Abstract: Embodiments of a system and method for polishing substrates are provided. In one embodiment, a polishing system is provided that includes a polishing module having a platen, and a platen temperature control system. The platen temperature control system includes a PID controller, a fluid controller, and a heat exchanger. The flow controller is configured to control an amount of fluid provided from the heat exchanger to a channels of the platen in response to instructions provided by the PID controller.

Abstract: An apparatus and method for sequential application of cleaning fluids for improved maintenance of chemical mechanical polishing (CMP) systems is disclosed. A method includes transferring a first substrate to a first polishing station of a plurality of polishing stations, polishing the first substrate at the first polishing station, transferring the first substrate to a second polishing station, and transferring a second substrate to the first polishing station. The method includes cleaning a first surface of a plurality of surfaces of the polishing system by dispensing a first cleaning fluid from a first one or more nozzles of a plurality of nozzles to direct the first cleaning fluid onto the first surface and dispensing a second cleaning fluid from the first one or more nozzles to direct the second cleaning fluid onto the first surface, where the second cleaning fluid is different from the first cleaning fluid.

Abstract: Apparatus and methods relating to chemical mechanical polishing (CMP) are described herein. An edge load ring (ELR) is configured to fit inside a retaining ring of a CMP head. The ELR includes an annular body having an inner surface and an outer surface opposite the inner surface, the outer surface having a diameter configured to slip inside a retaining ring. The annular body includes a body portion formed from a first material and a bottom projection extending below the body portion. The bottom projection has a bottom surface facing away from the body portion, and the bottom projection is formed form a second material different from the first material. The annular body includes a venting feature formed through the annular body, the venting feature being in fluid communication between the inner and outer surfaces.

Abstract: An apparatus and method for sequential application of cleaning fluids for improved maintenance of chemical mechanical polishing (CMP) systems is disclosed. A method includes transferring a first substrate to a first polishing station of a plurality of polishing stations, polishing the first substrate at the first polishing station, transferring the first substrate to a second polishing station, and transferring a second substrate to the first polishing station. The method includes cleaning a first surface of a plurality of surfaces of the polishing system by dispensing a first cleaning fluid from a first one or more nozzles of a plurality of nozzles to direct the first cleaning fluid onto the first surface and dispensing a second cleaning fluid from the first one or more nozzles to direct the second cleaning fluid onto the first surface, where the second cleaning fluid is different from the first cleaning fluid.

Abstract: Apparatus and methods relating to chemical mechanical polishing (CMP) are described herein. An edge load ring (ELR) is configured to fit inside a retaining ring of a CMP head. The ELR includes an annular body having an inner surface and an outer surface opposite the inner surface, the outer surface having a diameter configured to slip inside a retaining ring. The annular body includes a body portion formed from a first material and a bottom projection extending below the body portion. The bottom projection has a bottom surface facing away from the body portion, and the bottom projection is formed form a second material different from the first material. The annular body includes a venting feature formed through the annular body, the venting feature being in fluid communication between the inner and outer surfaces.

Abstract: A system and method for sequential single-sided CMP processing of opposite facing surfaces of a silicon carbide (SiC) substrate are disclosed. A method includes urging a first surface of a substrate against one of plurality of polishing pads, wherein the plurality of polishing pads are disposed on corresponding ones of a plurality of rotatable polishing platens. The method includes transferring, using the first side of the end effector, the substrate from the substrate carrier loading station to a substrate alignment station. The method includes transferring, using the first side of the end effector, the substrate from the substrate alignment station to a substrate carrier loading station. The method includes urging a second surface of the substrate against one of the plurality of polishing platens.

Abstract: Embodiments of a system and method for polishing substrates are provided. In one embodiment, a polishing system is provided that includes a polishing module having a platen, and a platen temperature control system. The platen temperature control system includes a PID controller, a fluid controller, and a heat exchanger. The flow controller is configured to control an amount of fluid provided from the heat exchanger to a channels of the platen in response to instructions provided by the PID controller.

Abstract: A water treatment composition includes a water soluble film formed into a sealed pouch. The pouch contains a composite of a phosphate removing substance, a polymer flocculant, or an enzyme, or any combination. The phosphate removing substance, the polymer flocculant, and the enzyme are bound to each other within the composite. The pouch is added to a body of water. The pouch dissolves to release the compounds and treat the water.

Abstract: A system for attaching handles to a workpiece, such as for attaching handles to a border material for a mattress. The system includes a pair of sewing heads movably mounted along a sewing area. The sewing heads can be moved from a first position for sewing the handles to the border in a first orientation, such as a horizontal orientation extending along the length of the border, to a second position for sewing the handles to the border in a different orientation, such as a vertical orientation extending across the width or height of the border.

