Patents by Inventor Van Q. Ton

Van Q. Ton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Deposition of thick BPSG layers as upper and lower cladding for optoelectronics applications
    Patent number: 7062141
    Abstract: Undercladding and uppercladding layers that form part of an optical waveguide are deposited with a thermal CVD technique. The optical waveguide has a structure in which optical cores are formed over the undercladding layer and in which the uppercladding layer is formed over and between the optical cores. Generally, the optical cores have a refractive index greater than a refractive index of the cladding layers. A borophosphosilicate-glass layer may be used as one or both of the cladding layers. Thick cladding layers may be formed by cyclically depositing and annealing portions of the layer.
    Type: Grant
    Filed: December 12, 2002
    Date of Patent: June 13, 2006
    Assignee: Applied Materials, Inc.
    Inventors: Rong Pan, Van Q. Ton
  • Deposition of thick BPSG layers as upper and lower cladding for optoelectronics applications
    Publication number: 20040114900
    Abstract: Undercladding and uppercladding layers that form part of an optical waveguide are deposited with a thermal CVD technique. The optical waveguide has a structure in which optical cores are formed over the undercladding layer and in which the uppercladding layer is formed over and between the optical cores. Generally, the optical cores have a refractive index greater than a refractive index of the cladding layers. A borophosphosilicate-glass layer may be used as one or both of the cladding layers. Thick cladding layers may be formed by cyclically depositing and annealing portions of the layer.
    Type: Application
    Filed: December 12, 2002
    Publication date: June 17, 2004
    Applicant: Applied Materials, INC.
    Inventors: Rong Pan, Van Q. Ton