edge represents one of a set of relationships between entities which is applicable to the entities represented by nodes interconnected by that edge. A graphical user interface for display by a user computer enables definition, in response to user input, of an atomic query which is associated with a floating graphical query object in the interface. The atomic query defines an input set of said nodes for the query, a relationship and an output set of nodes for the query. Graphical connector and graphical logical-operator objects in the interface are manipulatable by a user in relation to a plurality of the query objects to define a complex query by constructing a graphical representation of a desired logical combination of the query objects.

Abstract: Electrochemical energy storage devices are provided comprising an anode, a cathode and a solid-state electrolyte adapted for Na-ion conduction between the anode and cathode. The solid-state electrolyte includes, for example, a solid solution of doped NaAlO2 having a composition defined by one of Dx(NaAlO2)1-x in which D is at least one of GeO2, SnO2, TiO2, ZrO2 and HfO2, and Dx/2(NaAlO2)1-x in which D is PAlO4, where 0<x?0.5. Other solid-state electrolyte compositions are also disclosed.

Abstract: Querying a knowledge graph database in which entity data characterizes entities represented by nodes, interconnected by edges, of a knowledge graph, and each edge represents one of a set of relationships between entities which is applicable to the entities represented by nodes interconnected by that edge. A graphical user interface for display by a user computer enables definition, in response to user input, of an atomic query which is associated with a floating graphical query object in the interface. The atomic query defines an input set of said nodes for the query, a relationship and an output set of nodes for the query. Graphical connector and graphical logical-operator objects in the interface are manipulatable by a user in relation to a plurality of the query objects to define a complex query by constructing a graphical representation of a desired logical combination of the query objects.

Abstract: A solid-state conductor with sodium oxoferrate structure is disclosed. The conductor may be used in battery applications where it is preferable to avoid the use of a liquid electrolyte. The conductor may be produced from an initial NaFeO2 chemical composition. So as to add defects and allow for sodium ion mobility, Fe(IV), Si, Sn, Ti, Zr, V, P, or S can be added. For example, (1?x)(NaFeO2)+x(XO2) can be melted with the corresponding oxide XO2, where X is Fe(IV), Si, Sn, Ti, Zr, V, P, or S, and x is between 0.1 and 0.5. These dopants generally preserve the crystallographic structure while decreasing the ion mobility barrier.

Abstract: A solid-state conductor with sodium oxoferrate structure is disclosed. The conductor may be used in battery applications where it is preferable to avoid the use of a liquid electrolyte. The conductor may be produced from an initial NaFeO2 chemical composition. So as to add defects and allow for sodium ion mobility, Fe(IV), Si, Sn, Ti, Zr, V, P, or S can be added. For example, (1-x)(NaFeO2)+x(XO2) can be melted with the corresponding oxide XO2, where X is Fe(IV), Si, Sn, Ti, Zr, V, P, or S, and x is between 0.1 and 0.5. These dopants generally preserve the crystallographic structure while decreasing the ion mobility barrier.