Abstract: A system for attaching handles to a workpiece, such as for attaching handles to a border material for a mattress. The system includes a pair of sewing heads movably mounted along a sewing area. The sewing heads can be moved from a first position for sewing the handles to the border in a first orientation, such as a horizontal orientation extending along the length of the border, to a second position for sewing the handles to the border in a different orientation, such as a vertical orientation extending across the width or height of the border.

Abstract: A water treatment composition includes a water soluble film formed into a sealed pouch. The pouch contains a composite of a phosphate removing substance, a polymer flocculant, or an enzyme, or any combination. The phosphate removing substance, the polymer flocculant, and the enzyme are bound to each other within the composite. The pouch is added to a body of water. The pouch dissolves to release the compounds and treat the water.

Abstract: An automatic panel cutting and edge seaming system includes a series of side edge cutting and seaming assemblies that receive a fabric material and trim and sew seams along the side edges of the fabric material to form a desired width panel. Puller rolls pull the material through the side edge cutting and seaming assemblies and feed the trimmed and seamed fabric material to a cross-cut sewing assembly. After a sufficient length of fabric material has been fed to form a desired size panel, the cross-cut sewing assembly is engaged to cut and seam the end of the panel.

Abstract: A system for automatically attaching a flanging material to the edges of a panel such as for a mattress, including a work table on which the panel is supported and a sewing assembly having a sewing machine located along a path of travel of the panel across the work table. The flanging material is fed from a supply of flanging material located adjacent the sewing assembly, and is attached to the side edges and about the corners of the panel by the sewing machine of the sewing assembly. A clamp mechanism engages and holds the panel as the sewing machine of the sewing assembly attaches the flanging material about the corners of the panel.

Abstract: An automatic panel cutting and edge seaming system includes a series of side edge cutting and seaming assemblies that receive a fabric material and trim and sew seams along the side edges of the fabric material to form a desired width panel. Puller rolls pull the material through the side edge cutting and seaming assemblies and feed the trimmed and seamed fabric material to a cross-cut sewing assembly. After a sufficient length of fabric material has been fed to form a desired size panel, the cross-cut sewing assembly is engaged to cut and seam the end of the panel.

Abstract: An apparatus for attaching a gusset to a panel includes a gusset folder that receives and folds a gusset material to form the gusset. The panel is supported by a sewing table. A sewing machine is positioned relative to the sewing table so as to be able to sew the gusset to the panel. A gusset guide guides the gusset toward a selected edge of the panel so that the gusset is held in substantial alignment with the edge of the panel. An edge detector detects when a next edge of the panel is approaching the sewing machine. A turning mechanism is positioned along the sewing table and is moveable into engagement with the panel. The turning mechanism turns the panel relative to the sewing machine when the edge detector detects the next edge of the panel is approaching the sewing machine.

Abstract: A mobile fill station for filling propane cylinders by weight and volume. There can be up to three cabinets in the system wherein any one of the cabinets can have a beam scale with a hydraulic automatic stop device to stop filling automatically as the total weight of the cylinder reaches a pre-set scale limit. Any one of the cabinets can also include a flow meter to stop filling when an operator monitors an amount on the meter and manually stops propane flow. The cabinets could also include an electronic scale with a digital indicator where filling stops automatically as the total weight of the cylinder reaches a pre-set computer limit.

Abstract: An apparatus for attaching a gusset to a panel includes a gusset folder that receives and folds a gusset material to form the gusset. The panel is supported by a sewing table. A sewing machine is positioned relative to the sewing table so as to be able to sew the gusset to the panel. A gusset guides the gusset toward a selected edge of the panel so that the gusset is held in substantial alignment with the edge of the panel. An edge detector detects when a next edge of the panel is approaching the sewing machine. A turning mechanism is positioned along the sewing table and is moveable into engagement with the panel. The turning mechanism turns the panel relative to the sewing machine when the edge detector detects the next edge of the panel is approaching the sewing machine.

Abstract: An automatic border sewing system having a pre-feed assembly for feeding a length of material for forming a mattress border. A feed and cut assembly feeds the border material into a sewing station for forming mitered corners in the border material and thereafter cuts the border material to form a border of a desired length. The mitered border is moved to a closer station for closing the leading and trailing edges of the border.

Abstract: An automatic border sewing system having a pre-feed assembly for feeding a length of material for forming a mattress border. A feed and cut assembly feeds the border material into a sewing station for forming mitered corners in the border material and thereafter cuts the border material to form a border of a desired length. The mitered border is moved to a closer station for closing the leading and trailing edges of the border.