Abstract: Embodiments of a system and method for polishing substrates are provided. In one embodiment, a polishing system is provided that includes a polishing module having a platen, and a platen temperature control system. The platen temperature control system includes a PID controller, a fluid controller, and a heat exchanger. The flow controller is configured to control an amount of fluid provided from the heat exchanger to a channels of the platen in response to instructions provided by the PID controller.

Abstract: A method and apparatus are disclosed for safely suspending and resuming operation of an electronic device. The method comprises the step of generating a DUT-NXCLK-IN in response to a first NXCLK-IN to drive an electronic device 12 DUT-CLK-OUT is received from the device 12 wherein DUT-CLK-OUT comprises DUT-NXCLK-IN divided by a first value. ESYNER-CLK-OUT is generated by dividing NXCLK-IN by the first value. ESYNER-CLK-OUT is synchronized to signal-DUT-CLK-OUT. DUT-NXCLK-IN is disabled in response to a test grant signal TEST-GRANT when the ESYNER-CLK-OUT is in a predetermined one of a plurality of states. The disabled DUT-NXCLK-IN is re-enabled in response to the test grant signal TEST-GRANT when ESYNER-CLK-OUT is in the state immediately following the predetermined one of a plurality of states.